1996 MRS Fall Meeting/ICEM-96

lUMRS/MRS NEWS

1996 MRS Fall Meeting/ICEM-96December 2-6,1996, Boston, Massachusetts

Boston Marriott, Westin Hotel/Copley Place, Sheraton Boston Hotel and TowersMeeting Chairs: Werner Lutze, University of New Mexico; Karen Maex, IMEC; Karl Sieradzki, Arizona State University

The 1996 MRS Fall Meeting, through its4,250 oral and poster presentations, willcover a range of cross-disciplinary topicsranging from superconductors, catalyticmaterials, and nanophase materials, to inter-metallics, art and archaeology, and cement.Symposia will debut on electrochemical syn-thesis, materials for microsystems, solid-statechemistry of inorganic materials, morpho-logical control in multiphase polymer sys-tems, and low-dielectric-constant materials.

Knitted into this meeting is the Inter-national Conference on Electronic Materials(ICEM), a biennial conference sponsored bythe International Union of MaterialsResearch Societies (IUMRS). Eleven of the 35symposia are under the auspices of ICEM.Fundamentals such as defects and interfaceswill be covered, as will processing, deviceissues, and electronic packaging. Elementaland compound semiconductors, metals,oxides, and polymers are all incorporated.

In Symposium M, Control of Semicon-ductor Surfaces and Interfaces, a theoreticalapproach to the spontaneous emergence ofquantum dots, for instance when indiumand arsenic are deposited onto galliumarsenide, will be presented. The numberand size of the dots has shown good agree-ment with experiment. Atomic layer manip-ulation, phenomena at metal-SiC andmetal/GaN contacts, and real time and exsitu optical characterization are other fea-tures of this symposium.

Solid/electrolyte interfaces in electro-chemical synthesis and modification of ma-terials will be discussed in Symposium P. Insitu STM can be used to probe the atomisticdetails of heteroepitaxial electrodeposition.

Symposium Q, Advances in Microcrystal-line and Nanocrystalline Semiconductors—1996, will kick off with an award presenta-tion to Kazunobu Tanaka, for receiving theN. Mott Award given by the Journal ofNoncrystalline Solids, followed by a plenarysession covering nano/microcrystallinesemiconductor thin films, semiconductorquantum dots, and porous silicon.

Symposium N, ni-V Nitrides, will covernitride lasers, deposition and growthprocesses, design consideration of GaN-based surface emitting lasers, very low dis-location densities in GaN-AlGaN het-erostructures, doping sources, and materialsand device properties.

Reactive ion etching has emerged as animportant technology for fabricatingmicrosystems, as will be described in Sym-posium I. Metalorganic chemical vapordeposition, molecular beam epitaxy, and

ion implantation are incorporated into sev-eral other symposia.

To treat the problem of interconnect delayin small devices, Symposium H, Low-Dielectric Constant Materials, will examinesome of the candidates being considered asdielectrics in integrated circuits, includingpolymers such as fluorinated heteroaromat-ic polyethers, amorphous silica, and dia-mondlike carbon.

Environmental, Safety, and Health Issuesin 1C Production will be presented inSymposium L, giving examples of how toreduce water and chemical use in semicon-ductor manufacturing, handle hazardousgases such as perfluoro compounds andhydrides, and optimize equipment andprocess methods.

Symposium C, Thin Films and Surfaces—Structure and Morphology, has been splitinto two parallel symposia, due to its size.Symposium Ca will look at the effect of sur-face stress and its effect on thin film epitaxy,near-surface mechanical behavior, and sim-ulations of thin film growth. Symposium Cbwill include extremely sensitive in situ mea-surements in real time of stresses developedduring thin film growth, kinetics of phasetransformations, and compliant substratesfor heteroepitaxy.

Engineering interfaces to achieve opti-mized properties will be discussed in Sym-posium W. This involves characterizing theinterfaces and connecting this information tomechanical properties, understanding theinterface chemistry, and modeling. Mechani-cal properties of composites will be included.

Smart materials are an outlet for creativi-ty, suggesting unique materials such asadaptive composites by embedding shape-memory-alloy fibers into a matrix. Such top-ics will be included in Symposium Y.

A new polymers angle at this meeting isMorphological Control in Multiphase Poly-mer Mixtures, Symposium BB. The influenceof block type and architecture on microdo-main structure in block copolymers will bediscussed. These are novel polymeric materi-als exhibiting ordering patterns with unusualproperties including ferroelectric switching.

Symposium CC, Neutron and X-RayScattering Studies of Materials, will start offwith a session on correlated electrons andsuperconductors, including neutron-scatter-ing studies of charge and spin stripe correla-tions in cuprates and nickelates, and anotheron experimental evidence for the dynamicJohn-Teller effect in LaaffiCaassMnCv

Protein folding, pattern formation duringfilm growth, and manipulation of DNA and

other materials with probe microscopies andlaser tweezers will be addressed in Sympo-sium EE. In a special session at 7 p.m. onTuesday, Nobel Laureate Pierre-Gilles deGennes will give a talk on surface flow ofgranular mixtures.

Special EventsJohn P. McTague, Vice President of

Technical Affairs at Ford Motor Company,will be the plenary speaker Mondayevening. Von Hippel, Turnbull, MRSMedal, and graduate student awards willbe presented during the awards ceremonyWednesday evening, followed by the VonHippel award recipient's lecture and awine and cheese reception.

Symposium X, Frontiers of Materials Re-search, presents a noontime series of reviewsfor the nonspecialist. Featured will be reflec-tions on the evolution of polymer materialsby de Gennes, options for disposal ofweapons plutonium, a view of theChernobyl nuclear plant accident 10 yearslater, recent developments in electronmicroscopy, electrical resistance of a carbonnanotube, nanophase materials, metallicglasses, and metallic corrosion ranging fromrusty nails to atomic perspectives.

An interactive public affairs forum willfeature members of the National ResearchCouncil Committee on Condensed Matterand Materials Physics and an IUMRSForum will address policies and plans relat-ed to the future of materials research andeducation in the global community.

Sunday at 6:30 p.m., a junior facultyforum will address what it takes to gettenure, and at 7 p.m. a student mixer will beheld. A two-day workshop on materialseducation will take place in Symposium JJ.A breakfast panel, "Alternative Careers: LifeBeyond the Lab," is scheduled for Tuesdayat 7 a.m., featuring scientists who have pur-sued careers in areas such as science policy,science journalism, and patent law. A careerworkshop is planned for Tuesday and a jobplacement service will be conductedTuesday through Thursday. Meeting regis-trants also can benefit from poster sessions,a major exhibit, and tutorials integrated intothe technical program. See the followingpages for a matrix of symposia sessions,profiles of exhibitors, a registration form,and other information. If you need a pro-gram or would like to register, contact MRSat 412-367-3003; fax 412-367-4373; [email protected], or see the MRS Websitehttp: / /www.mrs.org/for information.

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MRS 1996 FALL MEETING SESSION SCHEDULE • December 2 - 6 • Boston, MA

Symposium

A: Materials Mod. & Synthesisby Ion Beam Processing

B: Microstnicture EvolutionDuring Irradiation

Ca: Structure and Evolution ofSurfaces

d>: Thin Films: Surface andMorphology

D: Prop./Applic. of ElectronicOrganic Matls. * Fullerenes

E Defects in ElectronicMaterials

R Microstructural Evolution InBulk Phases

G: Atomic Resol. Microscopyof Surfaces & Interfaces

H: Low-Dielectric ConstantMaterials

I: Materials In Microsystems

J: Electronic PackagingMaterials Science IX

K: Amorphous and CrystallineInsulating Thin Films IV

L Environ., Safety, and HealthIssues in 1C Production

M: Control of SemiconductorSurfaces and Interfaces

N: Ill-V Nitrides

0: Infrared Applic. of SC -Matls., Process., 1 Devices

P: Electrochemical Synthesisand Modif. of Materials

Q: Advances in Microcryst. &Nanocrystalllne SC -1996

R: Solid-State Chemistry ofInorganic Materials

S: Advanced CatalyticMaterials III

T: Glasses & Glass Formers -Current Issues

U: Blomatls. Tech. - Molec.Struc.-Prop. Relationships

V: Nanophase andNanocomposite Materials II

W Interfacial Engineering forOptimized Properties

X: Frontiers of MaterialsResearch

Y: Adv. in Materials for SmartSystems - Fund. S, Applic.

£ High-Temperature OrderedIntermetallic Alloys

BB: Morph. Control in Multi-phase Polymer Mixtures

CC: Neutron and X-Ray Scatter-ing Studies ol Materials

DD: Materials Issues In Art andArchaeology V

EE: Statistical Mechanics InPhysics and Biology

FF: Dynamics in SmallConfining Systems IV

GGiHigh-TcSuperconduct.-Interplay of Fund. S Appl.

HH: Hardened Cement Paste *Composites

11: Scientific Basis lor NuclearWaste Management XX

JJ: Workshop on MaterialsEducation

Location

America Center(W)

America North(W)

Salon E(M)

Salon F(M)

Republic B(S)

Essex Center(W)

Wellesley(M)

Yarmouth/Vineyard (M)

Essex West(W)

IndependenceEast (S)

Essex East(W)

Fairfax A(S)

Essex West(W)

Salon C/D(M)

America South(W)

Suffolk(M)

Providence/Orleans (M)

Salon G(M)

Essex South(W)

Essex North/Center (W)

Simmons(M)

IndependenceEast(S)

Salon J/K(M)

Salon H/l(M)

Salon G(M)

Commonwealth(S)

Salon A/B(M)

Hampton(S)

Fairfax B(S)

Gardner(S)

Constitution<S)

Republic A(S)

IndependenceCenter/West (S)

St. George C/D(W)

Staffordshire(W)

Regis(M)

Monday

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Thursday

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Shaded blocks indicate scheduled symposium sessions.(M) = Boston Marriott; no evening posters • (S) = Sheraton; Posters: Grand Ballroom/Constitution

TS = Tutorial Session • P = Poster Session

(W) = Westin; Posters: America Ballroom

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MRS 1996 FALL MEETINGBoston, MA

Lxation/Lodging/TravelBoston Marriott/Copley Place110 Huntington AvenueBoston, MA 02116(800) 228-9290(617) 236-5800 (Direct)Fax (617) 236-5885Rate: $123/Single*

$137/Double*

Westin Hotel/Copley Place10 Huntington AvenueBoston, MA 02116(800) 228-3000(617) 262-9600 (Direct)Fax (617) 424-7483Rate: $127/Single*

$142/Double*

Sheraton Boston Hotel and TowersPrudential Plaza39 Dalton StreetBoston, MA 02199(617) 236-2000 (Main Desk)(617) 236-2020 (Reservations)Fax (617) 236-6095Rate: $115/Single*

$125/Double*

* plus Massachusetts tax

DEADLINE FOR HOTEL RESERVATIONS:November 1,1996

A block of rooms has been reserved for MRS meetingattendees at the Boston Marriott, Westin, and SheratonBoston Hotels. Call or fax your preferred hotel andrefer to the Materials Research Society's meeting toreceive the special rates.

A list of alternate lodging accommodations can beobtained via e-mail ([email protected]) or fax request toMRS Member Services, (412) 367-4373.

• Airline TransportationThe official travel management company for theMaterials Research Society's 1996 Fall Meeting isGiselle's Travel Bureau. They will guarantee the lowestfares on any airline at time of booking. A special dis-count has been arranged with American Airlines whichincludes 5% off the lowest available fare or 10% offnonrestricted coach fares. Call Giselle's, 1-800-523-0100, Monday - Friday, 7:30 a.m. - 5:30 p.m. PST, orFax (916) 565-0936, and mention the MaterialsResearch Society's meeting.

MRS meeting attendees receive the following travel bene-fits and services: • Lowest fares on any airline guaranteed• Computerized driving instructions from LoganInternational Airport to your hotel • Car rental savings

• Local TransportationShuttle service to the Boston Marriott, Westin, andSheraton Boston Hotels from Logan International Airportdeparts every half-hour, 7:00 a.m.-7:00 p.m., from thedesignated shuttle stop in front of each terminal.

There is a free shuttle from airport terminals to the airportsubway station (The "T"). Copley Station is within oneblock of the Marriott, Westin, and Sheraton Hotels on the"Green Line."

^ ParkingA parking garage is adjacent to the meeting hotels.

• Child CareCheck with the Concierge Desk at the individual hotels fora comprehensive roster of licensed and bonded sitters.

MRS 1996 Fall Meeting Symposium Tutorial Program

MONDAY • DECEMBER 2

Symposium E8:30 a.m. - noon

Magnetic and Laser Resonance TechniquesEssex Center - Weslin

Symposium J2:00 - 5:00 p.m.

Revolution in Packaged ElectronicsEssex East - Westin

TUESDAY • DECEMBER 3

Symposium H5:00 - 8:00 p.m.

Low-Dielectric Constant Materials forDeep-Submicron Interconnects

Essex West - Westin

Symposium 13:30 - 7:00 p.m.

Plasma Etching in MicrotechnologyIndependence East - Sheraton Boston

Symposium K9:00-11:15 a.m.

Silicon on Insulator (SOI) - Materials Synthesis, DeviceOperation and Characterization Techniques

Fairfax A - Sheraton Boston

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Preregistration IMIRISI 1996 Fall Meeting-Boston, MA • December 2-6,1996M A I L Return this form with payment to:

MRS Member Services9800 McKnight RoadPittsburgh, PA 15237-6006

P H O N E Cal1 M R S Member Services, (412) 367-3003,between 8:00 a.m. and 5:00 p.m. Eastern time.Telephone registration requires creditcard payment; have your credit card andthis form in front of you for easy reference.

FAX Transmit this form via fax toMRS Member Services,(412) 367-4373, in service 24 hoursevery day. Fax registration requirescredit card payment.

Preregistration Deadline: November 15,1996A Meeting Preregistration

I PAYMENT MUST ACCOMPANY PREREGISTRATION. |

Please check category and enter amount in payment section below,a $275 MRS Member • $ 75 MRS Student Member a $105 Retireda $325 Nonmember Q $ 85 Student Nonmember a $105 Unemployed

After November 15,1996:

a $315 MRS Member Q $ 85 MRS Student Member Q $105 Retireda $365 Nonmember D $ 95 Student Nonmember Q $105 Unemployed

Student registration will not be processed without proof of full-time student status.All registrations include complimentary MRS membership through December 31,1997.

Enter total here and in Payment Options box. TOTAL S

Symposium interest (please check all that apply):

D A D C b D F D l O L D O O R D U D Y D C C D F F D MD B D D D G D J D M D P D S D V D Z D D D D G G D J JD C a O E D H D K O N D Q D T D W D B B D E E D H H

I B P r O C e e d i n g S (published after this meeting)These rates apply only to meeting attendees and MRS members.Nonmembers must contact MRS headquarters for prices.

