APPENDIX F

Pump Fluid Properties

Appendix F.l Compatibility of Elastomers and Pump Fluids

Mineral Halo- Fluoro- Poly- Elastomer Oil Ester carbon carbon siloxane

Butyl

Buna-N Buna-S

Neoprene

EPR

Silicone

Viton

Teflon

Kalrez

No

<loooc No

4 2O0C

Yes

Yes

Yes

Yes

Yes

<lOO"C

No No

No

c100C"

475OC

-445°C

475°C

475°C

No data

<loooc No

420°C

Yes

No

Yes

Yes

Yes

<9OoC

<90°C No

<9OoC

c10"C"

-4 50°C

-300°C

<200"C

Yes

No

No No

No

No

No

Yes

Yes

Yes

No data available for T > 7OOC.

A User’s Guide to Vacuum Technology, 3rd Edition. John F. O’Hanlon Copyright 0 2003 John Wiley & Sons, Inc.

ISBN: 0-471-27052-0

Appendix F.2 Vapor Pressures of Mechanical Pump Fluids

10"

1 o2

1

lo-*

2(

Id

1 o - ~

1

1 o-f 20 50 100 150 200 300

Temperature ("C)

(1) Fomblin Y-H vac 18/8 [l], (2) Fomblin Y-L vac 25/5 [l], (3) Krytox 1525 [2]; (4) Fomblin Y-L vac 06/6 [l]; (5) Krytox 1618 [2]; (6) Krytox 1506, 1514 [2]; (7) Fyrquel-220 [3]; (8) Halovac-100 [4]; (9) Halovac-125 [4]; (10) Halovac-190 [4]; (11) Versilube F-50 [5]; (12) Synlube [6]; (13) Inland-77 [7]; (14) Inland-19 [7]; (15) Balzers P-3 [8]; (16) Welch Duo-Seal 1407 [9]; (17) Convoil-20 [lo]; (18) Balzers T-11 [S]; (19) Invoil-20 [7]; (20) Dow Coming FS-1265 [l 13.

499

Appendix F.3 Vapor Pressures of Diffusion Pump Fluids

lo2

1

1 o-2

1 o4

I

1 o-6

10" 20 50 100 150 200 300 Temperature ("C)

(A) Santovac-5 [ 121; (B) DC-702 [ 1 I]; (C) DC-704 [ 1 I], Neo Vac-SY [ 131; (D) DC-705 [I I]; (E) butyl phthalate; (F) Fomblin Y-H vac 18/8 [I]; (G) Fomblin Y-H vac 2519 [I]; (J5) Octoil [lo]; (I) Convoil-20 [lo]; (J) Octoil-S [lo]; (K) Krytox 1618 [2]; (L) Krytox 1625 [2]; (M) Invoil-20 [7]; (N) Edwards L9 [14]. The fluids grouped under (C) are not the same, but they have the nearly the same vapor pressure.

500

2000

1000

40d

20;

100

40

20

10

4

2

Appendix F.4 Kinematic Viscosity of Pump Fluids

(A) Balzers P-3 [4], Kinney KV-100 [15]; (B) Convoil-20 [lo]; (C) Inland-19 [7]; (D) Invoil-20 [7]; (E) Kinney OCR [15], Krytox 1525 and 1625 [2]; (F) Kinney Super X [15]; (G) Welch Duo-Seal 1407 [12], Krytox 1618 [2], Fomblin Y-H vac 18/8 [l]; (H) Inland-77 [7]; (I) Synlube [6]; (J) Balzers T-11 [8]; (K) Octoil [lo], Invoil [7]; (L) Octoil-S [lo]; (M) Fyrquel-220 [3]; (N) Kinlube 300 [15]; (0) Versilube F-50 [5]; (P) Santovac-5 [12]; (Q) Halovac 100 [4]; (R) Halovac 125 [4]; (S) Halovac 190 [4]; (T) Fomblin Y-L vac 06/6 [l], Krytox 1506 [2]; (U) Fomblin Y-L vac 14/6 [l], Krytox 1514 [2]; (V) Fomblin Y-L vac 2515, Y-H vac 2519 [l]; (W) Dow Coming FS-1265 [ll]. The fluids grouped under a common heading are not the same, but happen to have similar viscosities.

