A User's Guide to Vacuum Technology (O'Hanlon/Vacuum Technology 3e) || Appendix C: Material...

10
APPENDIX C Material Properties Appendix C.1 Outgassing Rates of Vacuum-Baked Metals 4 Material Treatment (10" Pa-m/s) Aluminum 15 h at 250°C Aluminum 20 h at 100°C 6061 Aluminum Copper 20 h at 100°C Copper (OHFC) 24 h at 100°C 24 h at 250°C Cr (OS%)cu (99.5%) alloy 24 h at 100°C 24 h at 250°C 304 Stainless steel a 30 h at 250°C Stainless steel 2 h at 850/900"C vacuum furnace 3 16L Stainless steel 2 h at 800°C vacuum furnace U15C Stainless steel 3 h vacuum furnace 1000°C +25 h glow discharge +200"C bake in situ vacuum bake at 360°C 53.0 5.3 1.3 146.0 2.90 0.181 0.375 0.357 400.0 27.0 46.0 2. I ~~~ ~ Source. Adapted with permission from Vacuum, 25, p. 347, R. J. Elsey. Copyright 1975, Pergamon Press. J. R. Young, J. Vac. Sci. Technol., 6,398 (1969); G. Moraw, Vacuum, 24, 125 (1974); H. J. Halama and J. C. Herrera, J. Vac. Sci. Technol., 13,463 (1976); Y. Koyatsu, H. Miki and F. Watanabe, Vacuum, 47,709 (1 996). R. L. Samuel, Vacuum, 20,295 (1970); R. Calder and G. Lewin, Br. J. Appl. Phys., 18, 1459 (1967). fR. Nuvolone, J. Vac. Sci. Technol., 14, 1210 (1977); 418 A User’s Guide to Vacuum Technology, 3rd Edition. John F. O’Hanlon Copyright 0 2003 John Wiley & Sons, Inc. ISBN: 0-471-27052-0

Transcript of A User's Guide to Vacuum Technology (O'Hanlon/Vacuum Technology 3e) || Appendix C: Material...

Page 1: A User's Guide to Vacuum Technology (O'Hanlon/Vacuum Technology 3e) || Appendix C: Material Properties

APPENDIX C

Material Properties

Appendix C.1 Outgassing Rates of Vacuum-Baked Metals

4

Material Treatment (10" Pa-m/s)

Aluminum 15 h at 250°C

Aluminum 20 h at 100°C

6061 Aluminum

Copper 20 h at 100°C

Copper (OHFC) 24 h at 100°C 24 h at 250°C

Cr (OS%)cu (99.5%) alloy 24 h at 100°C 24 h at 250°C

304 Stainless steel a 30 h at 250°C

Stainless steel 2 h at 850/900"C vacuum furnace

3 16L Stainless steel 2 h at 800°C vacuum furnace

U15C Stainless steel 3 h vacuum furnace 1000°C +25 h

glow discharge +200"C bake

in situ vacuum bake at 360°C

53.0

5.3

1.3

146.0

2.90 0.181

0.375 0.357

400.0

27.0

46.0

2. I ~~~ ~

Source. Adapted with permission from Vacuum, 25, p. 347, R. J. Elsey. Copyright 1975, Pergamon Press.

J. R. Young, J. Vac. Sci. Technol., 6,398 (1969); G. Moraw, Vacuum, 24, 125 (1 974); H. J. Halama and J. C. Herrera, J. Vac. Sci. Technol., 13,463 (1976); Y. Koyatsu, H. Miki and F. Watanabe, Vacuum, 47,709 (1 996). R. L. Samuel, Vacuum, 20,295 (1970);

R. Calder and G. Lewin, Br. J. Appl. Phys., 18, 1459 (1967). fR. Nuvolone, J. Vac. Sci. Technol., 14, 1210 (1977);

418

A User’s Guide to Vacuum Technology, 3rd Edition. John F. O’Hanlon Copyright 0 2003 John Wiley & Sons, Inc.

