2014 10-15-workshop-machinenauwkeurigheid-etalon

© Etalon AG

The LaserTRACER and LaserTRACER-MTCalibration and Testing of machines with highest accuracy

A technology overview

© Etalon AG

Accuracy for measuring machines and machine tools

For machine tools and measuring machines geometrical accuracy is a key performance feature

Highest accuracy cannot be achieved economically without numerical compensation

Full error compensation is used for measuring machines since 15 years successfully, now it is available also in the machine tool industry

Classical methods for error mapping are time consuming and need operators with years of experience

Etalons technology combines superior accuracy, short measuring times, semi automated operation, universal application and complete information

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Geometry deviations of a 3 axes machine: 21 deviations (notation according to ISO 230-1)

(Squareness for a kinematic X, Y, Z - system)

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Systematic geometric deviations (here for X axis)

Position

Roll

Straightness 1 Straightness 2

Pitch Yaw

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Geometry deviations of a rotary axis: 6 deviations per axis + 5 locations(notation according to ISO 230-1)

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The progress in metrology: Comparison of machine calibration with navigation

conventional new: Multilateration

Navigation

Calibration and testing of

machines

GPS

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The ETALON solution

TRAC-CAL

TRAC-CAL TRAC-CHECK

Error mapping and compensation

Testing and qualification

LaserTRACER-NG

LaserTRACER-MT

© Etalon AG

Interferometer with 0.001 µm resolution (1)

Patented reference sphere (2) with form deviation < 0.050 µm on a solid stem (3)

Environmental compensation for temperature, pressure, humidity

Length measurement uncertainty: U95%= 0.2 µm + 0.3 µm/m

The LaserTRACER-NG

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The LaserTRACER specification

Weights and dimension

LaserTRACER weight approx. 9.5 kg

Controller weight approx. 14 kg

LaserTRACER height 230 mm

Height of reference sphere above machine table 165 mm

Operating range

Angular range elevation axis - 38° up to + 85°

Angular range azimuth axis ± 225°

Measuring range 0.2 m up to 15 m

Angular range reflector (cateye) 120° respectively 160°

Environmental temperature for accuracy specification 15 °C – 35 °C

Dynamics

Maximal permissible acceleration of the reflector 8 m/s²

Maximal permissible velocity of the reflector 20 m/min

Accuracy

Frequency stability laser 24 h 2∙10-8

Stability of the reference sphere at ∆T = ±1 K ± 0.1 µm

Resolution interferometer 0.001 µm

Spatial displacement measurements U(k=2) = 0.2 µm + 0.3 µm/m

Power supply

Input power 50 W – 100 W

© Etalon AG

New: The LaserTRACER-MT (MT: Mechanical Tracking)

Passive tracking mechanism of the laser interferometer

For small to medium sized machines

Based on the same principles as the LaserTRACER

Light weight (< 2500 g)

For machine axes up to 1.5 m

Angular working range from -35° to +80 °(elevation) and >360° (azimuth)

The entire software options from Etalon are usable

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LaserTRACER-MT in detail

Telescope 275 mm to 965 mm (1)

Active beam steering (2)

Stabilized Interferometer (3)

2 nest with precision spheres with concentric reflectors (4,5)

© Etalon AG

The LaserTRACER-MT specification

Weights and dimension

Weight measuring unit 2.8 kg

Weight controller box 8 kg

Minimal height above machine table 120 mm

Transportation box (water and dust-proof) 63 cm x 60 cm x 33 cm (11 kg)

Operating range

Angular rang elevation axis - 30° up to + 80°

Angular range azimuth axis (restricted only by the interferometer cable) ± 270°

Radial measuring range 260 mm up to 940 mm

Cable length 5 m

Accuracy

Frequency stability laser 24 h 2∙10-8

Resolution interferometer 0.001 µm

System accuracy over the full working range 2 µm

Temperatur measurement accuracy / 3 Channels 0.1 K

© Etalon AG

XYZ-axis with the LaserTRACER-MT

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A-axis with the LaserTRACER-MT

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C-axis with the LaserTRACER-MT

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The ETALON solution

TRAC-CAL

TRAC-CAL TRAC-CHECK



LaserTRACER-NG

LaserTRACER-MT

© Etalon AG

Interferometric length measurement from at least 3 positions (no alignment necessary!)

Evaluation of all errors entirely based on highly accurate displacement information

Position of LaserTRACER position and dead path doesn’t need to be known

The Principle:

© Etalon AG

How TRAC-CAL works on linear axes

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Evaluation of 21 geomtrical deviations

© Etalon AG

How TRAC-CAL works on rotary axes

Measurement of rotary table Measurement of rotary head

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Calibration of rotary axes

Determination of

Angular positioning

Axial error motion

Radial error motions

Tilt error motions

Angular location in the machine volume

Solely based on interferometric measurements of the LaserTRACER

No additional hardware necessary

Very high accuracy

Easy application

Tilt error EAC

[µra

d]

−20

−10

0

1000 200 300Angular position [°]

Tilt error EBC

[µra

d]


−10

0

10

Position error ECC

[µra

d]


0

10

[µm

]

Radial error motion EXC


−2

0

Radial error motion EYC

[µm

]


−4

−2

0

[µm

]Axial error motion EZC


−2

0

© Etalon AG

Generation of an error map for volumetric compensation

Today most controllers offer volumetric compensation options

TRAC-CAL generates the compensation data by one click after measurement

Implementation leads to a significant accuracy enhancement in the entire volume (typically by a factor of 3-4)!

