6999-12-009J...Title 6999-12-009J.book Author Donald Grefe' Created Date 3/26/2011 4:12:01 PM...

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INSTRUCTION MANUAL

Vacuum Products Division

1 1/2-inch Stainless Steel Valve

Manual No. 699912009

Revision J

December 2001

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Copyright 1997Agilent Inc.



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iii

Warranty

Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the purchase price of the Product. Items expendable in normal use are not covered by this warranty. All warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired portion of the original warranty period applicable to the repaired or replaced parts. After expiration of the applicable warranty period, Customer shall be charged at the then current prices for parts, labor, and transportation.

Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or damage caused by use of its Products other than in accordance with proper operating procedures.

Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any war-ranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller.

Warranty Replacement and Adjustment

All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto, and must be received within the applicable warranty period by Seller or its authorized representative. Such claims should include the Product serial number, the date of shipment, and a full description of the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjust-ment, written authorization from Seller or its authorized representative for the return and instructions as to how and where these Products should be returned must be obtained. Any Product returned to Seller for examination shall be prepaid via the means of transportation indicated as acceptable by Seller. Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on any item that has been altered or has been returned by non-acceptable means of transportation. When any Product is returned for examination and inspection, or for any other reason, Customer shall be responsible for all damage resulting from improper packing or handling, and for loss in transit, notwith-standing any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for determining the cause and nature of failure, and Seller’s determination with regard thereto shall be final.

If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will be notified and the Product returned at Customer’s expense; in addition, a charge for testing and exam-ination may be made on Products so returned.

3/1/00


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Voiding the Warranty

The valves described in this manual are designed to be used in a clean system. Minute particles such as a piece of lint can seriously affect the ability of the valve to produce a vacuum-tight seal. Therefore, opening the valve before it is to be used, storing it, or operating it in any environment other than as a clean system is considered by Agilent, Inc. as misuse of the equipment and will render the warranty null and void.

When a valve is used with toxic chemicals, or in an atmosphere that is dangerous to the health of humans, or is environmentally unsafe, it will be the responsibility of the Customer to have the valve cleaned by an independent agency skilled and approved in handling and cleaning contaminated materials before the valve will be accepted by Agilent, Inc. for repair.

Therefore, all details of the Agilent, Inc. “Request for Return Health and Safety Certification” (attached) must be complied with including the requirement that a notarized certificate from the cleaning agency certifying that the valve has been cleaned and is harmless to humans and environmentally safe before Agilent, Inc. will accept the returned valve. The certificate must accompany all other shipping papers, including the completed Request for Return Health and Safety Certification, and be attached securely to the outside of the box containing the valve. Improper and/or incomplete documentation will result in the unopened, unrepaired valve being returned to the Customer at the Customer's expense.

Agilent, Inc. will ship a replacement valve at no charge to assist the Customer and to minimize downtime. However, if the malfunctioning valve is not returned to Agilent, Inc. within 30 days and meeting all of the requirements of paragraphs 2 and 3 above, the Customer will be billed for the replacement valve at the then current rate plus shipping charges.

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Table of Contents

Declaration of Conformity

Preface ........................................................................................................................................... viiiHazard and Safety Information....................................................................................................................viii

Section I ............................................................................................................................................ 1Description ................................................................................................................................................... 1

General .................................................................................................................................................. 1Actuators ................................................................................................................................................ 1Flanges/Seals .......................................................................................................................................... 1Specifications ......................................................................................................................................... 2

Section ll ........................................................................................................................................... 3Assembly and Installation.............................................................................................................................. 3

General .................................................................................................................................................. 3Storage ................................................................................................................................................... 3Assembly Procedures.............................................................................................................................. 3Mechanical Installation .......................................................................................................................... 9Solenoid/Air Line Connection - Pneumatic Valve ................................................................................. 10Solenoid/Electrical Connections - Pneumatic Valve .............................................................................. 11Position Indicator ................................................................................................................................. 11Test Procedure...................................................................................................................................... 15

Request for Return Health and Safety Certification

Sales and Service Offices


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Agilent, Inc.

declare under our sole responsibility that the product,erklären, in alleniniger Verantwortung, daß dieses Produkt,déclarons sous notre seule responsabilité que le produit,declaramos, bajo nuestra sola responsabilidad, que el producto,verklaren onder onze verantwoordelijkheid, dat het product,dichiariamo sotto nostra unica responsabilità, che il prodotto,

Declaration of ConformityKonformitätserklärungDéclaration de ConformitéDeclaración de ConformidadVerklaring de OvereenstemmingDichiarazione di Conformità

to which this declaration relates is in conformity with the following standard(s) or other normative documents.auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.

