835 Vacuum Quality Monitor (VQMTM)835 Vacuum Quality Monitor (VQM )

© 2012 Brooks Automation, Inc. • Proprietary Information

The Revolutionary New Vacuum Quality Monitor

World’s Fastest, Accurate at low mass Single Gas Calibration

Small si e and lo o tgasing Small size and low outgasing Lowest Power (80% less)

Now with new options…

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What is a Mass Spectrometer?

Ionizer

M

Mass SpectrometerField Replaceable Filament Assembly

2” Mass

IonizerMass

SeparatorDetectorIonizer Mass

Separator Detector

Magnetic Sector, Quadrupole or Ion Trap Partial Pressure

Measurement

Ion Trap

A small fraction of the gas molecules are ionized (+ ions), and the resulting ions are separated, detected and 

Electron Multiplier

Mass Separator

Measurement

pmeasured according to their mass‐to‐charge ratios (m/z).

The ion signals sensed and measured

Electron Multiplier

Detector

The ion signals sensed and  measured by the Detector provide an indirect measurement of partial pressures in a high vacuum gas environment. 

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Autoresonant Ion Trap Mass Separator

130 Vdc

Ionizere‐

‐685Vdc

2MHz to 200KHz in 80msec

.5V P‐P

El t t ti I T I fi d b l

125 Vdc

Electrostatic Ion Trap: Ions confined by purely electrostatic fields oscillate at a resonant frequency inversely proportional to

zm / zm /Where, m is mass, z is the total charge of the ion

Autoresonance: RF scan pushes ions when scan frequency matches ion’s resonant frequency

Electrostatic confinement = Ultra‐low power requirements

q y q y

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Mass Separator – Modern Trends

Mass Separationmethodology defines the type of mass spectrometer

Magnetic Sector and Quadrupoles are prevalent technologies

Th El t t ti I T i th ti f l ti

Ion Trap MSIon Trap MSQuadrupole MSQuadrupole MS

The Electrostatic Ion Trap is the new generation of low mass separation technology

ToDetector

Ion Beam Trapped IonsIon

Source

ToDetector

Ion Beam Trapped IonsIon

Source

Ion Source Stable

Trajectory ToDetector

Ion Source Stable

Trajectory ToDetector

Entry Plate

Unstable Trajectory

Exit PlateEntry

PlateUnstable

Trajectory

Exit Plate

Ionization is inside the trap

Ion Trap ‐ all ions stored together

Mass dependent ejection

Ionization is outside the mass separator

Mass filter ‐ one m/z at a time

Mass‐dependent throughput

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Fast spectral output Slow scanning

Why is it 20 Times Faster?Autoresonant Ion Trap MS vs. Quadrupole RGA

Quad RGA = 1.5 sec, Ion Trap MS= 70 msec – 1‐100 amu scan

QuadrupoleN

N2/CO(28)

O Ar

CO2(44)

How much information

Ion Trap MS

N(14)

H2O(18)

O2(32)

Ar(40)you get in a 70 msec scan

Quadrupole missed Freon (fluorocarbon)

How much resolution and gas detection you  ( )

CF3 C2F3H2

get in 1.5 seconds

Mass (amu)Quadrupole missed Water Ion Trap MS

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Can it see Hydrogen?Low Mass Scan Capabilities

High Resolution Low Mass Spectra

■ Excellent He detection capabilities – Leak detectionp■ Excellent Hydrogen detection capabilities – No quadrupole Zero Blast!

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What is Zero Blast?

Quadrupole mass filters exhibit poor performance at low masses: Zero Blast + Poor Resolution.at o asses e o ast oo eso ut o

The RF amplitudes at low masses are too low to stop “all ions” from reaching the detector leading to

fa zero blast starting at 0 amu and extending as far as 4 amu.

The baseline for the low mass spectrum is raised The baseline for the low mass spectrum is raised. Hydrogen which is an amu of 1 cannot be detected

clearly in “standard” RGAs.clearly in standard RGAs. No zero blast problem with ART MS.

