A User's Guide to Vacuum Technology (O'Hanlon/Vacuum Technology 3e) || Appendix C: Material...
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APPENDIX C
Material Properties
Appendix C.1 Outgassing Rates of Vacuum-Baked Metals
4
Material Treatment (10" Pa-m/s)
Aluminum 15 h at 250°C
Aluminum 20 h at 100°C
6061 Aluminum
Copper 20 h at 100°C
Copper (OHFC) 24 h at 100°C 24 h at 250°C
Cr (OS%)cu (99.5%) alloy 24 h at 100°C 24 h at 250°C
304 Stainless steel a 30 h at 250°C
Stainless steel 2 h at 850/900"C vacuum furnace
3 16L Stainless steel 2 h at 800°C vacuum furnace
U15C Stainless steel 3 h vacuum furnace 1000°C +25 h
glow discharge +200"C bake
in situ vacuum bake at 360°C
53.0
5.3
1.3
146.0
2.90 0.181
0.375 0.357
400.0
27.0
46.0
2. I ~~~ ~
Source. Adapted with permission from Vacuum, 25, p. 347, R. J. Elsey. Copyright 1975, Pergamon Press.
J. R. Young, J. Vac. Sci. Technol., 6,398 (1969); G. Moraw, Vacuum, 24, 125 (1 974); H. J. Halama and J. C. Herrera, J. Vac. Sci. Technol., 13,463 (1976); Y. Koyatsu, H. Miki and F. Watanabe, Vacuum, 47,709 (1 996). R. L. Samuel, Vacuum, 20,295 (1970);
R. Calder and G. Lewin, Br. J. Appl. Phys., 18, 1459 (1967). fR. Nuvolone, J. Vac. Sci. Technol., 14, 1210 (1977);
418
A User’s Guide to Vacuum Technology, 3rd Edition. John F. O’Hanlon Copyright 0 2003 John Wiley & Sons, Inc.
ISBN: 0-471-27052-0
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Appendix C.2 Outgassing Rates of Unbaked Metals'
Material 41 410 Pa-m/s) al (10' Pa-m/s) alo
Aluminum (fresh) a
Aluminum (degassed 24 h) Aluminum (3 h in air) Aluminum (fresh) a
Aluminum (anodized 2-pn pores) " Aluminum (bri t-rolled) ' Duraluminum Brass (wave guide) ' Copper (fresh) a
Copper (mechanically polished) Copper, OHFC (fresh) Copper, OHFC (mechanically polished) Copper, OHFC (20°C) Chrome (OS%>Copper, OFE (99.5%) Gold (wire'fresh) Mild steel Mild steel (slightly rusty) ' Mild steel (chromium-plated polished) ' Mild steel (aluminum spray coated) ' Steel (chromium-plated fresh) a
Steel (chromium-plated polished) a
Steel (nickel-plated fresh) a
Steel (nickel-plated) Steel (chemically nickel-plated fresh) a
Steel (chemically nickel-plated polished) a
Steel (descaled)" Molybdenum a
Stainless steel EN58B (AISI 321) ' Stainless steel 19/9/1-electropolished dd
-vapor degreased -Diversey cleaned
Stainless steel ' Stainless steel ' Stainless steel ICN 472 (fresh) a
Stainless steel ICN 472 (sanded) a
P
84.0 55.2 88.6 82.6
3679.0
2266.0 5332.0 533.0 46.7
251.0 25.0
-
- -
2105.0 7200.0 8000.0
133.0 800.0 94.0
121.0 56.5
368.0 111.0 69.6
4093.0 69.0 - - - -
2333.0 1200.0 180.0 110.0
Stainless steel NS22S (mechanically polished) " 22.8 Stainless steel NS22S (electropolished) 57.0 Stainless steel a 192.0 Zinc " 2946.0 Titanium 150.0 Titanium " 53.0
1 .o 3.2 1.9 1 .o 0.9
0.75 2.0 1 .o 1 .o 1.3 1.1
-
- - 2.1 1 .o 3.1 1 .o 0.75 1 .o 1 .o 0.9 1.1 1 .o 1 .o 0.6 1 .o - - - - 1.1 0.7 0.9 1.2 0.5 1 .o 1.3 1.4 0.6 1 .o
8.0 4.08 6.33 4.33
429.0 100.0 467.0 133.0 55.3
16.8 4.75
2.17 0.408 0.102 6.8
667.0 173.0 12.0
133.0 7.7
10.7 6.6 3.1 1 9.4 6.13
3933.0 4.89
19.0 2.7 1.3 4.0
280.0 267.0
19.6 13.9 6.1 5.7
18.0 429.0 24.5 4.91
1 .o 0.9 0.9 0.9 0.9 1 .o 0.75 1.2 1 .o 1 .o 1.3 1.1 - - 1 .o 1 .o 1 .o
0.75 1 .o 1 .o 0.9 1.1 1 .o 1 .o 0.7 1 .o 1.6
-
- - - 0.75 0.75 0.9 0.8 0.7 1 .o 1.9 0.8 1.1 1 .o
~ ~~~
Source. Reprinted with permission from Vacuum, 25, p 347, R. J. Elsey. Copyright 1975, Pergamon Press. ' qm = qt-aa , where n is in hours. See Fig. 4.6 for a detailed explanation. a A. Schram, Le Vide, No. 103,55 (1963),
B. B. Dayton, Trans. 6th Natl. Vac. M p . (1 959), Pergamon Press, New Yo& 1 960, p. 10 1, Y. Koyatsu, H. Miki, and F. Watanabe, Vacuum, 47,709 (1 996), R. S. Barton and R. P. Govier, Proc. 4th Int. Vac. Congr. (1968), Institute of Physics and
the Physical Society, London, 1969, p. 775, and Vacuum, 20, 1 (1970).