John EhmannGeneral Manager

WeWirNousNosotrosWijNoi

Lexington, MA, 02421-3133 USA 121 Hartwell Avenue

Vacuum Products DivisionAgilent, Inc.

Lexington, Massachusetts, USA


98/37/EEC, Machinery DirectiveEN 60204-1 Electrical equipment of industrial machines; general requirements

September 2010

Declaration of Conformity


viii

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Preface

Hazard and Safety Information

This manual uses the following standard safety protocols:

WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which, if not followed correctly, could lead to serious injury.

CAUTION The caution messages are displayed before procedures, which if not followed, could cause damage to the equipment.

NOTE The notes contain important information.

This product must only be operated and maintained by trained personnel.

Before operating or servicing equipment, read and thoroughly understand all operation/maintenance manuals provided by Agilent. Be aware of the hazards associated with this equipment, know how to recognize potentially hazardous conditions, and how to avoid them. Read carefully and strictly observe all cautions and warnings. The consequences of unskilled, improper, or careless operation of the equipment can be serious.

In addition, consult local, state, and national agencies regarding specific requirements and regulations. Address any safety, operation, and/or maintenance questions to your nearest Agilent office.


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ix

Contacting Agilent

In the United States, you can contact Agilent Customer Service at 1-800-882-7426. See the back cover of this manual for a listing of our sales and service offices.

Visit our web site at: http://www.chem.agilent.com/en-US/Products/Instruments/vacuum/pages/default.aspx.



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1

Section I

Description

General

The Agilent 1-1/2 inch stainless steel valve, available in right angle and in-line designs, is a maintenance-free bellows-sealed valve. It is designed for use in roughing and high-vacuum applications where reliable sealing, bakeability, and long cycle life are required. The valve operates reliably at pressures from atmosphere to below 1 x 10-10 Torr and, in the fully open position, its conductance is equivalent to that of an elbow.

Actuators

The valves are available in both manually- and pneumatically-operated versions. The manual actuator, designed for hand operation, uses a permanently lubricated, double-lead stem screw which fully opens the valve in just seven revolutions of the actuator knob. The pneumatic actuator, designed for remote operation, is a single-acting cylinder, with a closing spring. For the users' convenience, a visual indicator button protrudes from the top of the air cylinder when the valve has been actuated to the open position. A position indicator that delivers an electrical output signal when the valve is cycled is available as an option. It mounts conveniently to the top of the air cylinder with two screws. Both actuator versions utilize a stainless steel, welded bellows which exhibits extremely long cycle life.

Flanges/Seals

The valves are available in two flange/seal configurations. The 2-3/4 inch Conf|at® flange with OFHC copper gaskets and an lnconel bonnet gasket is recommended for applications where minimizing the amount of elastomer material to achieve lower outgassing rates is required. The NW 40 Klamp flange with Viton O-rings and a Viton bonnet gasket is recommended for applications where quick and convenient vacuum connections are desirable. All of the valves use a Viton main plate seal.


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Specifications

Table 1 Physical and Operational Specifications

Specification Definition

Pressure Range Atmosphere to below 1 x 10-10 Torr

Leak Rate No leak detectable with a helium mass spectrometer leak detector with a sensitivity of less than 1 x 10-10 std cc/second

Conductance ❑ Right-angle: 46 liters/second❑ ln-line: 37 liters/second

with nitrogen (measured experimentally using dif-ferential pressure method)

Bakeability ❑ Manual valve: 200°C open, 200°C closed❑ Pneumatic valve: 200°C open, 200°C closed❑ Position Indicator (optional): 80°C maximum❑ Solenoid (optional): 50°C maximum❑ Service Life: 250,000 cycles minimum

Materials ❑ Body: 304 stainless steel❑ Bellows: AM-350 stainless steel❑ Air cylinder: Anodized aluminum❑ Manual handle: Anodized aluminum or high-tem-

perature plastic❑ Bonnet gasket: Viton or Inconel (valves with Con-

tIat® flanges and valves with tube ends)Viton (valves with KF flanges)Kalrez (optional on all models)