No. Copies TotalA: Ion Beam Processinq $50 x - $B: Microstructure Evolution Durinq Irradiation $55 x - $Ca: Structure/Evolution of Surfaces $50 x - $Cb: Thin Films Structure & Morpholoav $50 x - $E: Defects in Electronic Materials II $55 x = $H: Low-Dielectric Constant Materials II $45 x - $I: Materials for Mechanical & Optical Microsystems ....$55 x = $J: Electronic Packaqinq Materials Science IX $52 x - $K: Insulating Thin Films-1996 $52 x - $L: Environmental/Safety in IC-Production $55 x =$M: Semiconductor Surfaces & Interfaces $45 x - $N: Ill-V Nitrides $50 x - $O: Infrared Applications of Semiconductors $55 x - $P: Electrochemical Synthesis of Materials $48 x - $Q: Micro/NanocrystallineSemiconductors-1996 $55 x =$R: Solid-State Chemistry of Inorganics $55 x - $S: Advanced Catalytic Materials-1996 $55 x - $T: Glasses & Glass Formers $55 x - $U: Biomaterials & Bioloaically-lnspired Materials $55 x - $V: Nanophase & Nanocomposite Materials II $53 x =$W: Interfacial Enaineerina $55 x - $Y: Materials for Smart Systems II $50 x - $Z: Hiqh-Temperature Intermetallic Alloys VII $55 x - $BB: Multiphase Polymer Mixtures $55 x - $DD: Art & Archaeoloqv V $52 x - $EE: Statistical Mechanics in Physics & Bioloav $55 x - $FF: Dynamics in Small Confininq Svstems III $52 x - $II: NuclearWasteManaqementXX $55 x - $

Sub-Total $Sales Tax (PA residents 7%) $

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O Journal of Materials Research 1997Subscription at U.S. Member Rate (one per registrant) Q $75

Subscription at Non-U.S. Member Rate (one per registrant) Q $88

Optional Air Freight (non-U.S.) • $72

Order your CDROM Version of JMR at the MRS 1996 Fall Meeting.

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D Tutorials(Optional Course Materials for Preregistrants)

Meeting attendees may participate in all tutorial sessions at no additionalfee. Tutorial notes are available only to those who preregister for the tutorial.

To preregister and receive tutorial notes, check the appropriate tutorial(s)below.

There is no refund for cancellation; however, tutorial notes will be provided.

Q FTE Magnetic and Laser Resonance Techniques $25

• FTH Low-Dielectric Constant Materialsfor Deep-Submicron Interconnects $25

• FTI Plasma Etching in Microtechnology $25

• FTJ Revolution in Packaged Electronics $25

• FTK Silicon on Insulator (SOI) - Materials Synthesis, DeviceOperation and Characterization Techniques $25

Enter total here and in box below. TOTAL

PAYMENT OPTIONS

• Payment is enclosed. Make checks payable, in U.S. dollars, toMaterials Research Society. Payment from outside the U.S. shouldbe drawn on a correspondent U.S. bank.

Credit card payment: D Visa • MasterCard • Diners Club O AmEx

Card No. Exp.

Sianature

A Meetina Prereaistration (from left) $

B Proceedinas (from left) $

C Journal of Materials Research (from left) $

D Tutorials (from above) $

TOTAL FEES PAID $

Cancellation/Refunds

If you have already registered but are unable to attend the meeting, you mustnotify MRS in writing of your request for a refund. Refunds will be madeupon receipt of this written notice, less a $25 service charge. If you apply aportion of this refund to member dues or any MRS publications, the servicecharge will be waived. MRS will not honor requests made more than onecalendar month after the close of the meeting.

NOTE: Please enter MRS ID No. (0...) from your MRSmailing label if available. If not known, draw a line i 1through code box at right.

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1996 FALL MEETINGBoston, MA

AWARD PRESENTATIONSThe MRS Award Ceremony will be held on Wednesday evening, December 4, at 6:00 p.m., in the Boston Marriott Hotel,Salon E, followed by a wine and cheese reception. The Von Hippel, Turnbull Lecturer, MRS Medal, and Graduate StudentAwards will be presented during this ceremony.

Von Hippel Award

Sir Alan H. CottrellCambridge UniversityUnited Kingdom

"The Art of Simplification inMaterials Science"

Talk PresentationWednesday, December 4, 6:00 p.m.Awards CeremonySalon E, Boston Marriott

Turnbull Lecturer Award

Robert E. NewnhamThe Pennsylvania State UniversityMaterials Research Laboratory

"Molecular Mechanisms in SmartMaterials"

Talk PresentationMonday, December 2,10:00 a.m.Symposium Y, Session Y1.5Commonwealth RoomSheraton Boston

MRS Medal Award

Jerry D.TersoffIBM T.J. Watson Research Center

"Strain Relaxation and theMorphology of Thin Films"

Talk PresentationTuesday, December 3, 5:00 p.m.Symposium Ca, Session Ca5.11Salon E, Boston Marriott

Graduate Student Awards

The Society presents the Graduate Student Award tograduate students who are presenting significant andtimely research at the 1996 Fall Meeting as an author orco-author of a symposium paper. Check the MeetingGuide on site for the Graduate Student Award SpecialTalk Session schedule which will be held on Monday,December 2, at 12:00 noon.

SPECIAL FUNCTIONS

lUMRS InternationalForum on Materials

Research and Education PolicyMonday, December 2,1:30 - 5:30 p.m.Cape Cod/Hyannis, Boston Marriott

Public Affairs Forum

Tuesday, December 3,8:00 - 9:00 a.m.Boston Marriott

"The Future of Condensed Matter and Materials Physics"

Plenary Session

John P. McTagueVice President of Technical AffairsFord Motor Company

"Where in the World is Science andTechnology Going?

Monday, December 2, 6:00 p.m.Salon E, Boston Marriott

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FORTHCOMING FROM MRS AT SPECIAL PRE-MEETING PRICES...

1996 Fall Meeting Symposium ProceedingsPlace your order today for proceedings of the 1996 MRS Fall Meeting

in Boston and SAVE!Special pre-meeting prices effective until December 15, 1996. (After thai, pay the higher price on the rh

THESE BOOKS ARE SCHEDULED FOR PUBLICATION BY SPRING OR EARLY SUMMER 1997.

I N C L U D I N G

The 1996 ICEM MeetingInternational Conference on Electronic Materials

A: Materials Modification and Synthesis byIon Beam Processing

Editors: D.E. Alexander, W. Skorupa, N.W. Cheung, B. ParkISBN: 1-55899-342-8 Code: 438-B

$50.00 SWJ.OO MRS Member$58.00 $68,00 U.S. List$66.00 J K M Non-U.S.

B: Microstructure Evolution During IrradiationEditors: I Diaz de Iα Rubia, G.S. Was, I.M. Robertson, L.W. HobbsISBN: 1-55899-343-6 Code: 439-B

$55.00 S6S.W MRS Member$63.00 $J|0 U.S. List$73.00 fSm Non-U.S.

Cα: Structure and Evolution of SurfacesEditors: R.C. Cammarata, E.H. Chason, T.LEinstein, E.D. WilliamsISBN: 1-55899-344-4 Code: 440-B

$50.00 $60.08 MRS Member$58.00 $68.00 U.S. List$66.00 M m Non-U.S.

Cb: Thin Films—Structure and MorphologyEditors: R.C. Cammarata, E.H. Chason, T.LEinstein, E.D. WilliamsISBN: 1-55899-345-2 Code: 441-B

$50.00 Sftjf MRS Member$58.00 S j E o U.S. List$66.00 i p i B Non-U.S.

E: Defects in Electronic Materials IIEditors: J. Michel, T.A. Kennedy, K. Wada, K. ThonkeISBN: 1-55899-346-0 Code: 442-B

$55.00 $e|.00 MRS Member$63.00 $75.00 U.S. List$73.00 Mm Non-U.S.

H: Low-Dielectric Constant Materials IIEditors: K. Uram, H. Treichel, A.C. Jones, A. LagendijkISBN:1-55899-347-9 M Code: 443-B

$45.00 S54JC MRS Member$52.00 $Mo U.S. List$60.00 J i l l ) Non-U.S.

I: Materials for Mechanical and Optical MicrosystemsEditors: M. Elwenspoek, Y. Uenishi, E. Obermeier, H. Fupta,S. Johansson, M. ReedISBN:1-55899-348-7 Code: 444-8

$55.00 $65.00 MRS Member$63.00 $ SO U.S. List$73.00 $86.0(1 Non-U.S.

J: Electronic Packaging Materials Science IXEditors: P.S. Ho, S.K. Groothuis, K. Ishida, T. WuISBN: 1-55899 349-5 Code: 445-B

$52.00 $62.0e MRS Member$60.00 $ | jQO U.S. List$69.00 $82.00 Non-U.S.

K: Amorphous and Crystalline Insulating Thin Films—1996Editors: W.L. Warren, J. Konicki, R.A.B. Devine, M. Matsumura,S. Cristoloveanu, Y. HommaISBN:1-55899-350-9 Code: 446-B

$52.00 S62.M MRS Member$60.00 Sjfo U.S. List$69.00 M t M Non-U.S.

L: Environmental Safety, and Health Issues in 1C ProductionEditors: R. Reif, A. Bowling, A. Tonti, M. HeynsISBN: 1-55899-351-7 Code: 447-B

S55.00 $65,00 MRS MemberS63.00 $75X10 U.S. ListS73.00 $66.00 Non-U.S.

M : Control of Semiconductor Surfaces and InterfacesEditois: S.M. Prokes, O.J. Glembocki. S.K. Srierley, J.M. Woodall,J.M. GibsonISBN: 1-55899-352-5 Code: 448-B

$45.00 $54,00 MRS Member$52.00 $«$ U.S. Ust$60.00 j f f l . i l Non-U.S.

N: Ill-V NitridesEditors: F.A. Ponce, I D . Moustakas, I. Akasaki, B.A. MonemarISBN: 1-55899-353-3 Code: 449-B

$50.00 Sttjf MRS Member$58.00 $l|0 U.S. List$66.00 J l Non-U.S.

O: Infrared Applications of Semiconductors—Materials,Processing and Devices

Editors: M.O. Manasreh, T.H. Myers, F.H. Julien, J.E. ColonISBN: 1-55899-354 1 Code: 450-8

$55.00 $65.00 MRS Member$63.00 $75,00 U.S. List$73.00 S&6.00 Non-U.S.

P: Electrochemical Synthesis and Modification of MaterialsEditors: S.G. Corcoran, P.C. Searson, T.P. Moffat, P.C. Andricacos,J.L. DelplanckeISBN: 1 55899-355-X Code: 451-B

$48.00 $57.00 MRS Member$55.00 $64.00 U.S. List$63.00 $76.00 Non-U.S.

Q: Advances in Microcrystalline and NanocrystallineSemiconductors—1996

Editors: P.M. Fauchet, R.W. Collins, P.A. Alivisatos, I. Shimizu,T. Shimoda, J.-C. VialISBN: 1-55899-356-8 Code: 452 B

$55.00 $65.80 MRS Member$63.00 S7S SO U.S. List$73.00 $86.00 Non-U.S.

R: Solid-State Chemistry of Inorganic MaterialsEditors: A. Jacobson, P. Davies, T. Vanderah, C. TorardiISBN: 1-55899-357-6 Code: 453-B

$55.00 $65.00 MRS Member$63.00 $7S.fl0 U.S. List$73.00 S86.M Non-U.S.

S: Advanced Catalytic M a t e r i a l s — 1 9 9 6Editors: MJ. Ledoux, P.W. Lednor, D.A. Nagaki, L.T. ThompsonISBN: 1-55899-358-4 „ Code: 454-B

$55.00 $|jf MRS Member$63.00 $Ji0 U.S. List$73.00 j R i Non-U.S.

T: Glasses and Glass Formers—Current IssuesEditors: C.A. Angell, T. Egami, J. Kieffer, U. Nienhaus, K.L. NgaiISBN: 1-55899-359-2 Code: 455-B

$55.00 $65.80 MRS Member$63.00 $75,00 U.S. List$73.00 ,$86.00 Non-U.S.

h>U: Recent Advances in Biomaterials and Biologically-

Inspired Materials: Surfaces, Thin Films and BulkEditors: D.F. Williams, M. Spector, A. BellareISBN: 1-55899-360-6 Code: 456-B

$55.00 $6100 MRS Member$63.00 $7«>0 U.S. List$73.00 $86.00 Non-U.S.

V: Nanophase and Nanocomposite Materials IIEditors: S. Komarneni, J.C. Parker, H.J. WollenbergerISBN: 1-55899-361-4 Code: 457-B

$53.00 S a j f t MRS MemberS61.00 STSU) U.S. ListS70.00 , m m Non-U.S.

W : Interfadal Engineering for Optimized PropertiesEditors: C.L Brian), CB. Carter, E.L HallISBN: 1-55899-362-2 Code: 458-B

S55.00 $ & * ' MRS Member$63.00 Safe) U.S. List$73.00 0bm Non-U.S.

Y: Materials for Smart Systems IIEditors: E.P. George, R. Gotthardt, K. Otsuka, S. Trolier-McKinstry,M.Wun-FogleISBN: 1-55899-363-0 _ Code: 459-B

$50.00 $%# MRS Member$58.00 S j E o U.S. List$66.00 jnm Non-U.S.

Z: High-Temperature Ordered Intermetallic Alloys VI IEditors: C.C. Koch, N.S. Stoloff, C.T. Liu, A. WannerISBN: 1-55899-364-9 „, _ Code: 460-B

$55.00 $M MRS Member$63.00 $75:00 U.S. List$73.00 J S l Non-U.S.

BB: Morphological Control in Multiphase Polymer MixturesEditors: R.M. Briber, D.G. Peiffer, C.C. HanISBN: 1-55899-365-7 „ Code: 461-B

$55.00 $65,06 MRS Member$63.00 H U.S. List$73.00 j p i i ) Non-U.S.

DD: Materials Issues in Art and Archaeology VEditors: P.B. Vandiver, J.R. Druzik, J. Merkel, J. StewartISBN: 1-55899-366-5 B1 # Code: 462-B

$52.00 $tp MRS Member$60.00 $7№0 U.S. List$69.00 j p . l Non-U.S.

EE: Statistical Mechanics in Physics and BiologyEditors: D. Wirtz, T.C. Halsey, J. van ZantenISBN: 1-55899-367-3 „ Code: 463-B

$55.00 $65,00 MRS Member$63.00 $75.80 U.S. List$73.00 J E i Non-U.S.

FF: Dynamics in Small Confining Systems IIIEditors: J.M. Drake, J. Klafter, R. KopelmanISBN: 1-55899-368-1 „, M Code: 464-B

$52.00 S a U O MRS Member$60.00 » U.S. List$69.00 I p l Non-U.S.

I I : Scientific Basis for Nuclear Waste Management XXEditors: W.J. Gray, I.R. TriayISBN: 1 55899-369-X Code: 465-B

$55.00 $65.00 MRS Member$63.00 Slip U.S. List$73.00 J E i Non-U.S.