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Appendix C.3 Outgassing Rates of Ceramics and Glasses'
Material 41 410
( 1 o - ~ P a d s ) a1 ( 1 o - ~ Pa-m/s) a10
Steatiteb 1200.0 1 .O 127.0 - Pyrophyllite' 2667.0 1 .o 267.0 - Pyrex (freshP 98.0 1.1 7.3 - Pyrex (I month in air)d 15.5 0.9 2.1 -
Source. Reprinted with permission from Vacuum, 25, p. 347, R. J. Elsey. Copyright 1975, Pergamon Press. a qn = q t - = n , where n is in hours. See Fig. 4.6 for a detailed explanation.
R. Geller, Le Vide, No. 13, 71 (1958). R. Jaeckel and F. Schittko, quoted by Elsey. B. B. Dayton, Trans. 6th Natl. Symp. Vac. Technol. (1959), Pergamon Press, New York,
1960, p. 101.
Appendix C.4 Outgassing Rates of Elastomers'
Material
Butyl DR41' 200.0 0.68 53.0 0.64 Neopreneb 4000.0 0.4 2400.0 0.4 Perbunan" 467.0 0.3 293.0 0.5 Silicone' 930.0 - 267.0 - Viton A (freshp 152.0 0.8 - - Viton A (bake 12 h at 2OOOC)' - - 0.023' - Polyimide (bake 12 h at 300°C)e - - 0.00s' -
~~
Source. Adapted with permission from Vacuum, 25, p. 347, R. J. Elsey. Copyright 1975, Pergamon Press. a qn = qt-'- , where n is in hours. See Fig. 4.6 for a detailed explanation.
J. Blears, E. J. Greer, and J. Nightengale, Adv. Vac. Sci. Technol., Vol. 2., E. Thomas, Ed., Pergamon Press, 1960, p. 473. ' D. J. Santeler, et al., Vacuum Technology and Space Simulation, NASA SP-105, National Aeronautics and Space Administration, Washington, LX, 1966, p. 219.
fF'umping time is 12 h.
A. Schram, Le Vide, No. 103,55 (1963). P. Hait, Vacuum, 17, 547 (1967).
480
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App
endi
x C
.5
Per
mea
bilit
y of
Pol
ymer
ic M
ater
ials
"
Perm
eabi
lity
(lo-
" m
2/s)
Mat
eria
l N
itrog
en
Oxy
gen
Hyd
roge
n H
eliu
m
Wat
er V
apor
C
arbo
n D
ioxi
de
PTFE
Pe
rspe
x N
ylon
3 1
Neo
pren
e C
S236
8B
Vito
n K
apto
n B
una-
S Pe
rbun
an
Del
rin
Kel
-F
Ves
pel
Poly
viny
lidin
e chl
orid
e (S
aran
) M
ylar
Si
licon
e, di
met
hyl
Kal
rez-
dry
2.5'
- - 0.
21'
0.5'
(25)
0.
032'
4A
d (30
) 0.
8d
0.99
d (3
0)
0.00
07d
0.01
8g
- -
21O
h -
~~~
~
4.78
"(25
)
1.5'
1.
14'(2
5)
0.1'
48.0
d
-
-
-
-
0.46
d (3
0)
0.076
:(25)
0.
004
8.5g
3.11
'(25)
45
0h
20.O
b 2.
7'
0.13
' 8.
2'
8.7-
'(25)
1.
2"
- - - - - -
-
495h
-
570.
0'
0.3'
5.7b
7.9b
2.1C
15
/(25
)
1 .7g
26
3h
23.6
' (2
5)
-
-
-
218'
(25)
- -
-
17.0
d
3 1 .2'
$25
)
999
2850
0h
0.22
d (2
5)
1.06
125'
(25)
2.3/
(25)
0.