❑ Plate seal: Viton (Kalrez optional on all models)❑ Flange gaskets: OFHC copper (for valves with Con-

flat flanges) (not included with valve)Viton (for valves with KF flanges) (not included with valve)

❑ Air piston: Viton

Actuators ❑ Manual: Seven turns to open or close❑ Pneumatic: Single-acting cylinder with closing

spring (normally-closed)60-100 psig operating pressureLess than one second to open or closeVisual indicator

Position Indicator (optional) ❑ Actuator: Microswitch❑ Electrical rating: 125/250 volts AC, 5 amperes

maximum❑ Signal hookup: Normally open or normally closed,

or both


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3

Section ll

Assembly and Installation

General

The following assembly and installation instructions apply to both the manual and pneumatic valves, unless otherwise indicated.

Storage

Valves are cleaned for ultrahigh vacuum service prior to shipping. To prevent contamination, keep them in their protective packages until they are required for installation. Prevent foreign particles that could interfere with sealing from entering the valves.

Assembly Procedures

The following assembly procedures apply when the valve has been disassembled for repair and before the valve is installed in the system.

NOTE In the following steps, apply lubricants with a small acid brush or equivalent.

Solenoid (optional) ❑ Supply voltages: 110/120 volts, 50/60 Hz220/240 volts, 50/60 Hz24 volts DC, 6 watts

Mounting position Valve can be mounted in any orientation and sealed against atmospheric pressure at either port

Table 1 Physical and Operational Specifications (Continued)

Specification Definition


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Hand-Operated Valve

Refer to Figure 1 and Table 1 during this procedure.

1. Check the bellows assembly (2, Figure 1) to ensure that seal areas are free of nicks and scratches. Clean the O-ring groove with a Q-Tip.

Use a 9/64” Allen driver to hold the socket head cap screw (6) in place, insert the screw through the inside diameter of the adapter (5). Apply a drop of Loctite 242 to the leading threads of the screw protruding from the adapter. Thread the screw and adapter assembly into the bellows assembly (2). Hold the bellows assembly securely, then torque the socket head cap screw to 30 inch-pounds.

2. Apply Fel-Pro heavy duty anti-sieze lubricant to the bottom half (bottom surface and circumference) of the stem screw (8) where it mates with the adapter in the bellows assembly Compress the bellows then install the retaining ring (7) around the neck of the stem screw; ensure that the retaining ring has its flat edge facing out of the adapter.

Place the stem screw down Inside the bellows and into the adapter (5) as shown in Figure 1 or Figure 2 as appropriate, then engage the retaining ring.

3. Lubricate the stem screw (8) uniformly over the entire length of thread with Fel Pro C-102.

Thread the top plate (9) onto the stem screw and spin it down until it comes in contact with the flange on the bellows assembly (2).

4. Apply a thin coat of Krytox GPL-207 vacuum lubricant to the Viton O-ring (4). The O-ring should appear shiny but not greasy. lnstall the O-ring into the O-ring groove in the bottom of the bellows. With a lint-free, dry cloth, wipe the face of the sealing area and O-ring to remove any film of residual grease.


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5

Figure 1 Valve Assembly (Manually-Operated)

Table 2 Parts List

Item Description Part Number Manual Only Pneumatic Only

1Body Weldment, 2.75-inch Conflat flange

L6575301 (right angle)X X

L8675301 (in-line) X X

Body Weldment, NW40 flange L6576301 (right angle) X X

L8676301 (in-line) X X

2 Bellows Assembly L6577001 X X

3 O-ring, Viton 6608-94-133 (2-133) X X

4 O-ring, Viton 6608-94-128 (2-128) X X

5 Seal Disc Adapter L6589001 X


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6Socket Head Cap Screw, No. 8-32 by 3/8 Ig