M I R I S I Materials Research Society9800 McKnight Road, Pittsburgh, PA 15237Phone: 412-367-3012, Fax: 412-367-4373

MATERIALSRESEARCH

SOCIETY

In Europe, Africa and the Middle East:Clarke Associates—Europe, Ltd.Second Floor, 2-3 Denmark StreetBristol BSl 5DQ ENGLANDPhone: 0117 9268864 • Fax: 0117 9226437

960154https://www.cambridge.org/core/terms. https://doi.org/10.1557/S0883769400031663Downloaded from https://www.cambridge.org/core. IP address: 65.21.228.167, on 31 Jan 2022 at 16:43:12, subject to the Cambridge Core terms of use, available at


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I N C L U D I N G

The 1996 ICEM Meetingim.milloiul Confiranc* on Elfdronlc Milarl i l i

MRS Exhibit Boston Marriott Hotel and Westin Hotel/Copley PlaceThe MRS Exhibit, held in conjunction with the 1996 MRS Fall Meeting, will encompass the full spectrum of equipment, instrumentation, prod-ucts, software, publications and services for materials research. As always, the exhibit will closely parallel the nature of the technical symposia.The technical program has been arranged to allow meeting participants ample opportunity to visit the exhibit, and MRS encourages attendeesto visit the exhibit by scheduling coffee breaks, deli-style lunches, and a meeting-wide reception in University Hall.

Exhibit Hours:

Tuesday, December 3

Wednesday, December 4

Thursday, December 5

Marriott Hotel Westin Hotel (W)University Hall (U) & Atrium Lounge (A) 3rd & 4th Floors

Noon - 6:30 p.m. 9:30 a.m. - 5:00 p.m.Complimentary Reception will be held at the Marriott on Tuesday evening from 5:00 p.m. - 6:30 p.m.

9:30 a.m. - 5:00 p.m. 9:30 a.m. -12:30 p.m.7:30 p.m. -10:00 p.m.

9:30 a.m. -1:00 p.m. 9:30 a.m. -12:30 p.m.

Partial List of 1996 Fall Exhibitors (as of September 9,1996) • denotes Corporate Affiliate:

A & N Corporation #U528377 Highway 40 W.P.O. Box 878Inglis,FL 34449Telephone: (352) 447-2411Fax: (352) 447-2322

A&N Corporation has been a manufac-turer of high vacuum components since1965. Our product lines include: ISO-KF (QF) flanges, ISO-MF (LF) flanges,UHV (CF) flanges, ASA flanges,Vacuum couplings, Feedthroughs, andVacuum BallValves. We maintainextensive inventories of all catalogueditems, and routinely ship products on asame or next day basis.

• ABB Extrel #U524575 Epsilon DrivePittsburgh, PA 15238Telephone: (412) 967-5752Fax:(412)963-6578E-mail: [email protected]

ABB Extrel has been manufacturinghigh resolution, high sensitivityQuadrupole Mass Spectrometers since1964. ABB Extrel's instruments areused to monitor and control the chem-istry of processes and look for contam-inates that simple residual gas analysiscannot detect. We place special empha-sis on plasma, molecular beam, envi-ronmental, and gas purity applications.

Academic Press, Inc. #U114525 B Street, Suite 1900San Diego, CA 92101Telephone: (619) 699-6774Fax:(619)699-6580

With 50+ year of experience, AcademicPress continues its quest for excellencein scientific, technical publishing. Ourthree offices, San Diego, California;Cambridge, Massachusetts; andLondon, England, collectively publish400 new book titles and 212 journalseach year,(see ad in this issue)

Addison-Wesley Publishing Company,Inc. #U118

One Jacob WayReading, MA 01867Telephone: (617) 944-3700Fax:(617)944-8964E-mail: [email protected]

Addison-Wesley will display a widerange of books and journals in thefield of Materials Science.

• Advanced Control SystemsCorporation #U313

10 Old Mine Rock WayHingham, MA 02043Telephone: (617) 740-0223Fax: (617) 740-4227E-mail: [email protected]

ACS designs and manufactures con-trollers and drivers for steppingmotors. Featuring bi-level drives,

which avoid most RFl and motor shaftperturbations associated with chopperdrives, and integrated controllerswhich communicate with host com-puter via serial port in straight ASCIItype messages. The host requests oper-ation; the controller acknowledgeseach request.

• AIXTRON. Inc. #U5161569 Barclay Blvd.Buffalo Grove, IL 60089Telephone: (847) 215-7335Fax: (847) 215-7341

World-leading MOCVD systems man-ufacturer based in Germany with aUSA subsidiary and service centers inmany countries. Widest possiblechoice of grown layers with highestthroughput and uniformity of deposi-tion. Planetary® production systemsin production use by several yearsahead of other competitors and for themost critical applications.

AJA International, Inc. #U300809 Country WayP.O. Box 246N.Scituate, MA 02060Telephone: (617) 545-7365Fax:(617)545-4105

Circular and rectangular MagnetronSputtering Sources and Targets, ATCR&D Sputtering Systems, MicrowavePower Supplies and Components,"Planar ECR" Sources, Diamond FilmEquipment, Electrostatic Chucks andLN2 Cooled Electrodes, VacuumComponents.

Alcatel Vacuum Products, Inc. #A1367 Sharp StreetHingham, MA 02043Telephone: (617) 331-4200Fax:(617)331-4230

Manufactures a complete and compre-hensive range of DRY Pumps andPumping Systems, Ceramic BallBearing, Turbomolecular Pumps,DRYTEL Pumping Systems, MaglevTurbomolecular pumps, Helium LeakDetector Line (that includes clean-room, compatible dry leak detectors),rotary vane direct drive pumps andblower packages, valves, gauges andaccessories.

• Aldrich Chemical Company, Inc.#U533

P.O. Box 355Milwaukee, WI53201Telephone: (414) 298-7910Fax:(414)298-7960

Aldrich produces and stocks a widerange of chemical products—includingelemental forms, alloys, high purityinorganics, anhydrous metal halides,organometallics, ligands, ACSreagents, and analytical standards—used in scientific research, product

development, and analysis in the inor-ganic, organometallic, and materialsscience fields.

AlfaAesar#U50430 Bond StreetWard Hill, MA 01835Telephone: (508) 521-6328Fax: (508) 521-6350

The 1995-96 Alfa Aesar Catalog fea-tures over 12,000 products...includinginorganics, rare earth metals and com-pounds, organic and organometallics,metal alkoxides, nanosize powders,pure elements and metals availablefrom technical grade to high-purity,analytical standards, electronic materi-als, precious and base metal labware,glassware and many more. Items arestocked and orders are shipped thesame day. Research and productionquantities quoted. ISO 9002 Certified.

Allied High Tech Products, Inc. #W252376 E.Pacifica PlaceRancho Dominguez, CA 90220Telephone: (310) 635-2466Fax: (310) 762-6808E-mail: [email protected]

Items on display will include AUied'sNEW Automated Workstation forPrecision Metallographic, SEM andTEM Sample Preparation. Applica-tions include hands-free TEM Wedgepolishing, parallel surface preparationand lapping, and site specific cross-sectioning for microscopic analysis. Avariety of other fixtures and suppliesfor these applications will be shown.

American Chemical Society #U1111155 16th Street N.W.Washington, DC 20036Telephone: (202) 872-4600Fax:(202) 833-7736E-mail: [email protected]

Displayed will be numerous periodi-cals including Chemistry of Materials,Macromolecules, Langmuir, theJournal of Physical Chemistry and thenew "Chemical Health & Safety." Alsofeatured will be the latest books onpolymer science, industrial andapplied chemistry of interest to materi-als researchers. Literature will also beavailable on ACS software and elec-tronic products.

American Institute of Physics, Inc.#U107

500 Sunnyside BoulevardWoodbury, NY 11797Telephone: (516) 576-2484Fax: (516) 576-2374

The American Institute of Physics is anot-for-profit umbrella organizationserving ten Member Societies and isone of the world's largest publishers ofphysics-related literature. At the meet-ing, MRS Members receive a 25% dis-

count on AIP Press books and mayparticipate in interactive demonstra-tions of AIP online and CD-ROMproducts.

• APD Cryogenics, Inc. #A31833 Vultee StreetAllentown, PA 18103-4783Telephone: (610) 791-6700Fax: (610) 791-0561E-mail: salesSapdcryogenics.com

APD's Displex® product line, theindustry-standard for 2-stage GMexpanders, allows the user the versatil-ity of a broad temperature range (6.5-450 Kelvin) coupled with an enormousvariety of specialized attachments forcustomization to your application.Also from APD, Heli-tran® open-cyclesystem, Heliplex® for experimentationto 4.2 Kelvin, the OmniPlex™exchange gas cryostats, andCRYOTIGER®, a closed-cycle systemfor use instead of LN2.

ASM International #U121,1239639 Kinsman RoadMaterials Park, OH 44073Telephone: (216) 338-5151Fax:(216)338-4634E-mail: [email protected]: nttp: / / www.asm-intl.org

ASM International, "The MaterialsInformation Society," will display anddemo various information productsand services. Reference publicationson materials understanding and appli-cation will be a central focus. Bothprint and electronic publications willbe available for browsing by attendees.Product categories include: AdvancedMaterials and Processes, (the ASMmonthly 'flagship' magazine), ASMtechnical journals, the 19-volume ASMHandbook set on metals and otherengineered materials, databooks, tech-nical books, alloy phase diagram refer-ences as well as many CD-ROM prod-ucts, to include Alloy Finder, HeatTreating Library, Binary Alloy PhaseDiagram CD, failure Analysis Library,MAPP and Rover materials propertiesdatabases, and Alloy Digest, electronicdata sheets of physical and mechanicalproperties and processing information.Show discounts of 10% will be givenon most products,(see ad in this issue)

• ASTeX/Applied Scienceand Technology, Inc. #U411

5 Cabot RoadWoburn, MA 01801Telephone: (617) 937-5131Fax: (617) 933-0750E-mail: [email protected]

ASTeX provides microwave powergenerators, high concentration ozonegenerators and systems, a range ofECR plasma sources for etching and

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1996 MRS Fall Meeting Exhibitdeposition, downstream microwaveplasma sources for ashing, etching andoxidation of thin films, and turnkeydiamond CVD systems.

Australian Scientific Instruments#U538

(A Division of ANUTECH Pty Ltd)GPOBox857Fyshwick, ACT 2609AustraliaTelephone: 61-6-2807570Fax: 61-6-2804985E-mail: [email protected]

UNI-BALL-MILLII - Based onresearch performed at the AustralianNational University, the Uni-Ball-MillII is designed to synthesize novelmaterials by mechano-chemicalprocess. Each of the mills chambershas the ability to mill up to 50 grams ofreactant with control over tempera-ture, pressure and kinetics, making it aversatile instrument.

MASIF - Surface force measurementsare now fast, versatile and easy withthe introduction of the MASIF. TheMASIF can measure forces betweenany two types of surfaces on the atom-ic scale. The MASIF features: a uniquedigital signal processing system pro-viding real-time analysis of data; win-dows software which controls theinstrument, and records and analyzesthe data; high precision displacementsensors; a solid state force sensor; anda vibration isolation system.(see ad in this issue)

Barnsteadrrhermolyne Corporation#AU

2555 Kerper Blvd.Dubuque, IA 52001Telephone: (319) 556-2241Fax:(319) 556-0695E-mail: [email protected]

Bamstead/Thermolyne Corporation isa manufacturer of laboratory, liquidhandling and water purificationequipment such as muffle and tubefurnaces, hot plates, stirrers, mixers,heating tapes, ovens, deionization, dis-tillation and reverse osmosis systems,bottle top dispensors and pipettors.

Ban Associates, Inc. #W282 Lyberty WayWestford, MA 01886Telephone: (508) 692-7513Fax: (508) 392-9394

Barr Associates designs, develops andmanufactures precision optical filters foranalytical, biomedical and other com-mercial instrumentation. All services arecustomized to match the customer'sspecific applications. Abroad spectralrange, flexibility of product design andcommunication with product designercontribute in setting us apart.

• Bede Scientific Incorporated#U434,436

14 Inverness Drive East, Suite G-104Englewood, CO 80112Telephone: (303) 790-8647Fax: (303) 790-8648E-mail: [email protected]

Bede Scientific is a world leader inmaterials characterization, establishedfor many years in High ResolutionX-ray Diffraction ana Scattering tech-niques, largely in the semiconductorindustry. Bede developed the world'sfirst quality control diffractometer,while recent advances include com-bined XRD and photoluminescencemapping and the first commercialBriflouin Spectrometer.(see ad in this issue)

Bid Service #W26640 Cookman AvenueAsbury Park, NJ 07712Telephone: (908) 775-8300Fax: (908) 774-1443E-mail: [email protected]

Bid Service sells preowned scientificequipment for semiconductorresearch, production and test. We alsooffer related equipment used for mate-rial analysis, SEM, and microscopicinspection. All equipment is fully ser-viced by our in-house technical staffand is backed by a 30-day returnpolicy. Free catalog is available uponrequest.

• Blake Industries. Inc. #U412,414660 Jerusalem RoadScotch Plains, NJ 07076Telephone: (908) 233-7240Fax:(908) 233-1354E-mail: [email protected]

Blake Industries will exhibit Blake andHuber instruments for thin film analy-sis, single crystal, Laue apparatus, anddouble crystal spectrometer for preciselattice determinations. Standard line ofX-Ray diffraction and synchrotronaccessories, including rotary table,translation stages, slits and goniometerheads will be shown.

BriskHeat Corporation #A151055 Gibbard AvenueColumbus, OH 43201Telephone: (800) 823-7784Fax: (614) 294-2672

BriskHeat Corporation manufacturesseveral flexible heating productsspecifically for the semi-conductorindustry. Products include fiberglassinsulated heating jackets, heating tapesand PLC and Digital Temperaturecontrols.

Buehler,Ltd.#U52341 Waukegan RoadLake Bluff, IL 60044Telephone: (847) 295-6500Fax: (847) 295-7929

Buehler, Ltd., Lake Bluff, IL premiersthe MICRO-PRECISE IntegratedCircuit Cross-Sectioning and ParallelLapping Kits. Designed to accompanythe ECOMET 3 Grinder/Polisher, theMICRO-PRECISE kits allow easyalignment and preparation of criticaldie structures for optical or scanningelectron microscope examination. TheISOMET1000 Precision Saw, anothernew product, features micrometer con-trolled sample positioning, touch padcontrols, sample rotation capability,and a table saw attachment for handsectioning long or irregular samples.

Burleigh Instruments, Inc. #U215Burleigh ParkFishers, NY 14453-0755Telephone: (716) 924-9355Fax:(716) 924-9072WWW: http://www.burleigh.com

Burleigh will exhibit our line ofScanning Probe Microscopes. This newgeneration of microscopes includesAFM, STM and UHV/STM. They areall extremely affordable, high perform-ance microscopes designed for routineimaging of fine surface topographywith precise 3-D quantification.Burleigh also manufactures instru-ments for submicron linear positioningand laser characterization.

Cambridge University Press #U11740 West 20th StreetNew York, NY 10011-4211Telephone: (212) 924-3900Fax: (212)691-3239

Please stop by our booth to see theseand other recent titles—Barabasi andStanley: Fractal Concepts in SurfaceGrowth; Mandel and Wolf: OpticalCoherence and Quantum Physics;Dugdale: The Electrical Properties ofDisordered Metals; and Tsvelik:Quantum Field Theory in CondensedMatter Physics.

