Catherine Bunel

R&D Director

A unique 3D Silicon Capacitor with outstanding

performances in terms of DC leakage and reliability performances .

Agenda

• Introduction

• Ipdia core technology

• Application overview

• The IPDIA 3D Silicon capacitor

– Performances

– Reliability

• Conclusion

27/09/2011 2

Introduction

27/09/2011 3

• Miniaturization is a key growth driver

• Reliability and performance are key

considerations for the Medical

• Need to provide cost effective

productsCustomers Satisfaction

Cost of solutions

Miniaturization

Performances

Single IPD die

27/09/2011 4

A highly efficient way to integrate several passive components such as

resistors, capacitors,inductors, ESD diodes in a single die.

IPDIA Technology

27/09/2011 5

PICS process

Passive Integration Connecting Substrate

3D Capacitor

Silicon Substrate

27/09/2011 6

e

SC S0

Ipdia Core Technology

27/09/2011 7

Ipdia Core Technology

This Technology holds the world record

in performance with 250nF/mm² in production

Wireless

Smart card

Medical

Sensor

8

e-metering

High Brightness LED protection

27/09/2011

Billions of Products using IPDIA

technology

Military avionic

Oil exploration

Automotive

Pacemaker

Brain

stimulation

Learning

pacing

After, 1 component

49mm2, h=0.85mm

25 mm

7 mm

9

Before 2 active dies+ 100 components

PCB=600mm2, h= 2mm

PICS Amazing miniaturization

25 mm

Band Filter

DC feeds

Transceiver

Rx balun

Tx balun

PA matching

Decoupling,

PLL filter

PA

Magnification

Zoom on SIP

in HVQFN56

7 mm

10

PICS Amazing miniaturization

E-Pill , temperature sensor

WLP module including :

• 3 active dies flipped over an IPD Substrate

• 96 SMD components are integrated and

composed of RF capacitors, decoupling

capacitors, resistors, inductors, and PIN diode

11

PICS Amazing miniaturization

Sen

so

r

µCTRL

TX

27/09/2011 12

6.4

5 m

m

8 m

m

14 mm

11.2 mm

112 mm²

72 mm²

1.6mm height

1.2mm height

SMD & PCB technology

PICS technology

Complete RF Module

– RF Transceiver

– XO

– SAW Filter

– 400MHz & 2.4GHz Matching network

with integrated coils

– Decoupling capacitances

Using PICS technology :

40 % area decrease !

25 % height decrease !

PICS Amazing miniaturization

A breakthrough solution for:

1. High reliability Industries such as Medical, Avionics, Defense …etc.

2. High Temperature industries such as Oil and Gaz

Explorations, Geothermal energy …etc.

SILICON Capacitors as Pin to Pin replacement of

Ceramic and Tantalum Capacitors

27/09/2011 13

Capacitor array

Application PCB

480 m { 250 m

230 m

Low Profile Silicon Capacitor (LPSC)

27/09/2011 14

Typical 100nF Capacitor Thickness

Volume comparison of 1206 Case size capacitors

6 Times smaller

More than 2 times smaller

15

Oustanding performance for High

Temperature applications

For X7R 402 100nF capacitors the cumulated derating @ 200 C is -77%

For 3D Silicon capacitor , it is < 2%

Extreme stability

Exceptional low derating

27/09/2011 16

IPDIA 3D Silicon Capacitors

DC Voltage Stabilitytt

27/09/2011 17

IPDIA 3D Silicon Capacitors

Temperature stability

84.0

86.0

88.0

90.0

92.0

94.0

96.0

98.0

100.0

102.0

104.0

50 100 150 200 250 300

Temperature (°C)

Cp

(n

F)

PCM1PCM2PCM3PCM4PCM5

~50 ppm/ C[85-250 C]

100 nF , Capacitance Measurements @ 3V

On wafer 5 areas

27/09/2011 18

0.0E+00

5.0E-10

1.0E-09

1.5E-09

2.0E-09

2.5E-09

3.0E-09

3.5E-09

4.0E-09

4.5E-09

5.0E-09

0 20 40 60 80 100 120

Time (s)

Ip (

A)

Ip 85

Ip 200°C

Ip 250°C

Ip 275°C

Ip 300°C

I(120s) < 2 nA @ 300 C

DC leakage current (pA @ 3V) vs

Time & Temperature

C= 100nF I(120s) < 20pA @ 25 C

27/09/2011 19

DC leakage current (A) ,25°C

C= 12µF

100,0E-12

1,0E-9

10,0E-9

100,0E-9

1,0E-6

10,0E-6

100,0E-6

1,0E-3

10,0E-3

0 20 40 60 80 100 120

Leakag

e C

urr

en

t (A

)

Time (s)

IL(5v)

IL(3,6v)IL(120s) = 4 nA

IL(120s) = 55 nA

Ta capacitors

Reliability

27/09/2011 20

0,00E+00

1,00E+00

2,00E+00

3,00E+00

4,00E+00

5,00E+00

6,00E+00

X7R Ta PICS0

50000

100000

150000

200000

250000

300000

350000

400000

450000

X7R Ta PICS

Failure In Time

Predicted MTTF ( yrs)

Maximum Operating Voltage @ 37 C

50% Operating Voltage @ 85 C

Reliability

2

187

491

0

100

200

300

400

500

600

3D-Si Capacitor X7R Tantalum

Failu

re R

ate

'p

pm

'

Projected Failure Rate in 10 Years

27/09/2011 21

The 3D Capacitors have the

lowest Failure rate compared to

Tantalum & X7R capacitors

Only 2 Units failed on a

Million after 10 Years

operation time

Conclusion

Passive integration technologies bring differentiation and

miniaturization

IPDIA 3D Silicon Capacitor has many advantages over the

other types of capacitors :

Very high stability .

Withstands temperature up to 300°C

Extremely low failure rate .No catastrophic failure .No burning test

needed.

Very Low leakage . By replacing Ta & MLCC capacitors with

Silicon Capacitors, Operating Time could be increased by more

than 30.

It’s also a smart way to reduce the application volume and increase

the IP protection level.

27/09/2011 22

We want to continue to make the

difference

Can’t do it alone as an SME…

IPDiA and its partners launched a 4 year cooperative R&D

program

2427/09/2011

Thanks for your attention