6122-20-120X

7 Retaining ring 699992052 X

8 Stem Screw L6588001 X

9 Top Plate L6587001 X

10 Set Screw, No. 10-32 by 3/6 Ig 6122-20-254 X

11 Knob L5969001 (aluminum) X

L8818001 (plastic) X

12Socket Head Cap Screw, No. 10-32 by 3/4 lg

6122-20-174X

13 Flat Washer, No. 10 6181-20-023 X

14 Compression Spring 660285615 X

15Shoulder Screw, 3/16 by 1/2” lg

611904129X

16 Quad Ring Seal 699000029 X

17 Position Indicator Rod L6592001 X

18 Air Cylinder L6581001 X

19 Piston Q3765-001 X

20 Die Spring 660285705 X

21 Air Cylinder Cover L6582001 X

22Socket Head Cap Screw, No. 10-32 by 3” Ig

6122-20-194X

23Socket Head Cap Screw, No. 10-32 by 1 1/4” Ig, blue

6122-20-180X

24 O-ring, Viton 6606-092-926 (2-326) X

25 O-ring, Viton 6609-092-125 (2-125) X

Replacement Parts

Kit, Metal Bonnet and Viton Main Seal L6680301

Kit, Viton Bonnet and Viton Main Seal L66B1301

Bellows Assembly L6577001

Table 2 Parts List (Continued)

Item Description Part Number Manual Only Pneumatic Only


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7

5. Insert the C-seal or Viton gasket, depending on the model of the valve, into the counterbore in the valve body (1). Install the trim into the body (1) being sure to line up the bolt holes.

6. Insert the flat washers (13) into each of the four counterbores of the top plate, apply Fel Pro C-102 lubricant to the last three threads of the socket head cap screws (12). Install the screws in each bolt hole and tighten them hand-tight, then torque the screws to 45 to 50 inch-pounds.

7. Thread the No. 10-32 set screw (10) into the knob (11), place the knob on the stem screw and lock it in place by tightening the set screw against the flat of the stem screw. Torque the set screw to 48 inch-pounds.

8. Actuate the valve assembly two or three times to check for proper alignment and operation.


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Air-Operated Valve

1. Visually inspect the air cylinder (1 B) for any physical defects. Lubricate the quad ring seal (16) with Krytox GPL 207 grease and install in groove of the air cylinder. Apply a generous amount of grease to all internal surface of the air cylinder.

2. Lightly grease O-rings (24, 25) with Krytox GPL 207 grease and install in O-ring grooves of piston (19). Lubricate the inside and outside of piston shaft. Apply a generous amount of grease on O-rings (24) and in grooves on the circumference of piston (19) filling the open spaces.

3. Apply Loctite 764 primer to all threads of the shoulder screw (15). Wait 5 minutes, then apply a dot of Loctite 272 Thread locker to threads of shoulder screw.

4. Use a 3/32” Allen driver to hold the socket head shoulder screw (15) in place then place a flat washer (13) then a spring (20) in that order over the screw. Insert the assembly through the inside diameter of the piston assembly. Thread the socket head cap screw and the assembly into the bellows (2). Hold the bellows securely torque the socket head cap screw to 15 inch-pounds.

5. Insert the position indicator rod (17) through the top of the piston assembly (19) and attach it to the socket head shoulder screw by compressing the flat washer (13) and the spring (20) at the same time with the actuator then snapping it into position.

NOTE Lubricate the outside diameter and ends of the spring (14) with Krytox GPL 207 grease, then slide the spring over the indicator rod and down inside the piston assembly.

6. Apply a thin coat of Dupont Krytox® GPL 207 vacuum lubricant to the Viton O-ring. The O-ring should appear shiny but not greasy. Install the O-ring into the O-ring groove in the bottom of the bellows (2). With a lint-free, dry cloth, wipe the face of the sealing area and O-ring installed to remove any film of residual grease.

7. Visually inspect the seal surface for deep scratches. Insert the Viton gasket or C-seal, depending on the model of the valve, into the counterbore in the body. Install the trim into the body (1) being sure to line up the air inlet as required.

8. Place the top cover (21) on top of the assembly. Compress the top cover and the spring, line up the holes on the top cover and the air cylinder.

Apply Fel Pro Heavy Duty Antisieze lubricant to the last three threads of screws (22).

Assemble the screws (two blue screws FIRST to compress the spring); tighten hand-tight, then torque all six screws to 45 to 50 inch-pounds.

9. Actuate the valve assembly two or three times to check for proper alignment and operation.


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9

Figure 2 Valve Assembly (Air-Operated)

Mechanical Installation

NOTE Use clean, Iint·free gloves whenever it is necessary to handle the vacuum surfaces of a valve.