ISBN: 0-471-27052-0

Page 2: A User's Guide to Vacuum Technology (O'Hanlon/Vacuum Technology 3e) || Appendix C: Material Properties

Appendix C.2 Outgassing Rates of Unbaked Metals'

Material 41 410 Pa-m/s) al (10' Pa-m/s) alo

Aluminum (fresh) a

Aluminum (degassed 24 h) Aluminum (3 h in air) Aluminum (fresh) a

Aluminum (anodized 2-pn pores) " Aluminum (bri t-rolled) ' Duraluminum Brass (wave guide) ' Copper (fresh) a

Copper (mechanically polished) Copper, OHFC (fresh) Copper, OHFC (mechanically polished) Copper, OHFC (20°C) Chrome (OS%>Copper, OFE (99.5%) Gold (wire'fresh) Mild steel Mild steel (slightly rusty) ' Mild steel (chromium-plated polished) ' Mild steel (aluminum spray coated) ' Steel (chromium-plated fresh) a

Steel (chromium-plated polished) a

Steel (nickel-plated fresh) a

Steel (nickel-plated) Steel (chemically nickel-plated fresh) a

Steel (chemically nickel-plated polished) a

Steel (descaled)" Molybdenum a

Stainless steel EN58B (AISI 321) ' Stainless steel 19/9/1-electropolished dd

-vapor degreased -Diversey cleaned

Stainless steel ' Stainless steel ' Stainless steel ICN 472 (fresh) a

Stainless steel ICN 472 (sanded) a

P

84.0 55.2 88.6 82.6

3679.0

2266.0 5332.0 533.0 46.7

251.0 25.0

-

- -

2105.0 7200.0 8000.0

133.0 800.0 94.0

121.0 56.5

368.0 111.0 69.6

4093.0 69.0 - - - -

2333.0 1200.0 180.0 110.0

Stainless steel NS22S (mechanically polished) " 22.8 Stainless steel NS22S (electropolished) 57.0 Stainless steel a 192.0 Zinc " 2946.0 Titanium 150.0 Titanium " 53.0

1 .o 3.2 1.9 1 .o 0.9

0.75 2.0 1 .o 1 .o 1.3 1.1

-

- - 2.1 1 .o 3.1 1 .o 0.75 1 .o 1 .o 0.9 1.1 1 .o 1 .o 0.6 1 .o - - - - 1.1 0.7 0.9 1.2 0.5 1 .o 1.3 1.4 0.6 1 .o

8.0 4.08 6.33 4.33

429.0 100.0 467.0 133.0 55.3

16.8 4.75

2.17 0.408 0.102 6.8

667.0 173.0 12.0

133.0 7.7

10.7 6.6 3.1 1 9.4 6.13

3933.0 4.89

19.0 2.7 1.3 4.0

280.0 267.0

19.6 13.9 6.1 5.7

18.0 429.0 24.5 4.91

1 .o 0.9 0.9 0.9 0.9 1 .o 0.75 1.2 1 .o 1 .o 1.3 1.1 - - 1 .o 1 .o 1 .o

0.75 1 .o 1 .o 0.9 1.1 1 .o 1 .o 0.7 1 .o 1.6

-

- - - 0.75 0.75 0.9 0.8 0.7 1 .o 1.9 0.8 1.1 1 .o

~ ~~~

Source. Reprinted with permission from Vacuum, 25, p 347, R. J. Elsey. Copyright 1975, Pergamon Press. ' qm = qt-aa , where n is in hours. See Fig. 4.6 for a detailed explanation. a A. Schram, Le Vide, No. 103,55 (1963),

B. B. Dayton, Trans. 6th Natl. Vac. M p . (1 959), Pergamon Press, New Yo& 1 960, p. 10 1, Y. Koyatsu, H. Miki, and F. Watanabe, Vacuum, 47,709 (1 996), R. S. Barton and R. P. Govier, Proc. 4th Int. Vac. Congr. (1968), Institute of Physics and

the Physical Society, London, 1969, p. 775, and Vacuum, 20, 1 (1970).