• Cameca Instruments, Inc. #W37204 Spring Hill RoadTrumbull, CT 06611Telephone: (203) 459-0623Fax: (203) 261-5506E-mail: camecafloSaol.com

CAMECA has recently added the TAP,Tomographic Atom Probe, for 3Dimaging and analysis of nanostruc-tures, to our well established productline consisting of Magnetic SectorSIMS: IMS 6f, IMS 1270, NanoSims 50;Time-of-Flight SIMS: TOF SIMS IV;and our newest model EPMA: SX100.All instruments represent the highestlevel of performance, quality andcomputer integration for the seriousmaterials researcher and productionsupport analyst.

CERAC, Inc. #U526P.O. Box 1178Milwaukee, WI53201-1178Telephone: (414) 289-9800Fax: (414) 289-9805E-mail: marketingSCerac.com

CERAC manufactures advanced spe-cialty inorganics and thin film materi-als for high-tech research and industri-al applications. Powders, targets andevaporation materials can be made tospecification in quantities rangingfrom R&D to final production require-ments. Extensive in-house technicalexpertise facilitates scale-up whilemaintaining initial product integrity.

Ceramaseal#U217P.O. Box 260US Route 20New Lebanon, NY 12125Telephone: (518) 794-7800Fax: (518) 794-8080WWW: httpV/www.Ceramaseal.com

Ceramaseal offers a full range of stan-dard ultra-high vacuum feedthroughs,connectors, thermocouples, cables,viewports and related hardware. Newproducts include Crystal QuartzViewports pressure rated to 500 psiand high temperature micro "D seriesconnectors 9 pin through 50 pin.

CHA Industries #U2234201 Business Center DriveFremont, CA 94538-6357Telephone: (510) 683-8554Fax: (510) 683-3848

CFiA Industries is VerticallyIntegrated, with over 50 years of expe-rience as a manufacturer and OEMsupplier of standard and custom HighVacuum Systems. Manufacturers ofSemiconductor, XTAL, LEDS, Optics,Automotive, and Aerospace devicesuse various versions of CHA'sSputtering, Evaporation, and IonBeam Systems. CHA manufacturesRoll Coaters, Box Coaters, clean-roomcompatible R&D, and Production sys-tems (and components) for Medium-and High-Vacuum applications.

Chapman & Hall #U122Suite 750,400 Market StreetPhiladelphia, PA 19106Telephone: (215) 574-2335Fax:(215)574-2292E-mail: MarkeSphl.cursci.com

Published by Chapman and Hall, theJournal of Materials Science isarguably the most important primaryjournal in its field. Incorporating some66 issues-including specialist publica-tions dealing with materials in medi-cine and electronics-JMS offers auniquely comprehensive informationservice. The journal is also availablevia the Internet.

• Commonwealth ScientificCorporation #U409

500 Pendleton StreetAlexandria, VA 22314Telephone: (703) 548-0800Fax:(703)548-7405E-mail: [email protected]

Commonwealth Scientific Corporation(CSC) is the leader in ion beam tech-nology, manufacturing a complete lineof products for dry etching and thinfilm deposition processes. CSC will bedisplaying their complete line of ionsources including a mil range ofKaufman-type and gridless ionsources. New products include theFiltered Carbon Cathodic Arc Source.

• Cree Research, Inc. #W322810 Meridian Parkway, Suite 176Durham, NC 27713Telephone: (919) 361-5709Fax:(919)361-4630E-mail: [email protected]

Cree manufactures 4H-SiC and 6H-SiCsubstrates and epitaxy, semi-insulating4H-SiC substrates, high intensity blueLEDs and SiC UV photodiodes. SiC isan exceptional material for nitridedeposition and the fabrication of semi-conductor devices for high tempera-ture, high power, high frequencypower and optoelectronic applications.Custom device/design services available.

Cryomech, Inc. #U307113 Falso DriveSyracuse, NY 13211Telephone: (315) 455-2555Fax: (315) 455-2544

Cryomech manufactures the largestvariety of Gifford-McMahon cryore-frigerators and cryostats to suit theneeds of the research community.From application assistance for theunique experiment to the standardlaboratory cryostat, Cryomech has theequipment and experience to meetyour requirements in all capacity/temperature ranges.

CVD Products, Inc. #A164 Park AvenueHudson, NH 03051Telephone: (603) 598-9122Fax: (603) 598-9126

CVD Products is a manufacturer ofcustom and OEM Pyrolytic BoronNitride (PBN) MBE effusion cellcrucibles, LEC and VGF crucibles.

• DCA Instruments, Inc. #U430400 West Cummings Park, Suite 3900Woburn, MA 01801Telephone: (617) 937-6550Fax:(617) 935-2405E-mail: rebeccaSdca.fi

DCA Instruments specializes in thedesign and manufacture of high-quali-ty UHV deposition systems, offeringstandard systems for the followingdeposition techniques: III-V, II-VI,

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1996 MRS Fall Meeting ExhibitCMT-MBE, metal MBE, UHV sputter-ing, UHV laser ablation, and UHVCVD. DCA Instruments also offers awide range of MBE components whichare retrofittable to the majority of exist-ing systems. Components include effu-sion cells, soft-action magneticallydriven linear shutters, a zero-wobble'substrate manipulator and a self-regulating Mercury source.

• Denton Vacuum. Inc. #U2111259 North Church StreetMoorestown, NJ 08057Telephone: (609) 439-9100Fax: (609) 439-9111

Denton Vacuum is a premier manufac-turer of High Vacuum Thin FilmDeposition Systems. For applicationsranging from the preparation of sam-ples for electron microscopy, semicon-ductor failure analysis and qualitycontrol, thin film research, and pro-duction-size optical coating systems;Denton Vacuum offers an appropriatesystem to meet a wide range of techni-cal requirements. In addition to its sys-tem offerings, DVI also has a widevariety of accessory equipment such asElectron Beam Evaporation Guns andPower Supplies, Ion Sources, OpticalMonitors, Sputter Cathodes, Feed-throughs, and Thermal EvaporationSupplies.(see ad in this issue)

• Digital Instruments, Inc. #U433,435520 E. Montecito StreetSanta Barbara, CA 93103Telephone: (805) 899-3380Fax: (805) 899-3392E-mail: [email protected]

Digital Instruments, the world leaderin Scanning Probe Microscopy (SPM),will be exhibiting its NanoScope®SPMS including the MultiMode™Atomic Force Microscope (AFM), theworld's best selling and highest reso-lution SPM. Featured this year is theDimension™ 3000 SPM/AFM offeringthe complete range of SPM techniquesfor small or large samples includingtopography, magnetic force, lateralforce, electrochemistry, Tapping-Mode™, force modulation and others.We'll also be demonstrating our newPhase Imaging Technique, a fast andeasy method of differentiating regionsof differing composition, friction,adhesion, viscoelasticity, etc. onsample surfaces.(see ad in this issue)

Duniway Stockroom #U1081305 Space Park WayMountain View, CA 94043Telephone: (415) 969-8811Fax: (415) 965-0764

NEW REPLACEMENT PARTS for ionpumps, leak detectors, and vacuumsystems; including 12 point bolts, cop-per gaskets, TC gauges, ion gauges, oilfor diffusion pumps, etc. SURPLUSVACUUM EQUIPMENT for sale,rebuilt to original performance. Free44-page catalog includes prices, newand surplus equipment.

Eagle-Picher Industries, Inc. #U517Electro-Optic Materials

(EOM) Department737 Highway 69AQuapaw, OK 74363Telephone: (918) 673-1650Fax:(918) 673-2121

The "EOM" Department of Eagle-Picher Industries, Inc. is a manufactur-er of Ultra High Purity Gallium Metal,Gallium Trichloride, Gallium

Sesquioxide, GermaniumTetrachloride, Germanium Dioxide,Intrinsic Germanium Metal,Germanium Substrates, Germanium,and Silicon Infrared Optical Materials.Eagle-Picher also purchases scrapGallium and Germanium, in manyforms, for RECYCLING.

• ED AX International #U10091 McKee DriveMahwah, NJ 07430Telephone: (201) 529-4880Fax:(201)529-3156

EDAXINTERNATIONAL-A leadinginnovator in the design and manufac-ture of Energy Dispersive X-RayMicroanalysis Systems and X-RayFluorescence products. On an interna-tional basis, this ISO 9001 Certifiedcompany supplies PC and MAC-basedelemental analysis systems, analysissoftware, digital imaging, non-destruc-tive XRFproducts and a complete lineof Be, UTW and SUTW detectors;including cryo-x and R-TEM, theretractable TEM detector.

Edwards High Vacuum International#U315

301 Ballardvale StreetWilmington, MA 01887Telephone: (800) 848-9800Fax: (508) 658-7967

Edwards High Vacuum International,a division ofThe BOC Group, is aworld leading manufacturer of vacu-um components and systems. Some ofEdwards' products include the RVrange of rotary vacuum pumps, EXPpumping units including turbo pump,controller and backing pump, activevacuum gauges, valve and couplingcomponents, and Barocel® Capaci-tance Manometers. These productswill be on display at the 1996 MRSShow.

• Elsevier Science #U218-224655 6th AvenueNew York, NY 10010Telephone: (212) 633-3766Fax: (212) 633-3764E-mail: [email protected]

Stop by the Elsevier booth for ademonstration of Solid StateCommunications Online, the new elec-tronic journal. Also on display will bea wide range of books and journals inthe field of Materials Science rangingfrom fundamental solid state physicsto materials processing. Renownedjournal titles include Acta Materialia,Solid State Communications, Polymer,Materials Research Bulletin, andProgress in Surface Science. ElsevierAdvanced Technology will be pleasedto supply sample copies of the leadingmagazine dedicated to the CompoundSemiconductor community. Each issueof III-Vs Review covers the latestresearch from around the world-mate-rials, processing, devices, productiontechniques-plus new product launch-es and industry news. Free samplecopies of all Elsevier journals andmagazines are available at the booth.In addition, a 20% discount is availableon all books on display includingEncyclopedia of Advanced Materialsand Handbook of Crystal Growth.Don't forget to sign up at the booth forour FREE information services includ-ing Contents Direct and ContentsAlert.

• EMCORE Corporation #U527394 Elizabeth AvenueSomerset, NJ 08873Telephone: (908) 271-9090Fax:(908)271-8022E-mail: [email protected]

EMCORE Corporation manufacturesTurbodisc Deposition systems for theMOCVD of semiconductor, advancedoxide and other electronic materialthin films. TurboDisc technology pro-duces films with the interface abrupt-ness and uniformity of thickness, com-position, and doping required by themost advanced devices. EMCORE sys-tems are further distinguished by lowcost of ownership, high throughput,excellent reproducibility, low mainte-nance needs, and high reliability.

EPI/MBE Products Group #W391290 Hammond RoadSt. Paul, MN 55110Telephone: (612) 653-0488Fax:(612)653-0725E-mail: [email protected]

EPI is the largest MBE equipmentmanufacturer in North America andhas been the international leader inquality and innovation in the MBEfield since 1986. Over 2,500 EPIEffusion Cells are currently in use inover 250 facilities worldwide. OurMBE systems are available for usewith CaAs/AlGaAs, Antimonides,Phosphides, Silicon, and II-VImaterials.

Epion Corporation #U5364R Alfred CircleBedford, MA 01730Telephone: (617) 275-3703Fax:(617)275-3709E-mail: [email protected]

Epion Corporation is a supplier of ionand laser beam processing equipmentand related services. Products includegas cluster ion beam systems, fullerenesublimators, diamondlike coatingequipment, coatings and ion implanta-tion services. Epion's PVD ProductsDivision offers large area PLD sys-tems, intelligent laser windows, targetmanipulators, and substrate heaters.

• ESM Software #U1042234 Wade CourtHamilton, OH 45013Telephone: (513) 738-4773Fax: (513) 738-4407E-mail: [email protected]: http://www.esm-software.com

ESM Software develops and distrib-utes materials science software includ-ing TAPP-a database ofproperties ofpure compounds; MAPP-a databaseof engineering alloys and polymers;ChemSage-for calculation of complexthermochemical equilibria; phase dia-gram CD-ROMs; software for predic-tion of glass and polymer properties;and software for rendering of crystalstructures.(see ad in this issue)

• Evans East #U432666 Plainsboro Road, Suite 1236Plainsboro, NJ 08536Telephone: (609) 799-1904Fax: (609) 799-8691

Analytical services performed usingSIMS, XPS (ESCA), TOF-SIMS, AES;and SEM with additional access to thenetwork of services through CharlesEvans & Associates. Protocols include:bulk analysis, surface analysis, anddepth profiling. Typical materials foranalysis are semiconductors, metals,

insulating films, ceramics, glasses,catalysts, Diomaterials,ancTpolymersurfaces.

• FEI Company #U4057451NE Evergreen ParkwayHillsboro, OR 97124Telephone: (503) 640-7500Fax:(503)640-7509E-mail: [email protected]

FEI presents their two-lens Ga liquidmetal ion focusing column, availablewith software for digital control of pat-tern generation and ion milling. Also,compact one- and two-lens Schottkyfiela emission electron beam focusingcolumns for superior imaging andanalytical performance, built with reli-able UHV construction. Other prod-ucts include LaB6 and CeB6 electronsources, and Focused Ion Beam (FIB)workstations.

First Ten Angstroms #W33465 Dinwiddie StreetPortsmouth, VA 23704Telephone: (757) 393-1584Fax:(757)393-3708E-mail: [email protected]

Demonstrating the FTA200 DynamicContact Angle Analyzer which usesdrop shape analysis to measure con-tact angle, surface tension, and com-pute surface energy. Its software andflexibility are unsurpassed. FTA offersother models for dilution sequencesurface tension measurements, and forcontact angle measurements over a2-D surface. Bring your samples!

• E.A. Fischione Instruments. Inc.#U428

9003 Corporate CircleExport, PA 15632Telephone: (412) 325-5444Fax: (412) 325-5443E-mail: [email protected]

E.A. Fischione Instruments, Inc. fea-tures a complete line of TEM SpecimenPreparation devices including theModel 3000 Ion Mill, the Model 330Ultrasonic Disk Cutter, the Model 2000Specimen Prep System (dimplegrinder), and the Automatic Twin-JetElectropolisher. New product intro-ductions include the Model 1400Plasma Cleaner for the elimination ofcontamination from both TEM speci-mens and TEM Specimen Holders.Also displayed are SEM and TEMSpecimen Holders including theCryo-Prep Station/TEM Holder.

• Gatan. Inc. #U5116678 Owens DrivePleasanton, CA 94588Telephone: (412) 776-3360Fax: (412) 776-5260E-mail: [email protected]

Gatan, Inc. is the world's leading man-ufacturer of instrumentation and soft-ware used to enhance and extend theoperation and performance of electronmicroscopes. Gatan's products, whichare fully compatible with all brandselectron microscopes, cover the entirerange of the analytical process fromspecimen preparation and manipula-tion to imaging and analysis. Our cus-tomer base spans the complete spec-trum of end-users of analytical instru-mentation typically found in industri-al, governmental, and academic labo-ratories. The applications addressedby these scientists and researchersinclude metallurgy, semiconductors,electronics, biological science, newmaterials research and biotechnology.The Gatan brand name is very recog-



https://doi.org/10.1557/S0883769400031663


1996 MRS Fall Meeting Exhibitnized and respected throughout theworldwide scientific community andhas been synonymous with high quali-ty products and the industry's leadingtechnology.