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To install a valve with ConfIat® flanges, place a new copper gasket between the mating flanges of the valve and the vacuum system. The gasket fits into the steps of both flanges to ensure axial alignment. Insert mounting screws through both flanges and Iubricate the exposed threads with high-pressure, high-temperature lubricant (Fel Pro Heavy Duty Antisieze or equivalent). Also Iubricate the surface of the nuts making contact with the flange. Tighten each nut to partially close the gap between the flange faces. Continue to tighten the nuts sequentially with a box or socket wrench until the flange faces meet. Recommended seating torque for the mounting screws is 123 inch-pounds.

To install a valve with K|amp® flanges, place a centering ring and O-ring between the mating flanges of the valve and the vacuum system. The O-ring should be clean and very lightly lubricated with Dupont Krytox® GPL207 vacuum lubricant. Assemble the Klamp flange coupling around the flanges and tighten the wing nut or ratchet firmly to ensure proper compression of the O-ring seal.

Solenoid/Air Line Connection - Pneumatic Valve

Where ambient temperatures do not exceed 50 °C, the solenoid control valve (optional) can be mounted directly to the valve air cylinder using 1/8” NPT fittings. If bakeout temperatures (200 °C maximum) are intended, the solenoid control valve must be mounted remotely. Use a suitable air line material that will withstand normal operating pressures (60 to 100 psig) and bakeout temperatures (200 °C maximum). Figure 3 illustrates the mounting configurations for normally-cIosed or normally-open operation.

Figure 3 Mounting the Solenoid


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Solenoid/Electrical Connections - Pneumatic Valve

The solenoid-controlled valve (optional) is available in three voltage configurations:

The leads protruding from the coil are No. 22 AWG, 18 inches long. The solenoid-controlIed valve also features a manual operator button that will allow manual actuation in the absence of electrical power.

Position Indicator

Disassembly - (See Exploded View, Figure 4)

1. Remove the holding screw (1) from the connector (2) and pull the connector off the base (6).

2. Remove the screw (5) from the position indicator cover (4) and lift the cover off the air cylinder cover (17). The components of the position indicator are now accessible.

Figure 4 Postition Indicator Assembly

110/120 V, 50/60 Hz Agilent part no. 626771173

220/240 V, 50/60 Hz Agilent part no. 626771174

24 VDC Agilent part no. 626771175


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Replacing the Defective Microswitch

1. Disconnect the soldered leads from the microswitch pins.

2. Unscrew the mounting screws (13) and remove the microswitch (11).

3. Reassemble a new switch on the bracket (16) as shown in Figure 4. Note the position of the switches on the bracket (Figure 5).

4. Solder the leads to the microswitch. Leads are wired to the connector base as follows:

Base Pin Wire Dual Microswitch

1 Orange Switch 2, NO

2 Blue Switch 1, NO

3 White Switch 1 & 2, Common

Green Ground

Table 3 Position Indicator Parts List

Item Description Part NumberNW16/NW25/NW40/NW50

1 Holding screw Included with item 2

2 Connector MPM 193-07N

3 Gasket Included with item 2

4 Position indicator cover L5978001

5 Screw, Phillips head No. 6-32 X 1/4 Ig

6 Connector Base MPM 193

7 Screw, Phillips hd No. 2-56 x 3/8 Ig

8 Gasket Included with item 6

9 Nut No. 2-56

10 Lockwasher No. 2

11 Microswitch Cherry E61-10H

12 Threaded holder Q3033001

13 Screw, phillips hd No. 2-56 x 1/2 Ig

14 Lockwasher No. 2

15 Washer, flat No. 2

16 Mioroswitch mounting bracket 1281-L8673-301


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13

17 Screw, phillips hd No. 6-32 x 1/4 Ig

18 Lockwasher No. 6

19

Screw, socket head cap, Allen No. 10-32 x 2 lg (NW16, NW25)

1/4-20 x 2 lg (NW40)

1/4-20 x 2-3/4 lg NW50

20Lockwasher No. 10, (NW16, NW25)

1/4-20 x 2 Ig, NW40, NW50

21

Air cylinder cover, aluminum L5976001 (NW16, NW25)

L5977001 (NW40)

L6605001 NW50

22 Screw, special, 3/16 by 1”, aluminum L8935001

Table 3 Position Indicator Parts List (Continued)

Item Description Part NumberNW16/NW25/NW40/NW50


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Installing the Position Indicator Kit

1. Remove the cover from the position indicator assembly by removing the electrical connector and the screw and lockwasher from the top cover.