2"
940.
0d (3
0)
23.0
d (3
0)
92.7
d -
-
0.02
2 0.
37g
2030
h -
Mea
sure
men
ts m
ade
at 2
3T
unle
ss o
ther
wis
e not
ed in
par
enth
eses
afte
r the
val
ue.
' Rep
rint
ed w
ith p
erm
issi
on from
Vac
uum
, 25,
p.
469,
G.
F. W
esto
n. C
opyr
ight
197
5, P
erga
mon
Pre
ss.
Dat
a de
rived
by
Wes
ton from
mea
sure
men
ts m
ade
by B
arto
n re
porte
d by
J. R
. Bai
ley
in H
andb
ook of
Vuc
uum
Physics, 3,
Par
t 4, P
erga
mon
Pre
ss, O
xfor
d, 1
964.
' R
epri
nted
with
per
mis
sion
from
J. V
ac. S
ci. T
echn
ol.,
10, p
. 543
, W. G
. Per
kins
. Cop
yrig
ht 1
973,
The
Am
eric
an V
acuu
m S
ocie
ty.
Adm
inis
trat
ion,
Was
hing
ton,
DC
, 19
66, p
. 216
.
mea
sure
men
ts in
an
ultr
apur
e nitr
ogen
gas
str
eam
. /D
ata
take
n from L
. Lau
rens
on a
nd N
. T. M
. Den
nis,
J.
Vac
. Sci. T
echn
ol. A
, 3, 1
701
(198
5). D
ata
at 2
5"C
, from
plot
in F
ig.
16.8
, lef
t.
Rep
rint
ed w
ith p
erm
issi
on f
rom
Vac
uum
Sci
ence
and
Spa
ce S
imul
atio
n, D
. J. S
ante
ler e
t al.,
NA
SA S
P-10
5, N
atio
nal A
eron
autic
s and
Spa
ce
Dat
a ta
ken
ftom
C. M
a, E
. Sh
ero,
N.
Ver
ma,
S. G
ilber
t, an
d F.
Sha
dman
, Jou
rnal
oft
he
IES,
Mar
cWA
pril,
199
5. p
. 43
, us
ing
trac
er g
as
Dat
a ta
ken from M
. Map
es, H
. C. H
seuk
, and
W. S
. Tia
ng, J
. V
uc. S
ci. T
echn
ol. A
, 12, 16
99 (1
994)
. D
ata
take
n from I
ntro
duct
ion
to M
ass
Spec
tros
copy
, Var
ian
Ass
ocia
tes,
Pal
o A
lto,
1980
, p. 4
9.
8
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P
h) m
- W I
E
E I
L 2 C
.- 2 E! 3
fn
fn
n. O a
L- 5
App
endi
x C
.6
Vap
or P
ress
ure
Cur
ves o
f the
Sol
id a
nd L
iqui
d E
lem
ent-
Shee
t A
Tem
per
atu
re D
egre
es C
enti
gra
de
-50
0
50
100
200
300
400
MO
EW
80
0 K
MO
15
00
xx
x)
3XO
4o
W
XC
U 6000'000
I'
I 'l'-,l.ll
I I
1
'1 !
I Fl
1I
"l
1
C
.- 2 2 3
fn
fn
Q
L
0
Q F
- 10
'
- 10
3
- 1
0' - m
0
-I
fn B
- 16'
Tem
per
atu
re D
egre
es K
elvi
n
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App
endi
x C
.6
Vap
or P
ress
ure
Cur
ves o
f the
Sol
id a
nd L
iqui
d E
lem
ents
-Sh
eet
B
Tem
pera
ture
Deg
rees
Cen
tiK
ade
-10
0
10
m
200
~400500600 8M
)m
1
x0
3ooo
4o
5J
so
oo
8o
oo
7o
oo
I
' ' '
1 I
1
' ' " ' '
' '
' ' I (
1 "
FT
Ti-
i-
l
- 10
'
- 10
1
- lo
z
6
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e
2
App
endi
x C
.6 V
apor
Pre
ssur
e Curves o
f the
Sol
id a
nd L
iqui
d E
lem
ents
Sh
eet C
Tem
per
atu
re D
egre
es C
enti
Ead
e - 4o
oo
xyx)
Ma
)lo
m
-w
0
M
KM
2w
y
w)
.4
00
xx
)~
ax, ooo
uoo
I' "
'"
'"
1~
~~
'
' 'I '
','I
''T
mr
-n
'l I
11
' 1'-
- 10'
- 10. - 10'
-lo*
Sour
ce. R
epri
nted
with
per
mis
sion
from
RC
A R
evie
w, 3
0, p
. 28
5, J
une
1969
, Vap
or P
ress
ure
Dat
a fo
r th
e So
lid a
nd L
iqui
d E
lem
ents
, by
R. E
. Hoe
nig
and
D. A
. Kra
rner
. Cop
yrig
ht 1
969,
RC
A C
orp.
