8-2
Transcript of 8-2
- 1. 2004.12 12 Study of Measuring Instruments for Validation of Certified Industrial Cleanrooms F. J. Wang and G. Z. Lee Department of Refrigeration Air-Conditioning National Chin-Yi Institute of Technology Abstract Modern manufacturing industries are increasingly turning to cleanroom technology for the development of new products. The cleanrooms have to be first designed and constructed, they then have to be tested to ensure they achieve their design specification and continue to do so even at fully operational stage. Therefore, its significant and critical to validate that the cleanroom is working correctly and achieving the contamination standards that it has been designed to fulfill. However, the procedural testing and validation for certified industrial cleanrooms have to comply with the cleanroom classification set down at the design stage and ensure the cleanrooms continues to comply with the standard at different occupation states (i.e. as-built, at-rest and operational). Its also necessary to demonstrate numerous tests such as airborne particles and microbial concentration test, filter installation leak test, temperature, relative humidity, sound levels, lighting levels and vibration levels. Many delicate testing instruments are therefore required for the task as to produce the best results with the least expenditures of time and effort. Therefore, its a challenge and quite meaningful to study the measuring instruments for validation of certified industrial cleanrooms.
2. 2004.12 13 Keyword : Industrial cleanrooms, validation, measuring instruments ISO 14644-1(1999)1 FS 209E19922 National Environmental Balancing Bureau 3 NEBB IEST-006.2 4 56 3D78 910 2.1 / Thermo-anemometer (1) Velocity sensor(2) Temperature compensation sensor1 ToT1To T T1 overheat T hot-wire2 0 ~ 9999 ft/min (0 to 50m/s)1 1871 43.25 in(110cm) 90 2.2 Electronic Balometer HVAC (HEPA) 3 3. 2004.12 14 3051220mm 2 2.3 3D Ultrasonic Anemometer 4 turbulence intensity RS232 3 Tu% 2.4 Laser Particle Counter ISO 14644 0.3m Fed 2090.5 mISO 0.3m5 Met One 5 1.ON /OFF2.3. 4.5.6.7. 8. 4 0.3, 0.5, 1, 3, 5, 10m6 Channels0.3 m Class 100~100,000 2.5 digital manometer 6 0~25 mbar0.1 5 2.6 Digital Illuminance Meter 7 8 JISC 1609-1993 ClassAA 3,000 lx 2 6NEBB 2.7 Precision Sound Level Meter 9 IEC651IEC804ISO1996 1.0 1(IEC Class 1) Octave Bands 4. 2004.12 15 14dB ~ 135dB 16Hz ~ 16kHz7 10 1000Hz 94 dB 114 dB NEBB 11 2.8 Portable Vibration Meter 12 () 8 0.0~199.9( m/s 2 ) 0.0~199.9 (mm/s) 0.0~1.99 (mm)5 5 2.9 Electrostatic Fieldmeter 13 9 NO/OFFZERO HOLD 10 1 International Standard ISO 14644-1, Cleanrooms and Associated Controlled Environments - Part 1 Classification of Air Cleanliness, International Organization for StandardizationISO, New York, USA, 1999. 2 U.S. Federal Standard 209 version E, Airborne Particulate Cleanliness Classes for Cleanrooms and Clean Zones, Washington, USA, 1992. 3 NEBB, Procedural Standards for Certified Testing of Cleanrooms, 2nd Edition, National Environmental Balancing Bureau, Maryland, USA, 1996. 4 HM28 Operating instructions Digital handheld pressure gauge, Hand-Manometer, USA, 2002 5 Electronic Balometer with APM 150 Meter, ALNOR, USA, 2002 6 CompuFlow Thermo-anemometer Meter 8585, ALNOR, USA, 2002 7 Anemosonic UA6 Handheld Digital Ultrasonic Anemometer Operating Instructions, AIRFLOW, England, 2002 8 Precision Integrating Sound Level Meter Instruction Manual, Delta OHM, Italy, 2001 9 Portable Vibration Meter TYPE-3144A Operation Manual, ACO, Japan, 2000 10 Digital Illuminance Meter Instruction Manual, YOKOGAWA, Japan, 1999 5. 1 2 3 4 5 6 2004.12 16 6. 7 8 9 10 11 12 2004.12 17 7. 13 1 2004.12 18 2 3 ALNOR Model 8585 050m/s0-9999ft/min 3 0.01m/s1ft/min -106014140 0.30.5 0.10.1 095RH3RH 0.1RH 56040140 0.10.1 ALNOR APM 150 Meter 50~2000CFM85~400m3 /h 32~1220~50 ANEMOSONICTM Ultasonic Anemometer UA6 0.050m/sec1 0.01m/sec 099 0.05,000m3 /sec 0701 0.1 0.00899.99m2 099% 8. 4 2004.12 19 5 6 MetOne, DECEMBER 2002 3313 PORTABLE COUNT 100~250V 50/60Hz 0~2A 0.3, 0.5, 1, 3, 5, 10m 6 Channels 1CFM 1. Isokinetic Probe 2.Purge Fliter 3. Scanning Probe of Filter HM28 0~25mbar 0.1 YOKOGAWA 510 02 510 01Digital JISC 1609-1993ClassAA 0.0 ~ 99.9/999/9,990/99,900/999,000 lx 3,000 lx21at23 2 3 3 7 9. 2004.12 20 8 9 Delta HD 9020 1.5V4 1.0 1 14dB135dB 16Hz16kHz IEC651IEC804ISO1996 TYPE 3144A 35000Hz ACC0.0~199.9m/s2 PEAK VEL0.0~199.9mm/s PEAK DISP0.0~1.99 mm PEAK to PEAK 5 7351A 5.0pc/m/s2 (50pc/G) 10at100Hz 5 -50 ~ +150 282A-1 Digital Stat-ArcTM 3 0~19.99Kv 1 2.54 5 DC 9V 40 LWH = 2.44.20.9 6.110.72.3 0~50,85RH 10 Kv inch 0~40 4.0 2 0~60 6.5 3 0~80 8.5 4