2. Apply air pressure to the valve and allow the valve to remain in the open position.

3. Remove the red visual indicator cap from the valve stem.

4. Apply a small amount of Loctite #242 to the threads of the special shoulder screw before threading it into the valve stem.

Install the shoulder screw on the valve stem. Use the 3/16 by 1-inch long aluminum shoulder screw (22).

Tighten the shoulder screw until it is fully threaded into the valve stem then torque it to 30 inch-pounds.

5. Remove the air pressure from the valve to close it.

6. Carefully mount the position indicator assembly on the valve. It may be necessary to move the switches back to clear the shaft. Use two #6-32 x I/4” pan head screws and two #6 Iockwashers to fasten the position indicator on the top of the valve.

Wiring the Position Indicator

To wire the position indicator, remove the holding screw and pull the connector away from the base (Figure 5). Using the holding screw, push the terminal block out of the connector housing. Feed No. 22 AWG wire through the housing grommet and connect the leads to the appropriate terminal block contacts for the desired operation. The position indicator can be wired for normally-open or normally-closed operation, or both. Terminal contacts are clearly marked and should be wired as follows:

Once the leads are connected, push the terminal block back into the connector housing and snap it into place. Plug the connector back into the base and secure it with the holding screw.

Base Pin Wire Dual Microswitch

1 Orange Switch 2, NO

2 Blue Switch 1, NO

3 White Switch 1 & 2, Common

Green Ground


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15

Figure 5 Wiring Diagram - Position Indicator; Dual Switch Only

Test Procedure

Dual Switches

1. Connect an Ohmmeter to pin 1 (orange wire) and pin 3 (white wire) of switch S2 connector and set the meter to measure resistance (ohms).

2. With the valve in the open position (air pressure applied), adjust switch S2 (right side) until the microswitch closes.

3. Tighten the screws holding switch S2.

4. Actuate the valve five times and ensure that the switch S2 opens and closes and is in the correct position.

5. Close the valve by removing the air pressure from the valve.

6. Connect the ohmmeter to pin 2 (blue wire) and pin 3 (white wire) of switch S1 connector. The meter should still be set to read resistance (Ohms).

7. With the valve in the closed position (no air pressure), adjust switch S1 (left side) until the microswitch closes.

8. Apply air pressure to open the valve. Switch S1 should open. Readjust it if necessary then tighten the screws.

9. Actuate the valve five times to ensure that the switch opens and closes and is in the correct position.

10. Place the cover on the position indicator and replace the connector using the appropriate hardware.


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Single Switch

1. Connect an ohmmeter to pin 1 (orange wire) and pin 3 (white wire) of the position indicator switch and set the meter to measure resistance (ohms).

2. With the valve in the closed position (no air pressure), adjust the switch until the microswitch closes.

3. Apply air pressure to open the valve. The microswitch should open. Readjust it if necessary (then tighten the screws).

4. Actuate the valve five times to ensure that the switch opens and closes, and is in the correct position.

5. Place the cover on the position indicator and install the connector housing using the appropriate hardware.



Pg 1/3

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Toll Free: 800 882 7426, Option 3

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PACIFIC RIM:

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office information

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Instructions for returning products

Dear Customer:

Please follow these instructions whenever one of our products needs to be returned.

1) Complete the attached Request for Return form and send it to Agilent Technologies (see below), taking particular care to identify

all products that have pumped or been exposed to any toxic or hazardous materials.

2) After evaluating the information, Agilent Technologies will provide you with a Return Authorization (RA) number via email or fax,

as requested.

Note: Depending on the type of return, a Purchase Order may be required at the time the Request for Return is submitted. We

will quote any necessary services (evaluation, repair, special cleaning, eg).

3) Important steps for the shipment of returning product:

Remove all accessories from the core product (e.g. inlet screens, vent valves).

Prior to shipment, drain any oils or other liquids, purge or flush all gasses, and wipe off any excess residue.

If ordering an Advance Exchange product, please use the packaging from the Advance Exchange to return the defective

product.

Seal the product in a plastic bag, and package product carefully to avoid damage in transit. You are responsible for loss or

damage in transit.

Agilent Technologies is not responsible for returning customer provided packaging or containers.

Clearly label package with RA number. Using the shipping label provided will ensure the proper address and RA number

are on the package. Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will

be returned.

4) Return only products for which the RA was issued.

5) Product being returned under a RA must be received within 15 business days.