• Gordon and Breach/HarwoodAcademic #U120

c/o P.O. Box 200029Riverfront Plaza StationNewark, NJ 07102-0301Telephone: (215) 750-2642Fax: (215) 750-6343E-mail: [email protected]

Gordon and Breach/HarwoodAcademic publishes books and jour-nals of interest to scientists and engi-neers in condensed matter physics andmaterials science, including nanotech-nology, optics and lasers, surfacephysics, nonlinear dynamics, andsuperconductivity.

• High Voltage Engineering #W23P.O. Box 993800ABAmersfoortThe NetherlandsTelephone: (31) 33 4619741Fax:(31)33 4615291

Particle accelerators for scientific,educational and industrial researchcommunities.(see ad in this issue)

• Hitachi Scientific InstrumentsMJlOl-105

755 Ravendale DriveMountain View, CA 94043Telephone: (415) 969-1100Fax:(415)961-0368WWW: http://www.nissei.com

Hitachi, a world leader in electronmicroscope advancements and proventechnologies, represents our full line qfexceptional scanning, transmissionand field emission electron micro-scopes. Visit our booth for demonstra-tions and information.

• Huntington MechanicalLaboratories. Inc. #A18

1040 L'Avenida StreetMountain View, CA 94043-1422Telephone: (415) 964-6153Fax:(415)964-6153E-mail: jcrummeyShuntvac.comm

The industry's largest selection of vac-uum valves, flanges, fittings andfeedthroughs is available when youneed it at Huntington. Also availableare a wide assortment of roughingcomponents including flexible hoses,traps, thermocouple and ionizationgauge tubes, absorption and jet rough-ing pumps. Standards, custom ormodified UHV positioning andmotion devices can be provided tomeet your special needs. Stainless steelcustom chambers, tees and crosses aresupported by a quarter of a century ofexperience in vacuum chamber designand fabrication at Huntington.(see ad in this issue)

• Hysitron. Inc. #U3222010 E. Hennepin AvenueMinneapolis, MN 55413Telephone: (612) 379-4179Fax: (612) 379-0678E-mail: [email protected]

Hysitron, Inc. is an engineering firmspecializing in the design and manu-facture of force and displacementtransducers. Patents are pending on itstransducer technology and several cre-ative applications. The current success-ful commercialization is for the nano-mechanical community with aNano/Pico-Indenter that stands alone

or retrofits to atomic force micro-scopes. Features include in-situ imag-ing of ultrashallow nano-indentationand nano-scratch.

• IBM Analytical and Test Services#A8

IBM Corp., M/S E40Hopewell Junction, NY 12533-6531Telephone: (914) 892-2450Fax: (914) 892-2003E-mail: [email protected]

Offers a broad range of capabilitiesfrom failure analysis to chemical andelectrical characterization, all per-formed by a highly experienced staffof experts in their specific fields. Weoffer high-quality work performed onstate-of-the-art equipment in a timelyand cost-competitive environment.

Implant Sciences Corporation #U522107 Audubon Road, #5 Corporate PlaceWakefield, MA 01880Telephone: (617) 246-0700Fax: (617) 246-1167

Implant Sciences offers ion implanta-tion services with over 60 speciesavailable, including noble metals andrare earths. Heated implants andcryogenic implants done in researchapplications. Profile Code™ Softwarewill be on display for accurate simula-tion of ion implantation. Pin-on diskfriction and wear testing equipmentalso are available.

Inel, Inc. #U518P.O. Box 147Stratham,NH 03885Telephone: (603) 778-9161Fax: (603) 778-9171

Manufacturers of diffractometer sys-tems incorporating curved or linearposition sensitive detectors.Applications include texture analysis,powders, thin films, reflectometry,polymers, in-situ, on-line, and dynam-ic studies. Representing Cilas neutronguides and diffractometers and GMIbeam line instrumentation such asrotary tables. Representing DiacellProducts high pressure diamond cells.

Initiative Scientific Products Pry Ltd.#W22

P.O. Box 2228Sacramento, CA 95812-2228Telephone: (916) 642-9193Fax: (916) 642-9193E-mail: [email protected]

Initiative Scientific Products is the onlymanufacturer of top loading, agitatingmuffle furnaces that save time inceramic/glass research, near net shapecasting, and XRF/ICP sample prepara-tion. We also manufacture and distrib-ute ergonomic Ti tongs, SietronicsXRD software and quality Pt /Au/Phcrucibles from the Australian GoldRefineries.

Innovative Technology, Inc. #U5212 New Pasture RoadNewburyport, MA 01950Telephone: (508) 462-4415Fax:(508)462-3338E-mail: [email protected]

Innovative Technology is a manufac-turer of Glove Boxes and GasPurification Systems. We will exhibitthe System One Glove Box and GasPurification package. Some applica-tions include: solid state chemistry,inorganic chemistry, synthesis, crystalmounting for x-ray diffraction. We alsospecialize in mini and micro environ-ments, isolation technology and oxy-gen barriers for pharmaceutical appli-

cations. Custom configurations avail-able upon request. We will also exhibitthe System 20/20 position sensitivedetector system.

• Institute for Scientific Information#U212

3501 Market StreetPhiladelphia, PA 19104Telephone: (215) 386-0100Fax: (215) 386-6362E-mail: [email protected]

The Institute for ScientificInformation® is one of the world'slargest commercial providers of infor-mation for researchers. Best known forthe Science Citation Index® andCurrent Contents®, ISI has created acomprehensive CD-ROM databasewhich provides cited reference search-ing for materials science literature, TheMaterials Science Citation Index®. TheMaterials Science Citation Index® pro-vides instant electronic access to bibli-ographic data, full length authorabstracts, and cited references drawnfrom over 1,700 international publica-tions. Over 115,000 source items peryear are covered in key areas such as:biomaterials, metals and metallurgy,minerals, processing and manufactur-ing and many more. The MaterialsScience Citation Index is available onCompact Disc and updated bimonthly.No other database can keep you asup-to-date on current Material ScienceResearch.

Insulator Seal Incorporated #U4026460 Parkland DriveSarasota, FL 34243Telephone: 800-548-9509Fax: (941) 751-3841E-mail: [email protected]: http://www.isi-seal.com

Manufacturer of hermetic electricalfeedthroughs and optical viewportsutilizing high-purity ceramic, sapphireand quartz. These ceramic-to-metalseals are suitable for high- and ultra-high vacuum applications. Our New230-page Catalog displays a full rangeof products including Multi-Pin,Coaxial, Thermocouple, Power, RFPower Feedthroughs, and our patentedVacOptix Viewports.

• Ion Tech, Inc. #U3022330 East ProspectFort Collins, CO 80525Telephone: (970) 221-1807Fax: (970) 493-1439E-mail: [email protected]

Ion Tech, Inc. is the industry leader forproviding superior ion beam equip-ment. The product line ranges fromlinear and round DC sources to fila-mentless RF sources, power supplies,and complete systems. This equipmentcan be used for etching, precleaning,and the production of sophisticatedthin films such as diamondlike carbon(DLC), complex alloys, and high-precision optical films.

• IOF Publishing Inc. #U113The Public Ledger Building, Suite 1035150 S. Independence Mall WestPhiladelphia, PA 19106Telephone: (215) 627-0880Fax: (215) 627-0879E-mail: [email protected]

From its origin in learned publishing,Institute of Physics Publishing hasgradually expanded its range of mediato include books, magazines andnewsletters, and now major referenceworks and electronic products. On dis-play will be a wide selection of rele-

vant journals, magazines, and books,and we will be demonstrating CoDASVersion 2.0, our condensed matterscience alerting service. Come along toour stand to claim your 20% discounton book orders.

Janis Research Company, Inc. #U4072 Jewel DriveWilmington, MA 01887-0696Telephone: (508) 657-8750Fax:(508)658-0349E-mail: [email protected]

Janis combines over 30 years of experi-ence with extensive engineering capa-bilities to provide cryogenic systemsfor all research applications. Janisoffers closed cycle refrigerators, con-tinuous flow and variable temperaturecryostats, superconducting magnetsystems, detector cooling dewars, dilu-tion refrigerators, Helium-3 cryostatsincluding top loading, and customdesigns to meet any specific requirement.

• TCPDS-ICDD#A1712 Campus Blvd.Newtown Square, PA 19073-3273Telephone: (610) 325-9810Fax: (610) 325-9823

The JCPDS-International Centre forDiffraction Data (ICDD) maintains anddistributes the Powder Diffraction Filedatabase for use in materials character-ization through X-ray analysis. Thedatabase contains approximately59,800 numeric diffraction patterns ofcrystalline phases. Specialized prod-ucts include Forensics, Minerals, andMetals & Alloys subfiles as well asvarious educational publications.

• lEOLUSA, Inc. #A711 Dearborn RoadPeabody, MA 01960Telephone: (508) 535-5900Fax:(508)536-2205E-mail: [email protected]

New resolution enhancing instru-ments from JEOL include the 6320FSEM, a high resolution in the lensSEM, the JEM-2010F, with 2A STEMresolution, atomic level Z contrastusing HADF STEM and excellent ana-lytical spatial resolution, and theJSTM-4500XT, a UHV high resolutionNon Contact AFM capable of atomicresolution at hot and cold temperatures.

• k-Space Associates. Inc. #1)520555 South Forest, Suite 4BAnn Arbor, MI 48104Telephone: (313) 668-4644Fax:(313)668-4663E-mail: [email protected]

k-Space manufactures the KSA 300family of turn-key RHEED and LEEDimaging systems. A peltier-cooled inte-gration selectable CCD imager, real-time acquisition, and 32-bit NT/'95software for point and click analysis ofstrain, FWHM, and FFT/growth rateare just a few of the reasons we put thepower of RHEED and LEED at yourfingertips.

• Keithley Instruments. Inc. #U41928775 Aurora RoadSolon, OH 44139Telephone: (216) 248-0400Fax: (216) 248-6168

Keithley will display its line of sensi-tive test instrumentation designed formaterials research applications.Included will be the Model 6517 highresistance measurement system withoutstanding high resistance measure-ment capability (lOOmQ) and superiorlow current measurements (lOOaA to



https://doi.org/10.1557/S0883769400031663


1996 MRS Fall Meeting Exhibit20mA). Also on display will be theModel 248 5kV low noise powersupply and the Model 2400 DigitalSourceMeter™.

Kevex#U22124911 Avenue StanfordValencia, CA 91355Telephone: (805) 295-5282Fax:(805)295-8714

Kevex manufactures X-Ray Analyzers,capable of analyzing sample sizesranging from microns to millimeters,thickness from angstroms to microns,and elemental concentrations fromPPM to weight percents. The KevexSIGMA provides a Microanalyzercapable of spectral and image quantifi-cation, elemental mapping, featureanalysis, EM column and stageautomation. The Kevex SUPERDRYNo-LN detector is available for boththe Sigma and 771 products.

• Kimball Physics. Inc. #U308311 Kimball Hill RoadWilton, NH 03086Telephone: (603) 878-1616Fax: (603) 878-3700E-mail: [email protected]

UHV Electron and IonSources/Systems: Beam energies 5 eVto 100 KeV, energy sweeping, fastpulsing, deflection systems. Applica-tions: surface physics, RHEED, ESD,vacuum physics, space physics, semi-conductor processing. UHV Compo-nents: Multi-CF™ Fittings, miniaturevacuum systems, eV Parts®, highbrightness sources, cathodes, cathodecartridges, Faraday cups, phosphorscreens.

Kluwer Academic Publishers #U119101 Philip DriveNorwell, MA 02061Telephone: (617) 871-6311Customer Service: (617) 871-6600Fax:(617)871-6528E-mail: [email protected]: http://www.wkap.com or

http://www.wkap.nlKluwer Academic Publishers is a lead-ing research publisher of books andjournals in materials sciences. Newbooks are on display, along with suchjournals as Applied Composite Materials;Advanced Performance Materials; thejournal of Porous Materials; InterfaceScience; Adsorption and the journal ofSol-Gel Technology.

• Lake Shore Cryotronics. Inc.#U418.420

64 East Walnut StreetWesterville, OH 43081Telephone: (614) 891-2243Fax:(614)891-1392E-mail: [email protected]

Integrated Hall effect and magnetore-sistance semiconductor material char-acterization systems with Van derPauw resistivity measurements; fea-tures QMSA, which identifies thenumber and types of carriers, and cor-responding mobility and carrier con-centrations; also platforms for cryo-genic and room temperature magne-tometers; high-level, Windows-basedinstrument management software;new Model 340 TemperatureController with multiple sensor inputs,cryogenic temperature sensors; gauss-meters, Hall generators, electromag-nets, four-quadrant power supplies.

• Lambda Physik. Inc. #U5093201 West Commercial Blvd., Suite 100Fort Lauderdale, FL 33309Telephone: (954) 486-1500Fax:(954)486-1501E-mail: [email protected]

Lambda Physik, the world's leader inexcimer and pulsed dye laser technol-ogy, has recently introduced the StarLine, a diode-pumped 1 KHz solidstate laser with highest conversionefficiencies into the UV. LambdaPhysik offers a complete range of UVlaser products and processing systemsfor industrial, scientific and medicalapplications.

• Lambda Technologies #U200.2028900 Jersey Court, Suite CRaleigh, NC 27613Telephone: (919) 420-0275Fax: (919) 420-0095E-mail: [email protected]

Lambda Technologies employs vari-able frequency microwave concepts toprovide uniform and controlled heat-ing over large volumes with efficientand selective energy coupling.Lambda's proprietary technology hasbeen applied in areas of polymer andcomposite processing, bonding of dis-similar materials, encapsulant andepoxy curing, ceramic sintering, sur-face treatments, biomedical uses andchemical reaction enhancement.(see ad in this issue)

• Kurt I. Lesker Company #U5011515 Worthington AvenueClairton, PA 15025-2700Telephone: (412) 233-4200Fax:(412)233-4275E-mail: [email protected]

We are exclusive North Americanagents for Vacuum Generators, dis-playing their economical high preci-sion XYZ manipulators, unique UHVsample distribution center for theirsurface science components for XPS,AES, UPS, LEED, RHEED. We willshow our manufacturing capability forhigh vacuum and UHV custom cham-bers together with flanges, hardware,electrical and rotary feedthroughs.

Leybold Inficon Inc. #U502Two Technology PlaceEast Syracuse, NY 13057Telephone: (315) 434-1100Fax: (315) 437-3803

Leybold Inficon combines specializedelectronics and sensor technologies foranalysis and advanced process moni-toring and control. The company'sexpertise includes quadrupole massspectrometers (RGAs), thin film depo-sition controllers and monitors, highsensitivity helium leak detectors andvacuum gauge controllers.