479

Page 3: A User's Guide to Vacuum Technology (O'Hanlon/Vacuum Technology 3e) || Appendix C: Material Properties

Appendix C.3 Outgassing Rates of Ceramics and Glasses'

Material 41 410

( 1 o - ~ P a d s ) a1 ( 1 o - ~ Pa-m/s) a10

Steatiteb 1200.0 1 .O 127.0 - Pyrophyllite' 2667.0 1 .o 267.0 - Pyrex (freshP 98.0 1.1 7.3 - Pyrex (I month in air)d 15.5 0.9 2.1 -

Source. Reprinted with permission from Vacuum, 25, p. 347, R. J. Elsey. Copyright 1975, Pergamon Press. a qn = q t - = n , where n is in hours. See Fig. 4.6 for a detailed explanation.

R. Geller, Le Vide, No. 13, 71 (1958). R. Jaeckel and F. Schittko, quoted by Elsey. B. B. Dayton, Trans. 6th Natl. Symp. Vac. Technol. (1959), Pergamon Press, New York,

1960, p. 101.

Appendix C.4 Outgassing Rates of Elastomers'

Material

Butyl DR41' 200.0 0.68 53.0 0.64 Neopreneb 4000.0 0.4 2400.0 0.4 Perbunan" 467.0 0.3 293.0 0.5 Silicone' 930.0 - 267.0 - Viton A (freshp 152.0 0.8 - - Viton A (bake 12 h at 2OOOC)' - - 0.023' - Polyimide (bake 12 h at 300°C)e - - 0.00s' -

~~

Source. Adapted with permission from Vacuum, 25, p. 347, R. J. Elsey. Copyright 1975, Pergamon Press. a qn = qt-'- , where n is in hours. See Fig. 4.6 for a detailed explanation.

J. Blears, E. J. Greer, and J. Nightengale, Adv. Vac. Sci. Technol., Vol. 2., E. Thomas, Ed., Pergamon Press, 1960, p. 473. ' D. J. Santeler, et al., Vacuum Technology and Space Simulation, NASA SP-105, National Aeronautics and Space Administration, Washington, LX, 1966, p. 219.

fF'umping time is 12 h.

A. Schram, Le Vide, No. 103,55 (1963). P. Hait, Vacuum, 17, 547 (1967).

480

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App

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8

Page 5: A User's Guide to Vacuum Technology (O'Hanlon/Vacuum Technology 3e) || Appendix C: Material Properties

P

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App

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Page 6: A User's Guide to Vacuum Technology (O'Hanlon/Vacuum Technology 3e) || Appendix C: Material Properties

App

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Cur

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Page 7: A User's Guide to Vacuum Technology (O'Hanlon/Vacuum Technology 3e) || Appendix C: Material Properties

e

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Page 8: A User's Guide to Vacuum Technology (O'Hanlon/Vacuum Technology 3e) || Appendix C: Material Properties

Appendix C.7 Outgassing Rates of Polymers"

Material

Araldite (molded)b Araldite D" Araldite F" Kel-Fd Methyl Methacrylate' Mylar (24-h at 95% RH)f Nylong Plexiglas' Plexiglas" Polyester-glass Laminated Polystyrened PTFE' PVC (24-h at 95% RHY Teflonh

155.0 253.0 200.0

5.0 560.0 307.0

1600.0 96.1

413.0 333.0

2667.0 40.0

113.0 8.7

0.8 0.3 0.5 0.57 0.9 0.75 0.5 0.44 0.4 0.84 1.6 0.45 1.0 0.5

47.0 167.0 97.0 2.3

187.0 53.0

800.0 36.0

240.0 107.0 267.0 26.0 2.7 3.3

0.8 0.5 0.5 0.53 0.57

0.5 0.44 0.4 0.81 1.6 0.56

0.2

-

-

Source. Reprinted with permission from Vacuum, 25, p. 347, R. J. Elsey, Copyright 1975, Pergamon Press. a qn = q t r - a m , where n is in hours. See Fig. 4.6 for a detailed explanation. * A. Schram, Le Vide, No. 103,55 (1963). " R. Geller, Le Vide, No. 13,71 (1958).