6) Ship to the location specified on the printable label, which will be sent, along with the RA number, as soon as we have received

all of the required information. Customer is responsible for freight charges on returning product.

7) Return shipments must comply with all applicable Shipping Regulations (IATA, DOT, etc.) and carrier requirements.

RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION:

Req

uest for Return Health and Safety Certification



Pg 2/3


Request for Return Form

(Health and Safety Certification)

Please read important policy information on Page 3 that applies to all returns.

1) CUSTOMER INFORMATION

Company Name: Contact Name:

Tel: Email: Fax:

Customer Ship To: Customer Bill To:

Europe only: VAT reg. Number: USA/Canada only: Taxable Non-taxable

2) PRODUCT IDENTIFICATION

Product Description Agilent P/N Agilent S/N Original Purchasing Reference

3) TYPE OF RETURN (Choose one from each row and supply Purchase Order if requesting a billable service)

3A. Non-Billable Billable New PO # (hard copy must be submitted with this form):

3B. Exchange Repair Upgrade Consignment/Demo Calibration Evaluation Return for Credit

4) HEALTH and SAFETY CERTIFICATION

AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS,

RADIOACTIVE MATERIAL, OR MERCURY AT ITS FACILITY.

Call Agilent Technologies to discuss alternatives if this requirement presents a problem.

The equipment listed above (check one):

HAS NOT pumped or been exposed to any toxic or hazardous materials. OR

HAS pumped or been exposed to the following toxic or hazardous materials. If this box is checked, the following

information must also be filled out. Check boxes for all materials to which product(s) pumped or was exposed:

Toxic Corrosive Reactive Flammable Explosive Biological Radioactive

List all toxic/hazardous materials. Include product name, chemical name, and chemical symbol or formula:

________________________________________________________________________________________________________NOTE: If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all

costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of

exposure to toxic or hazardous materials present in the product.

Print Name: Authorized Signature: ………………………. Date:

5) FAILURE INFORMATION:

Failure Mode (REQUIRED FIELD. See next page for suggestions of failure terms):

Detailed Description of Malfunction: (Please provide the error message)

Application (system and model):

I understand and agree to the terms of Section 6, Page 3/3.

Print Name: Authorized Signature: ………………………. Date:



Pg 3/3


Request for Return Form

(Health and Safety Certification)

Please use these Failure Mode to describe the concern about the product on Page 2.

TURBO PUMPS and TURBO CONTROLLERS

APPARENT DEFECT/MALFUNCTION POSITION PARAMETERS

- Does not start - Noise - Vertical Power: Rotational Speed:

- Does not spin freely - Vibrations -Horizontal Current: Inlet Pressure:

- Does not reach full speed -Leak -Upside-down Temp 1: Foreline Pressure:

- Mechanical Contact -Overtemperature -Other: Temp 2: Purge flow:

- Cooling defective -Clogging …………………. OPERATING TIME:

ION PUMPS/CONTROLLERS VALVES/COMPONENTS

- Bad feedthrough - Poor vacuum - Main seal leak - Bellows leak

- Vacuum leak - High voltage problem - Solenoid failure - Damaged flange

- Error code on display - Other - Damaged sealing area -Other

LEAK DETECTORS INSTRUMENTS

- Cannot calibrate -No zero/high backround - Gauge tube not working - Display problem

- Vacuum system unstable - Cannot reach test mode - Communication failure - Degas not working

- Failed to start - Other - Error code on display - Other

SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS

- Pump doesn’t start - Noisy pump (describe) - Heater failure - Electrical problem

- Doesn’t reach vacuum - Over temperature - Doesn’t reach vacuum - Cooling coil damage

- Pump seized - Other - Vacuum leak - Other

Section 6) ADDITIONAL TERMS

Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent

Technologies Vacuum Product Division – Products and Services Terms of Sale.

Customer is responsible for the freight charges for the returning product. Return shipments must comply with all

applicable Shipping Regulations (IATA, DOT, etc.) and carrier requirements.

Customers receiving an Advance Exchange product agree to return the defective, rebuildable part to Agilent Technologies

within 15 business days. Failure to do so, or returning a non-rebuildable part (crashed), will result in an invoice for the

non-returned/non-rebuildable part.

Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur

a restocking fee. Please reference the original purchase order number.