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Appendix C.7 Outgassing Rates of Polymers"
Material
Araldite (molded)b Araldite D" Araldite F" Kel-Fd Methyl Methacrylate' Mylar (24-h at 95% RH)f Nylong Plexiglas' Plexiglas" Polyester-glass Laminated Polystyrened PTFE' PVC (24-h at 95% RHY Teflonh
155.0 253.0 200.0
5.0 560.0 307.0
1600.0 96.1
413.0 333.0
2667.0 40.0
113.0 8.7
0.8 0.3 0.5 0.57 0.9 0.75 0.5 0.44 0.4 0.84 1.6 0.45 1.0 0.5
47.0 167.0 97.0 2.3
187.0 53.0
800.0 36.0
240.0 107.0 267.0 26.0 2.7 3.3
0.8 0.5 0.5 0.53 0.57
0.5 0.44 0.4 0.81 1.6 0.56
0.2
-
-
Source. Reprinted with permission from Vacuum, 25, p. 347, R. J. Elsey, Copyright 1975, Pergamon Press. a qn = q t r - a m , where n is in hours. See Fig. 4.6 for a detailed explanation. * A. Schram, Le Vide, No. 103,55 (1963). " R. Geller, Le Vide, No. 13,71 (1958).
B. B. Dayton, CVC Technical Report. J. Blears, E. J. Greer and J. Nightengale, A h . Vac. Sci. Technol., Vol. 2, E. Thomas, Ed.,
Pergamon Press, 1960, p. 473. 'D. J. Santeler, Tram. 5th @mp. Vm. Tech. (1958), Pergamon Press, New York, 1959, p. 1;
Pergamon Press, New York, 1960, p. 207. /I G. Thieme, Vacuum, 13, 137 (1 963).
York, 1960, p.101.
B. D. Power and D. J. Crawley, A h . Vuc. Sci. Technol., Vol. 1, E. Thomas, Ed.,
B. €3. Dayton, Trans. 6th Natl. Vuc. Sjmp. Vac. Technol. (1959), Pergamon Press, New
485
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Appendix C.8
Performance-Recommended for
.. kj;fmmz kgfmmz J index
302
303S,Se
304
304L
304N
304LN
310
316
316L
316N
316LN
317
321
347
K E 22 60
X P 22 60
X X E 20 50
X x x E 18 48
X X X E 30 55-75
X x x x x E 28 55-75
x x x x G 23 65
X X E 22 50
X x x E 20 45
X X x x E 30 60
X x x x x E 30 60-80
x x E 24 60
x x X E 21 50
x x X G 22 50
- -
-
70
70
80
min 63
min 55
120
min 55
65
65
100
105
100
115
110
125
210
130
150
140
160
200
130
150 ~ ~~~~
Source. Reprinted with permission from Vacuum, 26, p. 287, C. Geyari. Copyright 1976, X = recommended, P = poor, Selection guide for vacuum and cryogenic equipment.
486
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Austenitie Stainless Steels"
Typical Composition, %
C Cr Ni Mo N others Description max
General purpose. Good resistance to abn. 0.12
0.15
0.08
0.03
0.06
0.03
0.025
0.08
0.03
0.07
0.03
0.08
0.08
17-19
17-19
18-20
l a 2 0
18.5
18.5
24-26
16-18
16-18
17-1 8
17.5
l a 2 0
17-19
aio
ai o
a 1 2
8-1 2
9.5
9.5
19-22
10-14 2-3
10-14 2-3
10-13 2.5-3
13 2.8
11-15 3 4
s 1 2
0.08 17-19 9-13
conosion. Good mechanical p-. Free machining lype. Good CO(TOSjOn resistance.
Low C variation of 302. Improved corrosion resistance after welding.
S, Se t 0.15
0.25 Mn 2 Improved mechanical properties.
0.18 Mn 2 preventscarbide precipitation. Improved mechanical properties. Extra low C
Hgh scale resistance. Superb m i o n resistance.
Very god comwion resistance in most media.
Extra low C variation of 316.
0.2 Mn 0.5-2 Improved mechanical propdies.
0.18 Mn 2 Prevents carbide precipitation. Improved mechanical properties. Extra low C
Hgher alloy content improws creep and conosion resistance of 316.
Stabilized4 prevents carbide precipitation. Improved comwion resistance after welding.
StabilizecCNb, Ta, prevent carbide predp. Improved corrosion resistance afler welding.
Ti t 5xC
Nb, Ta t 10xC
Pergamon Press. - = probable, - should be tested, E = excellent, G = good with precautions.
487