LUXTRON Corporation #U5052775 Northwestern ParkwaySanta Clara, CA 95051-0941Telephone: (408) 727-1600Fax: (408) 727-1677

Optical fiber temperature measure-ment and control instrumentation.Offers non-contact and contact tem-perature measurement from -200°C to4000°C with resolution to 0.01°C.

Magnet Sales & Manufacturing #U20711248 Playa CourtCulver City, CA 90230Telephone: (310) 391-7213Fax: (310) 3904357

Design and manufacture of high-gradepermanent magnets and assemblies.We offer magnetic finite element

design assistance, a large inventory ofpermanent magnet materials and acomplete in-house magnet and metalworking machine shop. We specializein small quantities and short leadtimes as well as complex and develop-mental designs.

MARCH Instruments, Inc. #U5294057 Port Chicago HighwayConcord, CA 94520Telephone: (510) 827-1240Fax:(510)827-1189

Featuring a new in-line plasma clean-ing system enabling interfacing withany conveyor process: boards, panels,boats, or cassettes. A small section of astandard conveyor allows the productto move from the previous station intothe MARCH plasma systems and intothe next station. This system is micro-processor and/or PC controlled.

M.Braun,Inc.#W352 Centennial Drive, Unit 4FPeabody, MA 01960Telephone: (508) 531-6217Fax:(508)531-7245

M. Braun, Inc. will exhibit a display ofits PLC-controlled Inert AtmosphereGlove Box Systems and Attachmentsand its PC-based Position SensitiveDetector with Platinum wire propor-tional counter. Applications includecrystallography, lnorganic/organo-metalHc chemistry, semiconductor/thin film processing, lithium battery/electrolyte production, Sodium/Xenonbulb production, etc.

• MPC Vacuum Products Corporation#U404

23842 Cabot Blvd.Hayward,CA 94545Telephone: (510) 265-3500Fax:(510)887-0626

Complete line of UHV componentsincluding: Flanges and fittings, valves,roughing components, instrumenta-tion, electrical feedthroughs, XYZmanipulators, rotary and linearfeedthroughs, fast-entry load-lock sys-tems, all-metal sealed right anglevalves and M.E.S.A. compatible rec-tangular gate valves. A complete lineof electron beam evaporation sourcesin single pocket and multi-pocket con-figuration with matching 6KW, lOKW,and 15KW solid state switching powersupplies.(see ad in this issue)

Microcal Software, Inc. #U219One Roundhouse PlazaNorthampton, MA 01060Telephone: (413) 586-2013Fax: (413) 585-0126E-mail: [email protected]

Microcal Software, Inc. offers Origin,a technical graphics and data analysissoftware in Windows. Origin provideseasy-to-use tools to create a wide vari-ety of custom 2D, 3D, and contourgraphs. Origin's analytical featuresinclude regression, smoothing, peakanalysis, FFT, statistics and nonlinearcurve fitting. Origin is the fastestsoftware in its class.

• Micro Photonics. Inc. #U324Surface Test DivisionP.O. Box 3129Allentown, PA 18106Telephone: (610) 366-7103Fax: (610) 366-7105E-mail: [email protected]

Surface Test, a division of MicroPhotonics, offers instrumentation formeasuring mechanical properties of

thin films and bulk materials includ-ing hardness, friction, adhesion,scratch resistance, wear resistance andsurface roughness. Also offered areellipsometers, laser interferometersand optical emission spectrometers forin-situ monitoring and process control.

• MKS Instruments. Inc. #U424.426Six Shattuck RoadAndover, MA 01810Telephone: (508) 975-2350Fax:(508)975-0093E-mail: [email protected]: http://www.mksinst.com

MKS Instruments, Inc. will feature sev-eral new products across its entireproduct line oriented towardadvanced materials research such asDRAM, SRAM, LOGIC manufacturingprocesses. These products representthe latest in measurement and controltechnology as well as in-situ processdiagnostics.

• MMR Technologies. Inc. #U3211400 N. Shoreline Blvd., Suite A-5Mountain View, CA 94043-1346Telephone: (415) 962-9620Fax: (415) 962-9647E-mail: [email protected]: http://www.mmr.com

MMR Technologies manufacturesTemperature Controlled Systems-Cryogenic Cooling Systems andWide Temperature Range ThermalStages-which find application inMaterials Research in ElectricalEngineering, Physics, Biology andChemistry Applications over the tem-perature range of lOK to 730K. Theyare also used in the Cooling ofComputer Chips, Electronic Devices,Laser Diodes, and Thermal ImagingDevices, and in the Characterizationof the performance and properties ofsuch Devices as a function ofTemperature.

• Molecular Simulations, Inc.#U406.408

9685 Scranton RoadSan Diego, CA 92121-3752Telephone: (619) 458-9990Fax:(619)458-0136E-mail: [email protected]: http://www.biosym.com or

http://www.msi.comLearn how to apply molecular simula-tion to practical industry applicationsin Life Sciences and Materials. Discussyour research problems with ourexperts in Combinational Chemistry,Rational Drug Design, ProteinEngineering, Structure Generation andDetermination, Polymers, Catalysis,Crystallization, and AdvancedMaterials development. See how toreduce your research time and costs byusing a broad range of software solu-tions for predicting molecular struc-tures and properties. Ask about ourSoftware Developer's Kit for integrat-ing your own scientific codes withcommercial quality modeling tools.

• Morton Intemational-Metalorganics#W30

148 Andover StreetDanvers, MA 01923Telephone: (508) 750-9276Fax: (508) 750-4298

Morton Metalorganics is the leadingmanufacturer ofhigh purity metalor-ganic sources for MOCVD epitaxy andother thin film applications. We offerover 80 sources and have the widestproduct line available anywhere. Inaddition to the U.S. production, R & D



https://doi.org/10.1557/S0883769400031663


1996 MRS Fall Meeting Exhibitand sales facility, we maintain ware-house facilities and sales staff inEurope as well as in the Japan/Pacific

• MR Semicon Inc. #A96200 Eubank Blvd. N.E., #415Albuquerque, NM 87111-7313Telephone: (505) 294-5761 or

(800) 832-1518Fax:(505)294-5772E-mail: [email protected]

MR Semicon Inc. will be showing afull range of bench-top sample prepa-ration equipment, featuring the NEWLabOne chemically resistant polishingsystem, and LabTrim, the inexpensivecutoff saw. Also manufactures, mar-kets and refurbishes a complete rangeof crystal manufacturing equipmentfor production, research and proof ofconcept. Czochralski, top seeded flux,Bridgman & float zone.

• n&k Technology. Inc. #U3193150 De La Cruz Blvd., Suite 105Santa Clara, CA 95054Telephone: (408) 982-0840Fax:(408)982-0252E-mail: [email protected]

n&k Technology makes thin film char-acterization products that simultane-ously and unambiguously determine:

• Refractive Index, n(X) and ExtinctionCoefficient, k(X) from 190 nm<X<900nm

• Bandgap Energy £„• Roughness - Surface and Interface• Composition - % H in a-C:H, % N in

CNj,Si/N ration in SiNj• Microstructure - Degree of

crystallinity in Poly-Si and ITO• Resistivity

• National Electrostatics Corporation#U416

7540 Graber RoadP.O. Box 620310Middleton, WI53562-0310Telephone: (608) 831-7600Fax: (608) 256-4103E-mail: [email protected]

National Electrostatics Corporationmanufactures ion beam systems withenergies from below 100 keV to thelOO's of MeV region for a wide varietyof applications including materialsanalysis and modification. These sys-tems include dedicated RBS, ERD,NRA and PIXE systems. NEC also hasavailable a wide variety of beam han-dling and vacuum components.(see ad in this issue)

• Neocera.Inc.#U50710000 Virginia Manor Road, Suite 300Beltsville,MD 20705-4215Telephone: (301) 210-1010Fax:(301)210-1042

Specialists in pulsed laser deposition(PLD) and advanced thin film tech-nologies, Neocera will be exhibitingand demonstrating a fully operationalPLD laboratory. Also displayed will bedifferent PLD accessories and custommetal oxide films deposited on a vari-ety of substrates. Literature regardingour R&D efforts, products, andservices will be available.

Nicolet Instrument Corporation #A195225 Verona RoadMadison, WI 53711Telephone: (608) 276-6345Fax:(608)273-5046E-mail: [email protected]

Nicolet will exhibit the new Magna-IR860 FT-IR spectrometer with powerfulaccessories including FT-Raman, Fiber

Optics and new Tabletop Optics foradvanced research applications. TheMagna-IR 860 offers DSP-driven elec-tronics and firmware for a variety ofdual channel experiments and a spec-tral range from 25,000 - 50cm'1.

Noran Instruments, Inc. #115032551 West Beltline HighwayMiddleton, WI 53562Telephone: (608) 831-5125Fax: (608) 831-4461E-mail: [email protected]

NORAN Instruments offers VOY-AGER x-ray microanalysis systemsrunning UNIX-based SEM, TEM, andWDS applications; x-ray detectors,including LN2 or CYRO cooled Si (Li)with 129 eV resolution, and FREE-DOM electrically cooled detector; andPULSTAR digital pulse processor.NORAN also offers OrientationImaging Microscopy (OIM™) fromTSL, the world's most advanced sys-tem for microstructure analysis.

Noranda Advanced Materials #W384950 rue LevySaint Laurent, Quebec H4R 2P1CanadaTelephone: (514) 856-6956Fax: (514) 856-6925

Noranda Advanced Materials man-ages new product initiatives ofNoranda's metallurgical operations.We develop, produce and sell world-competitive and innovative productsbased on Noranda's technicalresources, production capabilities andmarkets. We produce ultra-pure met-als for semiconductor, thermoelectric,and photoreceptor markets. We arealso leaders in the development andproduction of selenium-based detec-tors for digital radiography.

Nortech Fibronic Inc. #U102500 St-Jean-Baptiste, #240Quebec G2E5R9CanadaTelephone: (418) 872-4686Fax:(418)872-2894E-mail: salesSnortech.qc.ca

As an international manufacturer,Nortech Fibronic develops cost-effec-tive leading products that meet cus-tomers needs. Its No ElectromagneticInterference (NoEMI) fiber optic ther-mometer product line uses the latestand simplest temperature-sensingtechniques. Based on a semiconductorchip attached to the end of a fiber opticcable, it provides very accurate tem-perature information in any situation.

• Omicron Associates #U3141738 N.Highland RoadPittsburgh, PA 15241Telephone: (412) 831-2262Fax: (412) 831-9828E-mail: [email protected]: http://www.omicron-

instruments.comOMICRON is recognized for their con-tribution to UHV Scanning Probe

Osmic, Inc. #W291788 Northwood DriveTroy, MI 48084Telephone: (810) 362-1290Fax: (810) 362-4043E-mail: [email protected]

Multilayer coated optics for x-ray andneutron applications includingOwnyx™ Multilayer WD-XRF analyz-ing crystal replacements, GutmanOptics™ Graded MultilayerMonochromators for XRD, andNeumir™ supermirror coated optics forneutron applications. Osmic also offersengineered solutions for applicationsfrom astronomy to x-ray lithography.

• Oxford Applied Research #W36Crawley Mill"WitneyOxfordshire OX8 5TJUnited KingdomTelephone: (44) 1993-773575Fax: (44) 1993-702326E-mail: [email protected]

Manufacturers of scientific instru-ments for thin film research. Our rangeof RF and thermal crackers facilitate:GaN growth: ZnSe p-doping: insitusubstrate cleaning: Atomic As, Se, S fordoping and bulk material growth:Oxidation. Other products includeRHEED, mini e-beam evaporators,magnetrons, focused scanning ion andelectron guns for SIMS, cleaning andbeam neutralization.

Oxford Instruments, Inc. #U320130A Baker Avenue Ext.Concord, MA 01742Telephone: (508) 369-9933Fax: (508) 369-6616E-mail: [email protected]

Visit Oxford Instruments' stand to seethe latest integrated measurement sys-tems, including the MagLab System2000, designed for transport, thermaland magnetic measurements. Also onshow will be our new STM instru-ments, including the MiniCryoSTM,designed for operation at tempera-tures down to 1.5K and in magneticfields within MagLab systems. A vari-ety of Teslatron systems are also avail-able, to explore the "BT" environmentto20Teslaand5mK.

complete systems; which combine, forexample, variable temperatureAFM/STM with AES/XPS/UPS,HREELS, SAM, PEEM (PhotoEmission Electron Microscopy), etc.New developments include the LTSTM (5°K UHV STM) and specializedprobes for AFM and SNOM.

Oxford University Press #U115198 Madison AvenueNew York, NY 10016Telephone: (212) 726-6063Fax: (212) 726-6441E-mail: [email protected]

Oxford University Press publishes awide range of scholarly monographs,practical handbooks and useful textsin Materials Science.

• Park Scientific Instruments #U3061171 Borregas AvenueSunnyvale, CA 94089-1304Telephone: (408) 747-1600Fax: (408) 747-1601E-mail: [email protected]

Park Scientific Instruments presents acomplete family of Scanning ProbeMicroscopes including AutoProbe®M5, the first fully integrated SPM tooffer both atomic resolution and largesample capacity; the AutoProbe CP, anaffordable, full featured SPM; theAutoProbe SA, a portable, multi-modeAFM; AutoProbe V P , a technicallyadvanced and versatile UHV-SPM sys-tem; and our exclusive, prealignedcantilever assemblies available for awide variety of applications.

Parke Mathematical Laboratories #W24450 Chelmsford StreetLowell, MA 01851Telephone: (508) 934-0854Fax: (508) 934-0731E-mail: [email protected]: http://www.parkemath.com

PML applies its expertise towards thedevelopment of solid state materialsand processes. These R&D efforts haveprimarily been in support of defenserelated programs. In addition to itsR&D projects, Parke also provides con-sulting services to private industry,including furnace design for crystalgrowth, and is a producer of highgrade electronic materials.(see ad in this issue)

• Pfeiffer Vacuum Technology, Inc.#U305

8 Sagamore Park RoadHudson, NH 03051Telephone: (603) 595-3243Fax: (603) 595-3250E-mail: [email protected]

Pfeiffer Vacuum is an ISO 9001 certi-fied global leader in the production ofvacuum products used in a broadspectrum of high technology applica-tions, including electronics, materialsscience and research. Products includea complete line of turbomolecular,mechanical and dry vacuum pumps,laboratory vacuum systems, quadru-pole mass spectrometers, gas analyz-ers, helium and gas leak detectors,total pressure gauges, vacuum con-struction components and valves.

• Philips Electronic InstrumentsCompany #U401.403

85 McKee DriveMahwah, NJ 07430Telephone: (201) 529-3800Fax: (201) 529-5084E-mail: [email protected]: http://www/philips.com/axr

Philips Electronic InstrumentsCompany is the leading manufacturerof X-Ray Diffraction and X-RayFluorescence equipment as well as afull line of Scanning and TransmissionElectron Microscopes. Information isavailable on all product lines. PhilipsElectronic Instruments Company isISO 9001 certified. We adhere to themost stringent of the three ISO classifi-cations which requires an established,effective quality system be in place.(see ad in this issue)

• Philips Semiconductors/MaterialsAnalysis Group #U304

811 E. Arques Avenue, MS 65Sunnyvale, CA 94088Telephone: (408) 991-4868Fax: (408) 9914801E-mail: morganaSscs.philips.com

Analyticalservices laboratory offeringSIMS, GDMS, FIB, Auger, ESCA, RBS,AFM/STM, TEM, FESEM, EDX, XRF,XRD, Raman, FTIR, UV/Vis, GC/MS/IR, GPC, ICP, AA, 1C, TGA/TMA/DSC, and acoustic microscopyfor surface, interface, particle, thin filmand bulk materials characterization.Trace element detection, high-resolu-tion imaging and depth profiling, andprecision cross-sectioning.