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Low Mass Comparison

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VQM Resolution

Typical Resolving power ≈ 150X

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835 VQM Improvements Over 830 VQM

Field replaceable electron multiplier Better dynamic range (approximately 2x better) Better dynamic range (approximately 2x better) Software interface – allows other software programs to control and

receive partial pressure information from the VQM 1-300 amu available as an option Scan range can be controlled so you don’t need to scan the entire

range Audio for leak detect VQI (Vacuum Quality Index) which allows you to create an equation VQI (Vacuum Quality Index) which allows you to create an equation

and drive alarms or the digital output on the controllero For example: Drive output if Water is less than 20% AND Argon

is >37% AND O2 is <24% Histogram display of partial pressures (instead of only normalized) Log files in both the software and Excel Auto Tune adjusts gauge parameters for optimum performance

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The New 835 VQMWith 300 amu option

300 amu system is optional

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VQI (Vacuum Quality Index)

Can drive alarms and digital output based on total pressure and partial pressure measurementspressure and partial pressure measurements

o Example: Drive output if Total Pressure < 5E-7 AND Argon < 51% AND Nitrogen > .5%

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VQM System Hookup

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835 Product Specifications

Parameter Specification

P R UHV 1 10 5 TPressure Range UHV to 1x10‐5 Torr

Mass Range 1 – 300 amu or 1‐145 amu

Resolution 150 typical, 100 minimumResolution 150 typical, 100 minimum

Dynamic Range 2 decades single scan, >3 decades with averaging

Scan Time 125 Msec for 300 amu, 85 msec for 145 amu

Operating Temp 0‐50 oC for gauge, 0‐40 oC for controller

Power 15W max, 8W typ, 75W max with 390802

Communications USB 2.0

Operating System Windows XP 32 bit, Windows7 32 or 64 bit

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VQM Controller Highlights

15 W power requirement (without Total pressure Kit. 75 Watts with TPMK)

USB 2.0 Interface

SCPI Command set

Total Pressure Kit Connectivity

125 msec- 300 amu scan range

M lti l t i d Multiple trigger modes

External Analog In (total pressure.)

Trigger Out can be driven by VQI equation Trigger Out can be driven by VQI equation

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835 VQM Viewer: Tune Screen

G h C lib t Ad d S tti Graph- Raw signal

- Denoised signal

Calibrate- Peak selection

- Gaussian fit

Advanced Settings- Sensor control

- Current values

- Histogram

- Gaussian Fit

- Calibration controls Communications Header- Revision info, status,

etc17

VQM System With Ethernet API

Ethernet Router

ProcessControl VQM

C t

VQMController

RouterComputer Computer

USB

Runs:•Process control•API

Runs:•Data analysis•Service

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API Service•Viewer App (with optional keyboard/monitor)

Ion Trap Gauge Configurations

835100-YG-1N 835100-YG-1DNo Envelope Demountable EnvelopeAccessible Multiplier Accessible MultiplierNo Port Screen Removable Port Screen

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Replaceable Filament Assembly

The 835 sensor  has a single Yttria coated Iridium Filament in a fieldcoated Iridium Filament in a field replaceable assembly.

•Filament life should be similar to an ion gauge 

fil i li ifilament in same application

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Field Replaceable Electron Multiplier

The 835 sensor has an electron l i li i fi ld l blmultiplier in a field replaceable 

assembly.•Electron multipliers wear out over time

•Lifetime is based on usage

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835 VQM Features Summary

Highly Differentiated!

Fast (Scan time 85ms for 1-145 amu scan) Large Pressure Range UHV to 10-5 Torrg g Full 1-145 or 1-300 amu measurement range Unprecedented low power requirements (15W) Single point mass axis calibration Single point mass axis calibration Comprehensive, easy to use viewer Electronics remote from sensor Electronics not paired to the sensor

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