2014 International Symposium on Extreme...
Transcript of 2014 International Symposium on Extreme...
![Page 1: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/1.jpg)
© SEMATECH, Inc. SEMATECH, SEMATECH, Inc. and the SEMATECH logo are registered service marks of SEMATECH, Inc. All other service marks and trademarks are the property of their respective owners.
2014 International Symposium on
Extreme Ultraviolet Lithography
October 27-29, Washington, D.C.
Stefan Wurm, SEMATECH
Patrick Naulleau, LBNL
Opening Address & Program Overview
![Page 2: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/2.jpg)
Symposium Chair: Stefan Wurm (SEMATECH / GLOBALFOUNDRIES)
Symposium Co-Chair: Toshiro Itani (EIDEC)
Symposium Co-Chair: Kurt Ronse (imec)
27 October 2014
Welcome to the 2014 EUVL Symposium!
Hosted by: In cooperation with:
2014 EUVL Symposium 2
![Page 3: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/3.jpg)
2014 EUVL Symposium Sponsors – Thank You!
27 October 2014 2014 EUVL Symposium 3
![Page 4: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/4.jpg)
New in 2014: Student Sponsorships
27 October 2014 2014 EUVL Symposium
• A set amount of the symposium sponsorship contribution has been assigned to support student attendance of the symposium
• Sponsorships are being awarded through the 3-region (Asia/Pacific, Europe, North America) symposium abstract review process which results in a ranking of the submitted student abstracts
• Determined by the available funds, the top 11 number of students are being awarded sponsorship which includes registration, travel, and (shared) hotel rooms
• In 2014, student sponsorship were awarded to:
– 4 students from North America
– 3 students from Europe
– 4 students from Asia / Pacific
4
![Page 5: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/5.jpg)
27 October 2014
EUVL Symposium Attendance in 2014: By Geographic Region
267 registered as of October 26
United States 104 (39%)
Europe 59 (22%)
Asia / Pacific 104 (39%)
2014 EUVL Symposium 5
![Page 6: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/6.jpg)
27 October 2014
EUVL Symposium Attendance by Year
0
50
100
150
200
250
300
350
400
450
500
310
354
417 383 368
463
325 344
443
362 339
283 267
2014 EUVL Symposium 6
![Page 7: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/7.jpg)
The EUVL Symposium is evolving
27 October 2014 2014 EUVL Symposium
• Since we started the EUVL Symposium in 2002, the emphasis has been very much on EUV readiness with some sprinkling in of EUV extendibility
• As EUV Lithography moves into pilot line introduction we decided, starting with the 2014 EUVL Symposium to shift the conference focus on EUV extendibility
• The 2014 EUVL Symposium program is split roughly 50:50 between contributions focusing on EUV readiness and EUV extendibility
7
![Page 8: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/8.jpg)
OSA International Workshop on Compact EUV & X-ray Light Sources
27 October 2014 2014 EUVL Symposium
Co-locating the two conferences provides a unique opportunity for the EUV and X-ray light source developers to • interact with the EUV lithography users • learn about their fundamental and practical needs • assess the current status of EUV/Soft X-ray sources
• 52 attendees have registered for both, the EUVL Symposium
and the OSA Workshop
8
![Page 9: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/9.jpg)
The 2014 EUVL Symposium Program Team
• Program Chair: Patrick Naulleau (LBNL)
• Program Co-Chairs: – Soichi Inoue (EIDEC)
– Winfried Kaiser – (Carl Zeiss)
27 October 2014
– Dr. Naulleau has been on the leading edge of EUV lithography research for over a decade
– 17 years at Lawrence Berkeley National Laboratory and in addition 3 years Associate Professor at University at Albany, SUNY
– Since April 2010 Director of the Center for X-ray Optic at Lawrence Berkeley National Laboratory
2014 EUVL Symposium 9
![Page 10: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/10.jpg)
The 2014 EUVL Symposium Support Team at the conference site
27 October 2014
Marcy Kelly &
2014 EUVL Symposium 10
![Page 11: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/11.jpg)
Program Overview
![Page 12: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/12.jpg)
Conference Topics at a Glance
27 October 2014 2014 EUVL Symposium
Mon Oct-27
Tue Oct-28
Wed Oct-29
Thu Oct 30
Fri Oct-31
2014 EUVL Symposium OSA International Workshop on
Compact EUV & X-ray Light Sources
EUVL Insertion Readiness
Tools
Source Resist
EUVL Insertion Readiness
Mask Inspection
Optics Contamination
EUVL Extension
High NA Next Gen Sources
Next Gen Materials
Future Compact Source
Requirements and Technologies
EUV Litho
Mask inspection Wafer inspection
Materials discovery Biomedical
Workshop report outs
12
![Page 13: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/13.jpg)
Abstract count drops to 111
27 October 2014 2014 EUVL Symposium 13
0
50
100
150
200 175 173 170 155
167 182
121 146
122 111
Ab
stra
cts
![Page 14: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/14.jpg)
Abstracts by region
27 October 2014 2014 EUVL Symposium 14
AP, 42, 38%
EU, 29, 26%
US, 40, 36%
![Page 15: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/15.jpg)
Abstracts by topic
27 October 2014 2014 EUVL Symposium 15
0
10
20
30
Ab
str
ac
ts
Asia/Pacific Europe USA
![Page 16: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/16.jpg)
Abstracts by affiliation
27 October 2014 2014 EUVL Symposium 16
Industry, 43, 39%
Consortia, 21, 19%
Academia, 36, 32%
Research Labs, 11,
10%
50% increase since 2011
![Page 17: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/17.jpg)
11 student scholarships awarded across 8 universities
27 October 2014 2014 EUVL Symposium 17
![Page 18: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/18.jpg)
Abstracts by affiliation
27 October 2014 2014 EUVL Symposium 18
0
5
10
15
20
25
Abstr
acts
Research Labs Consortia Academia Industry
![Page 19: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/19.jpg)
Oral talks by region
27 October 2014 2014 EUVL Symposium 19
AP, 17, 35%
EU, 14, 28%
US, 18, 37%
![Page 20: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/20.jpg)
Oral talks by topic
27 October 2014 2014 EUVL Symposium 20
0
5
10
15
Ab
str
ac
ts
Asia/Pacific Europe
![Page 21: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/21.jpg)
Best Presentation / Best Poster Awards
27 October 2014 2014 EUVL Symposium 21
• We will be awarding $1,000 cash prizes to the best presentation and best poster of the 2014 EUVL Symposium
• Best Presentation and Best Poster selection: – When you return from the afternoon break on
Wednesday, a voting sheet will be at your seat. Please turn in this sheet to Marcy / Kelly right after the end of the last session on Wednesday
– The best poster will be selected by an industry group of senior experts
– Winners will be announced at the end of the session on Wednesday.
![Page 22: 2014 International Symposium on Extreme …euvlsymposium.lbl.gov/pdf/2014/1db5ca28de7049988c7156ef...2014 International Symposium on Extreme Ultraviolet Lithography October 27-29,](https://reader034.fdocuments.in/reader034/viewer/2022043000/5f773b9bbe8b6f0890235568/html5/thumbnails/22.jpg)
A friendly reminder for
• The audience to:
– Set cell phones to vibrate
– Do not take photographs or recordings
– Please use microphone for questions
• The presenters to:
– Turn in and check talks
– Stick to your allotted time
27 October 2014 2014 EUVL Symposium 22