B. B. Dayton, CVC Technical Report. J. Blears, E. J. Greer and J. Nightengale, A h . Vac. Sci. Technol., Vol. 2, E. Thomas, Ed.,

Pergamon Press, 1960, p. 473. 'D. J. Santeler, Tram. 5th @mp. Vm. Tech. (1958), Pergamon Press, New York, 1959, p. 1;

Pergamon Press, New York, 1960, p. 207. /I G. Thieme, Vacuum, 13, 137 (1 963).

York, 1960, p.101.

B. D. Power and D. J. Crawley, A h . Vuc. Sci. Technol., Vol. 1, E. Thomas, Ed.,

B. €3. Dayton, Trans. 6th Natl. Vuc. Sjmp. Vac. Technol. (1959), Pergamon Press, New

485

Page 9: A User's Guide to Vacuum Technology (O'Hanlon/Vacuum Technology 3e) || Appendix C: Material Properties

Appendix C.8

Performance-Recommended for

.. kj;fmmz kgfmmz J index

302

303S,Se

304

304L

304N

304LN

310

316

316L

316N

316LN

317

321

347

K E 22 60

X P 22 60

X X E 20 50

X x x E 18 48

X X X E 30 55-75

X x x x x E 28 55-75

x x x x G 23 65

X X E 22 50

X x x E 20 45

X X x x E 30 60

X x x x x E 30 60-80

x x E 24 60

x x X E 21 50

x x X G 22 50

- -

-

70

70

80

min 63

min 55

120

min 55

65

65

100

105

100

115

110

125

210

130

150

140

160

200

130

150 ~ ~~~~

Source. Reprinted with permission from Vacuum, 26, p. 287, C. Geyari. Copyright 1976, X = recommended, P = poor, Selection guide for vacuum and cryogenic equipment.

486

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Austenitie Stainless Steels"

Typical Composition, %

C Cr Ni Mo N others Description max

General purpose. Good resistance to abn. 0.12

0.15

0.08

0.03

0.06

0.03

0.025

0.08

0.03

0.07

0.03

0.08

0.08

17-19

17-19

18-20

l a 2 0

18.5

18.5

24-26

16-18

16-18

17-1 8

17.5

l a 2 0

17-19

aio

ai o

a 1 2

8-1 2

9.5

9.5

19-22

10-14 2-3

10-14 2-3

10-13 2.5-3

13 2.8

11-15 3 4

s 1 2

0.08 17-19 9-13

conosion. Good mechanical p-. Free machining lype. Good CO(TOSjOn resistance.

Low C variation of 302. Improved corrosion resistance after welding.

S, Se t 0.15

0.25 Mn 2 Improved mechanical properties.

0.18 Mn 2 preventscarbide precipitation. Improved mechanical properties. Extra low C

Hgh scale resistance. Superb m i o n resistance.

Very god comwion resistance in most media.

Extra low C variation of 316.

0.2 Mn 0.5-2 Improved mechanical propdies.

0.18 Mn 2 Prevents carbide precipitation. Improved mechanical properties. Extra low C

Hgher alloy content improws creep and conosion resistance of 316.

Stabilized4 prevents carbide precipitation. Improved comwion resistance after welding.

StabilizecCNb, Ta, prevent carbide predp. Improved corrosion resistance afler welding.

Ti t 5xC

Nb, Ta t 10xC

Pergamon Press. - = probable, - should be tested, E = excellent, G = good with precautions.

487