Photonetics Incorporated #U513401 Edgewater Place, Suite 140Wakefield, MA 01880Telephone: (617) 245-2333Fax: (617) 245-2144

Photonetics, MetriCor Division, manu-facturers a complete line of fiber-opticbased sensing systems. Over twenty



https://doi.org/10.1557/S0883769400031663


1996 MRS Fall Meeting Exhibitdifferent parameters can be measured,including temperature, pressure andrefractive index.

• Physical Electronics, Inc.#U415.4176509 Plying Cloud DriveEden Prairie, MN 55344Telephone: (612) 828-6100Fax: (612) 828-6322

Physical Electronics (PHI) develops,manufactures and markets surfaceanalysis instrumentation to performAuger Electron Spectroscopy (AES),X-ray Photoelectron Spectroscopy(XPS), Secondary Ion Mass Spectro-metry (SIMS) and Time of Flight SIMS.These techniques characterize the topfew atomic layers of a surface, provid-ing spatially resolved informationabout elemental composition, chemicalbonding and molecular structure.

• Plasma Sciences, Inc. #A27200A Telegraph Square DriveLorton,VA 22079Telephone: (703) 550-7888Fax:(703)339-9860

Plasma Sciences, Inc. specializes in themanufacture of high quality planarmagnetron thin-film deposition sys-tems for research and pilot production.Multiple source DC/RF sputteringsystems with recipe drive PC controlare available as well as manual cost-effective sputtering systems for small-er development applications. Otherproducts include R&D scale RIE andreactive plasma etchers.

• Plenum Publishing Corporation#U216

233 Spring StreetNew York, NY 10013Telephone: (212) 620-8000Fax:(212)647-1898

Exhibiting the most up-to-date text-books, journals, and reference worksin all areas of Materials Science,Microscopy and Solid State Physicsincluding: Basic Training in Mathe-matics by R. Shankar; Guide to PhysicsProblems, Parts 1 & 2 by S. Cahn et al;Transmission Electron Microscopyedited by D. Williams and B. Carter;Elastic and Inelastic Scattering inElectron Diffraction and Imaging byZ. Wang; Structural Electron Crystal-lography by D. Dorset; ScanningElectron Microscopy and X-RayMicroanalysis by J. Goldstein et al;Symmetry through the Eyes of aChemist by I. and M. Hargittai;Advances in Acoustinc Microscopy,Vols. 1 & 2 ed. by A. Briggs;Electroactive Polymer Electrochem-istry, Parts 1 & 2 ed. by M. Lyons;Introduction to High-TemperatureSuperconductors by T. Sheahen; CaseStudies in Superconducting Magnetsby Y. Iwasa; Stability of Supercon-ductors by L. Dresner; Journal ofChemical Crystallography; Journal ofComputer-Assisted Microscopy;Journal of Environmental PolymerDegradation; Plasmas and Polymers.

• Princeton Gamma-Tech, Inc.#U425.427

1200 State RoadPrinceton, NJ 08540Telephone: (609) 924-73Fax:(609) 924-1729E-mail: [email protected]

Microanalysis Systems for SEM, (S)TEM and TEM: Si and Ge detectorswith PGT's patented Digital PulseProcessor for better x-ray data in lesstime. Highlighted is the large 60 mm2

area PRISM for optimized analysis onfield emission microscopes.Comprehensive x-ray analysis softwareand EM control in a multi-tasking envi-ronment. Computer-aided applicationsfor EM and light microscopy includeparticle size and shape analysis, metal-lography, fractography, coatings thick-ness measurement, critical dimensionmeasurement, stereo depth measure-ment and microscope automation.

Princeton Instruments, Inc. #U5153660 Quakerbridge RoadTrenton, NJ 08619Telephone: (609) 587-9797Fax:(609)587-1970E-mail: [email protected]

Princeton Instruments will show itscomplete line of systems for opticaland x-ray spectroscopy and imaging.Systems include the widest selection ofCCD based detectors and cameras,plus the industry's only fiber-coupledimage intensified units. Systems offersingle photon sensitivity, up to 4 x 4pixels, and up to 85% quantumefficiency!

Princeton Scientific Corp. #U226P.O. Box 143Princeton, NJ 08542Telephone: (609) 924-3011Fax: (609) 924-3018E-mail: [email protected]

Princeton Scientific Corp. offers vari-ous metal and oxide single crystals,like W, Mo, Au, SrTiO3, TiO2, MgO,etc. Cutting and polishing services arealso provided. Also on display is a"precision wire saw" which allows fora very accurate cutting process andyields surfaces with almost 'lapped'quality.

• Pure Tech, Inc. #U312P.O. Box 1319Carmel, NY 10512Telephone: (914) 878-4499Fax: (914) 878-4727

Pure Tech is an ISO 9002 certifiedAmerican manufacturer of high puritymaterials for sputtering and evapora-tion. Pure Tech produces both stan-dard and custom materials for R&D aswell as production applications. In-house capabilities include vacuummelting, inert gas hot pressing, metaland ceramic machining, custom

plates, target bond-1 services.

VIA l^-« V-^-l- t^1.4 l l \ . iX Lk*- .̂' • *.* U

designed backing pi;ing, and analytical se

Quad Group, Inc. #A201815 S. LewisSpokane, WA 99204Telephone: (509) 458-4558Fax: (509) 458-4555E-mail: [email protected]: http://www.spokane.net/

quadgroup.Romulus HI uses a single work stationto operate any of four platforms (for1 gm to 1 ton range). Twelve inter-changeable modules execute 50+ tests(30 are microelectronic). For automaticreporting of Material Constants usetensile S/S or flexural (Modulus ofRupture). Add adhesion by diamondscratch, stud pull, Hesiometer blade,shear, or peel. Micro: wire, TAB or ballbond.

• Quantum Design, Inc. #U32311578 Sorrento Valley RoadSan Diego, CA 92121Telephone: (619) 481-4400Fax: (619) 481-7410E-mail: [email protected]

Quantum Design manufactures itsMagnetic Property MeasurementSystem (MPMS) and Physical PropertyMeasurement System (PPMS). TheMPMS, with its SQUID technology, isthe industry standard for ultra-sensi-tive magnetic measurements. ThePPMS offers a turn-key platform onwhich to run a number of materialcharacterization experiments underfull automation.

Quesant Instrument Corp. #U51428038 Dorothy Drive, Suite 2Agoura Hills, CA 91301Telephone: (818) 597-0311Fax:(818)991-5490

Quesant Instrument Corporation pro-duces a state-of-the-art Scanning ProbeMicroscope with some remarkablebreakthroughs in the scanning mecha-nism, ease of use and cost reduction.We continually invest in research anddevelopment, assuring that our instru-ments employ the latest technology.Our continuous goal is to producetechnically superior SPMs and tomaintain low fabrication costs thatmake our instruments affordable.

Renishaw Inc. #A21623 Cooper CourtSchaumburg, IL 60173Telephone: (847) 843-3666Fax: (847) 843-1744

We will feature our revolutionarydesign Raman microscope which com-bines holographic notch filter andCCD technology to provide spec-troscopy and fast direct 2-D Ramanimaging in one unit for both funda-mental research and quality assurance.The system provides high throughput(>25%), resolution and sensitivity aswell as 1 μm spatial resolution and fullwavenumber spectra range (-3000 to7000 cm"1) with no spectral stitching.

• Research and PVD MaterialsCorporation #U512

P.O. Box 4796Wayne, NJ 07474-4796Telephone: (201) 575-4245Fax: (201) 575-6460

Research and PVD MaterialsCorporation manufactures a widevariety of highly characterized, highpurity materials for the diverse andsophisticated requirements of thesemiconductor, electronics, electro-optic and related research communi-ties. Products from this single-qualitysource include but are not limited tosputtering targets, thin film depositionmaterials, fabricated forms of specialtyand exotic metals, alloys, ceramics,intermetallics, custom fabrications and"one off" components.

• RHK Technology, Inc. #W271750 West Hamlin RoadRochester Hills, MI 48309Telephone: (810) 656-3116Fax: (810) 656-8347E-mail: [email protected]

RHK Technology will exhibit our com-plete line of SPM control and scanhead products for research, includingour Model UHV 300 VariableTemperature UHV STM and theunique Nanonics Model NSOM 100Near-field Scanning Optical

Microscope. Software demonstrationson our Model SPM 2000 SiliconGraphics-based and Model SPM 1000PC-based control system will be con-ducted throughout the show. We willalso have many of our unique SPMinterface modules on display. Withthese modules, we can control anyscan head design, including othermanufacturers scan heads and userdesigned scan heads for applicationsin STM, AFM, MFM, NSOM, etc.

• Rigaku/USA,Inc.#U317NortRwoods Business Park199 Rosewood Drive, Suite 190Danvers, MA 01923Telephone: (508) 777-2446Fax: (508) 777-3594

Rigaku has been one of the leaders inX-ray analytical instrumentation formore than 50 years and continues atthe leading edge of X-ray analysis.Rigaku provides a wide range ofequipment for X-ray diffraction andX-ray fluorescence which can be usedfor many different applications.

• Rl Lee Instruments, Ltd. #U437,439515 Pleasant Valley RoadTrafford, PA 15085Telephone: (412) 744-0100Fax: (412) 744-0506

RJ Lee Instruments' PERSONAL SEMis a unique "tool" for the investigationof materials, quality control, forensicanalyses, etc. The Online DiagnosticsPackage allows a remote engineer tomonitor a user's system under actualoperating conditions, while the P&RStation option allows comparison ofoptical and electron micrographs ofthe same area(s).(see ad in this issue)

RMC #W314400 South Santa Rita AvenueTucson, AZ 85714Telephone: (520) 889-7900Fax: (520) 741-2200E-mail: [email protected]

RMC's exhibit at MRS this fall willinclude the latest in ultramicrotomyinstrumentation, the MT-XL ultrami-crotome. Also on display will be theCR-X Cryosectioning system, theGKM Glass Knife Maker and a Closed-cycle 3He Insertable Cryostat.

Scientific Instruments, Inc. #A44400 W. Tiffany DriveWest Palm Beach, FL 33407Telephone: (407) 881-8500Fax:(407)881-8556E-mail: [email protected]

The revolutionary GENESIS TCS,Temperature Control System will befeatured. This Temperature Controlleroffers PC display and operation underWindows™ or as a Lab View™ Driver.This unit utilized two 24 bit A/D con-verters with vastly enhanced graphicdisplays. Information on varied cryo-genic temperature sensors will also beavailable.

• Siemens #U301.3036300 Enterprise LaneMadison, WI53719-1173Telephone: (800) 234-XRAYFax:(608)276-3006

Siemens specializes in X-ray diffrac-tion and fluorescence instrumentation,including configurations for phaseidentification, water analysis, thinlayer analysis, quantitative analysis,and single-crystal molecular structuredetermination. Specialized equipment



https://doi.org/10.1557/S0883769400031663


1996 MRS Fall Meeting Exhibitand software developments includehigh-resolution optics for analyzingepitaxial materials, two-dimensionaldetectors for texture analysis, smallangle scattering and microdiffraction,and advanced optics to increase X-rayflux.

SKION Corporation #U537,539P.O. Box 3367612 River StreetHoboken,NJ 07030Telephone: (201) 216-5633/5634Fax: (201) 216-8929E-mail: [email protected]

SKION introduces its patented SolidState Ion Beam Technology which hasthe potential to revolutionize the ionbeam deposition and materials coat-ings industries. This state-of-the-arttechnology enables operation of vari-ous metal ion sources while maintain-ing high vacuum and also providingsuperior thin film quality control overa large area at a very economical cost.

• Solartron Instruments #U506964 Marcon Blvd., Suite 200Allentown, PA 18103Telephone: (610) 264-5034

Solartron Frequency Response andgain-phase analyzers set the world-wide standard for quality and reliabili-ty in impedance measurement for elec-trochemistry and materials characteri-zation. Solartron also manufactureshigh-speed potentiostats with uniformfrequency response in all ranges forimpedance, DC electrochemistry andEC noise analysis with the mostadvanced software available.

Soleras Ltd. #A12P.O. Box BCBiddeford, ME 04005Telephone: (207) 282-5699Fax:(207)284-6118

Soleras is a manufacturer of SputterTargets, Original and EnhancedBacking Plates and vacuum relatedspare parts. The company has productdesign, reverse engineering, failureanalysis, CAD/CAM and full trace-ability/analysis of materials. Solerasspecializes in enhancing original parts,such as water cooled copper/stainlessparts, to allow increased power anduniformity.

SOFRA, Inc. #U20533NagogParkP.O. Box 2619Acton, MA 01720-6619Telephone: (508) 263-2520Fax: (508) 263-2790E-mail: [email protected]

Manufacturer of high quality thin filmmeasurement instruments. The prod-ucts are ranging from SpectroscopicEllipsometers for in-situ process moni-toring, basic research bench top modelto fully automated productionmachines for the wafer and flat panelindustry. Also available are high reso-lution double pass monochrometers(0.025 cm4 q 500nm), turn key spec-trometers to characterize non linearliquid or solid materials.

South Bay Technology, Inc. #A11120 Via CallejonSan Clemente, CA 92672Telephone: (714) 492-2600Fax: (714) 492-1499E-mail: SBTSMSA.Microscopy.comWWW: httpV/www.msa.microscopy

.com/-sbt/South Bay Technology, Inc. will beexhibiting the industry's most

advanced sample preparation systemsand supplies. Featured will be systemsfor:

• Orienting, Cutting & PolishingSingle Crystals

• Ultra-precise thinning of cross-sectionTEM samples

• Selective etching of GaAs/AlGaAsHeterostructures

• Damage free cutting and polishing ofsoft single crystals

Featured products include:• IV3 Research Grade Ion Milling

System for TEM, SEM and OpticalMicroscopy

• Tripod Polisher® for TEM and SEMPolishing

• 900 series Lapping & PolishingSystems

• Real-time Back Reflection LaueCamera

Application Engineers will be on handto help you solve your most difficultsample preparation problems.

Spectra International #U204,206700A East Dunne AvenueMorgan Hill, CA 95037Telephone: (408) 778-6060Fax: (408) 776-8575E-mail: [email protected]: http://supersite.net/

spectra-rga/Spectra International is a group ofcompanies dedicated to the develop-ment and manufacture of an innova-tive range of residual gas analyzers foruse in both industry and research.These instruments are now used inover 30 countries worldwide and havebecome renowned for their high levelof quality and reliability.