Interfaces for conventional compensations are also available

© Etalon AG

Example 1: Horizontal precision machining center

Comparison without and with compensation with Siemens VCS

0

5

10

15

20

25

30

35

40

EZ

Z (

ztz

)

EX

Z (

ztx

)

EY

Z (

zty

)

EZ

X (

xtz

)

EX

X (

xtx

)

EY

X (

xty

)

EZ

Y (

ytz

)

EX

Y (

ytx

)

EY

Y (

yty

)

EC

Z (

zrz

)

EA

Z (

zrx

)

EB

Z (

zry

)

EC

X (

xrz

)

EA

X (

xrx

)

EB

X (

xry

)

EC

Y (

yrz

)

EA

Y (

yrx

)

EB

Y (

yry

)

B0

Z (

xw

z)

A0

Z (

yw

z)

C0

Y (

xw

y)

Vorher Nachherwithout with

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Middle-class machining center

High-end machining center

without with

without with

Example 2: Machining centers with Fanuc control and 3D-Error-Compensation

© Etalon AG

Example 3:Large Gantry machine with FIDIA control

XY

XZ

YZ

© Etalon AG

Supported controllers for machine tools

Siemens

Heidenhain

Fanuc

Mazatronik

Fidia

Fagor

Supported protocols for CMMs

Zeiss CMMOS

I++

Leitz

DEA

Brown&Sharp

Wenzel

OGP

© Etalon AG

Measurements in practice

Measurement of linear axes

Measurement of rotary axes

Measurement of linear axes

Measurement of rotary axes

Lase

rTR

AC

ER

Lase

rTR

AC

ER

-MT

© Etalon AG

Summary: Error Mapping with TRAC-CAL

Highest accuracy

All deviations solely based on the wavelength of a stabilized laser

For linear axes: linear position, straightness, pitch, yaw, roll, squareness

For rotary axes: angular positioning, axial motion, radial motions, tilt motions, angular positioning

Suitable for error mapping of machine tools and measuring machines

Applicable for almost any size of working volume

Fast execution: 1 – 6 hours, depending on machine size

Simple setup and data handling

Interfaces and error mapping format for many machine tools and CMM controllers available

© Etalon AG

Machine Testing with TRAC-CHECK

Principle:

The LaserTRACER operates in “fix interferometer mode” but the measurement direction is automatically aligned by machine motion

Laser displacement measurement in any direction without manual alignment

No cosine error

Measurement procedure and data evaluation according to - ISO 10360 - 2 for CMM (linear axes, axis parallel and diagonal) - ISO 230 - 2/6 or for machine tools (linear axes, axis parallel and diagonal)- VDI/DGQ 3441 or for machine tools (linear axes, axis parallel and diagonal) - ISO 230 - 4 (machine tools, circular testing)

© Etalon AG

Circular test (for the LaserTRACER/-MT)

Following the ISO 230-4:

Bi-directional deviation

Circular deviation

Radial deviation

…

Solely based on interferometric measurements of the LaserTRACER

No additional hardware necessary

Highest accuracy

Easy use

Radius up to 15 m

© Etalon AG

Additional functions in TRAC-CHECK

Dynamic analysis of machine motions(for the LaserTRACER/-MT)

(time domain) (frequence domain) Simple geometrical

analysis

Scale factor

Squareness

Velocity

Acceleration

Jerk

Length

© Etalon AG

Summary: Machine Testing with TRAC-CHECK

Highest accuracy

Semi-automated execution

No alignment of interferometer required

Application for machines of almost any size

Fast execution: Full geometry test in 30 minutes

Complete report function satisfying highest traceability demands

For measuring machines: In accordance to the latest revision of ISO 10360-2

For machine tools: Testing according to ISO 230-2, -4 and 6 and VDI/DGQ 3441

Simple and fast determination of scale and squareness errors

© Etalon AG

Extract from ETALONs customer list

Customers in 3D metrology Customers in the machine tool industry

• Zeiss IMT / Germany

• Leitz Messtechnik / Germany

• OGP (Optical Gaging Products INC.) / USA

• Volkswagen AG / Germany

• Audi AG / Germany

• BMW AG / Germany

• Schaeffler AG / Germany

• PTB / Germany

• NIST / USA

• NPL / Great Britain

• CERN / Switzerland

• SLAC Stanford Accelerator Laboratory / USA

• Fundação CERTI / Brazil

• INTI / Argentina

• INRIM / Italia

• CMTI / India

• Heller / Germany

• Deckel Maho Gildemeister (DMG) / Germany

• Mazak / Japan

• Röders / Germany

• Dixie / Switzerland

• Heidenhain / Germany

• Agie Charmilles / Germany

• Mori Seiki/ Japan

• Fermat / Czech Republic

• Tecnalia / Spain

• WIA/ South Korea

• Waldrich Coburg / Germany

• Shaanxi Qinchuan Machinery Development / China

• SNK / Japan

• Pratt & Whitney / USA

• Toshiba Heavy Industry / Japan

• Konecranes Machine Service / Finland

• Alzmetall / Germany

© Etalon AG

Partners of ETALON

Companies with cooperation formachine compensation

System-partner for the testing oflarge machines

Official partner companiesfor machine compensation

2014 10-15-workshop-machinenauwkeurigheid-etalon

Technology

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