501

Appendix F.5 Kinematic Viscosity Conversion Factors

Savbolt Universal Redwood Seconds Engler Kinematic Seconds (SUS) at Degrees Viscosity 100°F 130°F 210°F 70°F 140°F 210°F at all (mm2/s) (37.8"C) (54.4"C) (98.8"C) (21.1"C) (60°C) (93.3"C) Temperatures

5.0 42.3 6.0 45.5 7.0 48.7 8.0 52.0 9.0 55.4

10.0 58.8 12.0 65.9 14.0 73.4 16.0 81.1 18.0 89.2 20.0 97.5 22.0 106.0 24.0 114.6 26.0 123.3 28.0 132.1 30.0 140.9 32.0 149.7 34.0 158.7 36.0 167.7 38.0 176.7 40.0 185.7 42.0 194.7 44.0 203.8 46.0 213.0 48.0 222.2 50.0 23 1.4 60.0 277.4 70.0 323.4 80.0 369.6 90.0 415.8

100.0a 462.0

42.4 45.6 48.8 52.1 55.5 58.9 66.0 73.5 81.3 89.4 97.7

106.2 114.8 123.5 132.4 141.2 150.0 159.0 168.0 177.0 186.0 195.1 204.2 213.4 222.6 23 1.8 277.9 324.0 370.3 416.6 462.9

42.6 45.8 49.0 52.4 55.8 59.2 66.4 73.9 81.7 89.8 98.2

106.7 115.4 124.2 133.0 141.9 150.8 159.8 168.9 177.9 187.0 196.1 205.2 214.5 223.8 233.0 279.3 325.7 372.2 41 8.7 465.2

37.9 40.5 43.2 46.0 48.9 51.7 57.9 64.4 71.0 77.9 85.0 92.4 99.9

107.5 115.3 123.1 131.0 138.9 146.9 155.0 163.0 171.0 179.1 187.1 195.2 203.3 243.5 283.9 323.9 364.4 404.9

38.5 41.0 43.7 46.4 49.1 52.0 58.1 64.6 71.4 78.5 85.8 93.3

100.9 108.6 116.5 124.4 132.3 140.2 148.2 156.2 164.3 172.3 180.4 188.5 196.6 204.7 245.3 286.0 326.6 367.4 408.2

38.9 41.5 44.2 46.9 49.7 52.6 58.8 65.3 72.2 79.4 86.9 94.5

102.2 110.0 118.0 126.0 134.1 142.2 150.3 158.3 166.7 175.0 183.3 191.7 200.0 208.3 250.0 291.7 333.4 375.0 416.7

1.40 1.48 1.56 1.65 1.75 1.84 2.02 2.22 2.43 2.64 2.87 3.10 3.34 3.58 3.82 4.07 4.32 4.57 4.83 5.08 5.34 5.59 5.85 6.1 1 6.37 6.63 7.90 9.21

10.53 11.84 13.16

At higher values use the same ratio as above for 100 mm2/s.

502

1. 2. 3. 4. 5. 6. 7. 8. 9.

Montedison, USA, Inc., 11 14 Ave. of the Americas, New York, NY 10036. Du Pont and Co., Chemicals and Pigments Department, Wilmington, DE 19898. Stauffer Chemical Company, Specialty Chemical Division, Westport, CN 06880. F l u o d h e m Corporation, 82 Burlews Court, Hackensack, NJ 07601. General Electric Company, Silicone Products Department, Waterford, NY 12188. Synthatron Corp., 50 Intervale Rd., Parsippany, NJ 07054. Inland Vacuum Industries, Inc., 35 Howard Ave., Churchville, NY 14428. Balzers High Vacuum, Furstentum, Liechtenstein. Sargent-Welch Scientific Co., Vacuum Products Division, 7300 N. Linder Ave. Skokie, IL 60077.

10. Veeco, Inc., 525 Lee Rd. Rochester, NY 14603. 11. Dow Corning Company, Inc., 2030 Dow Center, Midland, MI 48640. 12. Monsanto Company, 800 N. Lindbergh Blvd. St. Louis, MO 63166. 13. Varian Associates, Lexington Vacuum Division, 121 Hartwell Ave., Lexington, MA. 14. Edwards High Vacuum, Ltd. Manor Royal, Crawley, West Sussex, England. 15. Kinney Vacuum Co., 3529 Washington St., Boston, MA 02130.