• Springer-Verlag N e w York, Inc. #U214175 Fifth AvenueNew York, NY 10010Telephone: 800-777-4643Fax: (212) 533-5587E-mail: [email protected]: http://www.springer-ny.com

Springer s broad and deep publishingprogram in the materials sciencesincludes major new books such as Yu& Cardona's FUNDAMENTALS OFSEMICONDUCTORS, the second edi-tion of Pobell's MATTER & METHODSAT LOW TEMPERATURES, Shah'sULTRAFAST SPECTROSCOPY OFSEMICONDUCTORS AND NANOS-TRUCTURES, and Yosida's THEORYOF MAGNETISM. Take advantage ofthe 20% conference discount on allbooks.

• STAIB Instruments, Inc. #U318813 Diligence Drive, #121 ENewport News, VA 23606Telephone: (757) 873-0099Fax: (757) 873-0130

Compact, high performance electron-optical equipment for in-situ materialanalysis, including: RHEED systems,analyzer, and data acquisition to studystructure and quality of thin films;Photo-Emission Electron Microscopes(PEEM), for dynamic studies of chemi-cal distribution with high time andspace resolution; Auger spectrometers;and Electron Guns for analyticalsurface studies.(see ad in this issue)

SPI Supplies/Structure Probe, Inc.#U429

P.O. Box 656West Chester, PA 19380Telephone: (610) 436-5400Fax: (610) 436-5755E-mail: [email protected]: http://www.2spi.com

Structure Probe, Inc. is an independentlaboratory providing innovative elec-tron microscopy and surface analysisservices for solving materials scienceproblems including HTC materials,diamond coatings and complex poly-mer systems. SPI Supplies: Samplepreparation instruments and consum-able supply items for electronmicroscopy and surface analysis labo-ratories. Exclusive SPI-Module™Sputter/Carbon Coating System,Plasma Prep II™ etcher/asher, PlasmaPrep X™ Parallel Plate all solid statePlasma Etcher for anisotropic etchingand "Tacky Dot" slides.

Struers/Logitech Product Group #U525810 Sharon DriveWestlake, OH 44145Telephone: (216) 871-0071Fax:(216)871-8188

Struers is the world's leading manu-facturer of equipment and consum-ables for metallographic surfacepreparation of solid materials-metals,ceramics, and plasma spray coatings.The Logitech Product Group designsand manufactures a rang" - ' ' —sawing, lapment, and nas a significaiment in materials processing.

Sui i, Inc.

,Inc.

lperconductive Components,

1145 Chesapeake AvenueColumbus, OH 43212Telephone: (614) 486-0261Fax:(614)486-0912E-mail: [email protected]

Superconductive Components, Imanufactures ceramic HighTemperature Superconductors in theform of Powders, Sputtering Targetsand Melt processed Levitation devices.Stop by our booth for a uniquedemonstration. Our division, TargetMaterials, Inc., specializes inSputtering Targets for electronic andoptical thin films including FPD,Pnotovoltaics, Resistor, Hardness andothers.

• Surface/Interface. Inc. #A6110 Pioneer Way, Suite DMountain View, CA 94041Telephone: (415) 965-8205Fax:(415)965-8207E-mail: [email protected]

Surface/Interface provides innovativeproduct solutions to meet the needs ofultrahigh vacuum, semiconductormanufacturing and surface analysiscustomers. S/I specializes in "ultra-clean" components and UHV-compati-ble motors for vacuum and manufac-turing applications, analytical systemsfor surface analysis, and highly pure,characterized reference materials. S/Ialso offers custom products and con-sulting services to industry and thematerials science community.

• SVT Associates #A147620 Executive DriveEden Prairie, MN 55344Telephone: (612) 934-2100Fax: (612) 934-2737E-mail: [email protected]

Manufacturer of leading depositionand process monitoring equipment forIII-VMBE and UHV/CVD Si-Gematerials research. SVTA offers a newIll-Nitride MBE system with guaran-teed material specifications, and acomplete line of effusion cells, RFPlasma Sources, Compact E-BeamSources, and other sources, and Pyro-Metric Interferometer RHEED, andCathodoluminescence instruments.We also provide epi-wafer researchand service.

Sycon Instruments, Inc. #U5196757 Kinne StreetEast Syracuse, NY 13057Telephone: (315) 463-5297Fax:(315)463-5298

Sycon Instruments, Inc. is a manufac-turer of Thin Film DepositionMonitors and Controllers utilizing thequartz crystal sensing techniques. Acomplete line of HV and UHV sensorsand shutters for these products areavailable. A multi-pocket E-BeamSource Indexer for the control of 4 and6 pocket E-Beam Guns is also availablefrom Sycon. A new deposition monitorbased on the principle of AtomicAbsorption is a unique product addedto the Sycon Product Line. This prod-uct is used for continuous monitoringof film deposition.

Taylor & Francis #U1161900 Frost Road, Suite 101Bristol, PA 19007Telephone: (215) 785-5800Fax: (215) 785-5515E-mail: [email protected]

Taylor & Francis is an internationalpublisher and distributor of scientific,technical, and professional books andjournals in physics, fiber optics, opto-electronics and other related disci-plines. Titles include PhilosophicalMagazine, International journal ofOptoelectronics and Liquid Crystals.

Technotrade International, Inc. #U5327 Perimeter RoadManchester, NH 03103Telephone: (603) 622-5011Fax: (603) 622-5211

Representing the following products:BAL-TEC-sample preparation systemsand accessories for electronmicroscopy; MECO-chain clamps andmetal seals for all HV and UHV appli-cations; SASKIA-oil-free diaphragmand piston pumps; WOLF-UHVinstrument feedthroughs utilizingsub "D" connectors.

• Telemark#U10651 Whitney PlaceFremont, CA 94539Telephone: (510) 770-8700Fax: (510) 770-8879

Telemark produces a wide range ofPVD Components. Our E-BeamSources range from 1.5cc to 345cc andour EB supplies cover the band from3kW to 30kW. We also offer multi-wavelength instruments for plasmaanalysis, thin film monitors for reflec-tion, transmission, or color measure-ment, and a quartz crystal depositioncontroller.



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1996 MRS Fall Meeting Exhibit• Tencor Instruments #U2012400 Charleston RoadMountain View, CA 94043Telephone: (415) 969-6767Fax: (415)968-9482

Automated surface profiling systemswith ability to provide comprehensivesurface analysis of even very softfilms. Precise alignment, proven relia-bility, and guaranteed repeatabilityensure highly accurate measurements.Large sample profiler for flat paneldisplays, printed circuit boards. Thinfilm stress measurement systems foranalysis at temperatures from -65 to900° C. Automated film stress mea-surement system with radical stressmapping.(see ad in this issue)

TexSEM Laboratories, Inc. #U535226 West 2230, No. 120Provo,UT 84604Telephone: (801) 344-8990Fax: (801) 344-8997E-mail: [email protected]: http://www.itsnet.com.~tsl

Orientation Imaging Microscopy™(OIM™) automates the imaging ofcrystallographic data obtained viaelectron backscatter diffraction. OIMsystems produce thousands of spatial-ly specific orientation measurementswithin minutes, permitting quantita-tive analysis of local texture, grainboundaries and phase. OIM providesunprecedented detail and precision inthe discovery, creation, and control ofnew microstructures.

• Thermionics Laboratory. Inc.#U421.423

22815 Sutro StreetP.O. Box 3711Hayward,CA 94540Telephone: (510) 538-3304Fax: (510) 538-2889E-mail: salesSthermionicscorp.comWWW: http://www.thermionics.com

Thermionics manufactures vacuumsystems, components, and hardwarefor all vacuum applications including:DRS™, an in-situ, remote substratetemperature measurement/controlsystem; 3-20 kW e-Gun™ evaporationsources and power supplies; Ionpumps, titanium sublimators; XYZmanipulators, sample handling andtransfer devices, differentially pumpedrotary seals; gate, angle, and all metalvalves; feedthroughs, gauges and con-trols, flanges, fittings; surface science,deposition, PLD, RHEED, and customsystems.

• TopoMetrix Corp. #U3165403 Betsy Ross DriveSanta Clara, CA 95054-1162Telephone: (408) 982-9700Fax: (408) 982-9751E-mail: [email protected].

compuserve.comTopoMetrix manufactures ScanningProbe Microscopes (ScanningTunneling Microscopes and AtomicForce Microscopes) for sales world-wide. It produces a large range ofprobe stages for the analysis of bothlarge and small samples. The companyhas a number of field offices world-wide for sales, applications develop-ment and support.

Union Carbide Crystal Products #U508750 S. 32nd StreetWashougaLWA 98671Telephone: (360) 835-2001Fax: (360) 835-9848

Crystal Products, located in the PacificNorthwest, offers Czochralski-grownSapphire substrates for blue LED,superconductors, and SOI, radiation-hardened, 1C devices. Sizes are 2" and3" diameter, C-plane; 2" to 6" diame-ter, R-plane; and SOS epitaxial wafers.See our Sapphire Research Kits con-taining substrates oriented to M, A, Rand C axes.

Varian Vacuum Products #U500121 Hartwell AvenueLexington, MA 02173-3133Telephone: (800) 926-3000Fax:(603)382-3451

Varian Vacuum Products wil exhibit abroad range of high vacuum equip-ment including the MacroTorr, mainte-nance-free ceramic-bearing turbopump and the Starcell® Ion Pump. Ondisplay will be a dry turbo pump sta-tion, a model 956 Turbo Leak Detectorand the new senTorr™ GaugeController.

VAT, Inc. #A5500 West Cummings ParkWoburn, MA 01801Telephone: (617) 935-1446Fax: (617) 935-3940

VAT will display a variety of viton-sealed and all-metal sealed vacuumvalves for pump isolation, load-locks,downstream pressure control, beamlines and other applications. PatentedVATSEALS, a simple method for metalsealing flat surfaced flanges in anyshape from 2°K to 300°C, will also beshown.(see ad in this issue)

1997 MRS Spring MeetingMarch 31—April 4 • San Francisco, California

Meeting Chairs:

Linda G. Grrffith-CimaMassachusetts Institute of TechnologyPhone 617-253-0013, Fax [email protected]

David J. EagleshamBell Laboratories/Lucent TechnologiesPhone 908-582-3768, Fax [email protected]

Alexander H. KingState University of New York, Stony BrookPhone 516-632-8499, Fax 516-632-9528aking @ boundaries.eng.sunysb.edu

VCH Publishers, Inc. #U112333 7th AvenueNew York, NY 10001Telephone: (212) 629-6200Fax: (212) 629-8140E-mail: [email protected]

International publisher of researchmonographs, reference sets, textbooks,and journals in the fields of materialsscience, physics, chemistry and chemi-cal engineering, food science, and lifesciences. New and featured titlesinclude: Advanced Materials; MaterialsScience and Technology; A Guide toMaterials Characterization and ChemicalAnalysis, 2nd Edition; Fundamentals ofInterfacial Engineering; Handbook ofMicroscopy; CVD ofNonmetals; Plasma-Spray Coating; CVD of CompoundSemiconductors; Biomimetic MaterialsChemistry; The Iron Oxides; andDendritic Molecules.

• VG Scientific #U510West Peabody Office Park83 Pine StreetWest Peabody, MA 01960Telephone: (888) 275-2902E-mail: [email protected]

VG Scientific (formerly part of theFisons Surface Systems) is a worldrenowned supplier of state-of-the-artinstrumentation for Surface Analysis.Current products from VG Scientificinclude the ESCALAB 220i-XL, amonochromated imaging XPS systemand the MICROLAB 310-F, a high spa-tial resolution Auger Microprobe fittedwith a Hemispherical Analyser.

• Virginia Semiconductor, Inc. #U4131501 Powhatan StreetFredericksburg, VA 22401Telephone: (540) 373-2900Fax: (540) 371-0371

Featuring Ultra Bond™, Ultrathin™,and Ultramachining™ silicon waferswith flatness within < Sμ, planarity ofS Sμ, and taper S 2.5p; also offeringback side polishing services, custom orresearch wafer and ingot preparations,and conventional small diameter sin-gle and double side polished Cz or Fzwafers. For precisely engineered sili-con products, "If we can't make it, youdon t need it!"(see ad in this issue)

Vital Image Technology, Inc. #U53426496 Broadway, Suite BOakwood Village, OH 44146Telephone: (800) 860-IMAGE or(216)786-7117Fax: (216) 786-7799

In addition to photographic-qualityprinters, V.I.T. will be displaying dif-ferent CCD cameras and other imag-ing equipment by Sony, Mitsubishi,and Seikosha. VitalScan, a digitalimage acquisition system for convert-ing an analog SEM to a high-resolution

digital microscope, will also be on dis-play. VitalScan provides the capture ofboth secondary and backscatterimages as well as EDS or WDS maps.

• Voltaix, Inc. #U3U197 Meister AvenueP.O. Box 5357North Branch, NJ 08876Telephone: (908) 231-9060Toll-free: (800) VOLTAIXFax:(908)231-9063

Voltaix, Inc. manufactures and distrib-utes gases used for CVD and ionimplantation applications includingdiborane, germane, trimethylboronand methyisilane. These gases, as wellas silane, phosphine, silicon and ger-manium tetrafluoride and boron triflu-oride are available as pure gases andin a variety of mixtures. We also sup-ply isotopically enriched versions (e.g.,lOfj, Hβ, 29Si, D) of most of our gases,which have shown promise in ionimplantation and CVD applications.(see ad in this issue)

• Tohn Wiley & Sons, Inc. #UU0605 3rd AvenueNew York, NY 10158-0012Telephone: (212) 850-6000Fax: (212) 850-6088E-mail: [email protected]: http://www.wiley.com

Founded in 1807, John Wiley & Sons,Inc. is an independent global publisherof print and electronic products spe-cializing in scientific and technicalbooks and journals.

X-Ray Optical System, Inc. #U20390 Fuller RoadAlbany, NY 12205Telephone: (518) 442-5250Fax: (518) 442-5292E-mail: [email protected]

We design and fabricate both standardand custom capillary-based optics foruse with x-rays and neutrons. Optionsfor focusing, collimating, and beambending are available. These opticsguide the beam using hollow capillaryfibers. The principle behind the opera-tion of these lenses is the multiple totalexternal reflection of either x-rays orneutrons from the smooth inner wallsof the hollow capillary channels.

Zygo#U213Laurel Brook RoadMiddlefield, CT 06455Telephone: (203) 347-8506Fax: (203) 346-4188

A world leader in surface informationtechnology, Zygo manufactures sys-tems for precision noncontact mea-surement of flatness and roughness ona variety of materials; including disks,substrates and wafers for the data stor-age, semiconductor, and optics indus-tries. Also, distance measuring inter-ferometers for ultra-precision position-ing, precision surface fabrication, andcoating capabilities.

MRS FUTURE MEETINGS1997 Fall Meeting

December 1-5 • Exhibit: December 2-4Boston, Massachusetts

1998 Spring MeetingApril 13-17 • Exhibit: April 14-16

San Francisco, California



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https://doi.org/10.1557/S0883769400031663


1996 MRS Fall Meeting/ICEM-96

Documents

Transcript of 1996 MRS Fall Meeting/ICEM-96