Units returned for evaluation will be evaluated, and a quote for repair will be issued. If you choose to have the unit

repaired, the cost of the evaluation will be deducted from the final repair pricing. A Purchase Order for the final repair price

should be issued within 3 weeks of quotation date. Units without a Purchase Order for repair will be returned to the

customer, and the evaluation fee will be invoiced.

A Special Cleaning fee will apply to all exposed products per Section 4 of this document.

If requesting a calibration service, units must be functionally capable of being calibrated.

Agilent TechnologiesVacuum Product Division

United States & CanadaAgilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington, MA 02421 USA Tel: +1 781 861 7200Toll-Free: +1 800 882 7426 Fax: +1 871 860 5437

Benelux Agilent Technologies Vacuum Products Division Herculesweg 8 4338 PL MiddelburgTHE NETHERLANDS Tel: +31 118 671570Fax: +31 118 671569

China Agilent Technologies Vacuum Products Division Room 1648Central Tower South Wing Beijing Junefield Plaza No. 10 XuanWuMenWai Street Beijing 100052 P.R. CHINA Tel.: +86 (10) 6310 8550Toll-Free: 800 820 6556 Fax: +86 (10) 6310 0141

France Agilent Technologies Vacuum Products Division 7 avenue des Tropiques Z.A. de Courtaboeuf - B.P. 12 91941 Les Ulis cedex FRANCE Tel.: +33 (0) 1 69 86 38 84 Fax: +33 (0) 1 69 86 29 88

Germany & Austria Agilent Technologies Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 3564289 Darmstadt GERMANY Tel.: +49 (0) 6151 703 353Fax: +49 (0) 6151 703 302

India Agilent TechnologiesVacuum Product Division 205-A, “A” wing of Galleria,2nd floor, Hiranandani Gardens,Powai, Mumbai-400 076, IndiaTel.: +91 22-2570 8595 / 8597Fax: +91 22- 2570 8599

Italy Agilent Technologies Vacuum Products Division via F.lli Varian 54 10040 Leini, (Torino) ITALY Tel.: +39 011 997 9111Toll-Free: 00 800 234 234 00Fax: +39 011 997 9350

Japan Agilent Technologies Vacuum Products Division Sumitomo Shibaura Building 4-16-368th Floor4-16-36 Shibaura Minato-ku Tokyo 108 JAPAN Tel.: +81 3 5232 1253Toll-Free: 0120 655 040Fax: +81 3 5232 1710

Korea Agilent Technologies Vacuum Products Division Shinsa 2nd Bldg. 2F 966-5 Daechi-dong Kangnam-gu, Seoul KOREA 135-280 Tel.: +82 2 3452 2452Toll-Free: 080 222 2452Fax: +82 2 3452 2451

Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C.P. 03100 MEXICO, D.F. Tel.: +52 5 523 9465Fax: +52 5 523 9472

Southeast Asia Agilent Technologies Vacuum Products Division South East Asia (SEA) - Alex HoH/P: +601 2213 1253 Fax: +603 6733 8121

Singapore Agilent TechnologiesVacuum Products Division SingaporeUnit 10-04 HeliosBiopolis @ one-north11 Biopolis Way, 138667SingaporeH/P.: +65 92364988Fax: +65 64789603

Taiwan Agilent Technologies Vacuum Products Division 14F-6, No. 77, Hsin Tai Wu Road,Sec. 1Hsi chih, Taipei Hsien, Taiwan,R.O.C.Tel.: +886 2 2698 9555Toll Free: 0800 051 342Fax: +886 2 2698 9678

UK & Ireland Agilent Technologies Vacuum Products Division 6 Mead Road Oxford Industrial Park Tel.: +44 (0) 1865 291570Fax: +44 (0) 1865 291571

1 1/2-inch Stainless Steel ValvePrefaceHazard and Safety Information

Declaration of ConformitySection IDescriptionGeneralActuatorsFlanges/SealsSpecifications

Section llAssembly and InstallationGeneralStorageAssembly ProceduresMechanical InstallationSolenoid/Air Line Connection - Pneumatic ValveSolenoid/Electrical Connections - Pneumatic ValvePosition IndicatorTest Procedure

Req uest for Return Health and Safety Certification

6999-12-009J...Title 6999-12-009J.book Author Donald Grefe' Created Date 3/26/2011 4:12:01 PM...

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Transcript of 6999-12-009J...Title 6999-12-009J.book Author Donald Grefe' Created Date 3/26/2011 4:12:01 PM...