METROLOGY FGB 20102

What is metrology?It is the science of weights and measures Refers primarily to the measurements of length, weight, time, etc.It also includes other engineering measurements for the establishment of a flat, plane reference surface To ensuring these process meet specific degrees of both accuracy and precision

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Accuracyis the degree of conformity of a measured or calculated quantity to its actual, nominal, absolute, or some other reference, value PrecisionIs the degree of mutual agreement or repeatability among a series of individual measurements, values, or results.

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What is a Measurement?A measurement is an act of assigning a specific value to a physical variableThe physical variable becomes the measured variableMeasurements provide a basis for judgments aboutProcess informationQuality assuranceProcess control

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Measurable ParametersWhat do we want to measure?

- Length or distance - Mass- Temperature - Elemental composition- Viscosity- Displacements or distortions- Time- Pressure- Forces - Stress- Strain- Friction- Resistance - Roughness- Depth- Intensity- etc.

METROLOGY MET 3012

Measurement Systems and ToolsMeasurement systems are important tools for the quantification of the physical variableMeasurement systems extend the abilities of the human senses, while they can detect and recognize different degrees of physical variablesFor scientific and engineering measurement, the selection of equipment, techniques and interpretation of the measured data are important

METROLOGY MET 3012Importance of MetrologyIn human relationships, things must be counted and measuredMetrology is an absolute necessity for human development This necessity increased greatly with the advent of the industrial ageAs society develops further, metrology must also be refined further

METROLOGY MET 3012How Important are Measurements?Measurement is the language of scienceIt helps us communicate about size, quantity, position, condition, time, etc.Simple measurement errors can cost a company a contract, work, jobs, and lots of moneyThree areas to which the basic principles of measurement can be applied Communication of the measurement Act and application of the measurement Codification of the measurement

METROLOGY MET 3012Human Interaction in MeasurementsAlmost always require the use of vision Other senses not always good at measurementMeasurements usually require tools They rely on the visual processWhat happens if object is too small to perceive?At what size do things become to small to measure? Handling and/or perception problems Limits of vision/ perception without aid or assistance

METROLOGY MET 3012What is Microsystems MetrologyMeasurement of physical dimensions of Microsystems or structures that are at the dimension scale below our ability to perceive without the help of measurements systems or instrumentsMicrosystems: IC, MEMSMicrostructures: Line widths, film thickness, surface structure and roughness, step heights, particle size, atomic composition, defect inspections, etcNanosystem metrology is emerging now!

METROLOGY MET 3012Where Metrology at the Micro Level is UsedPrecision engineering and measurementsMicron and nano manufacturingResearch and developmentCalibration of instruments and standards

METROLOGY MET 3012SI UnitsInternational System of Units (abbreviated SI from the French phrase, Systme International d'Units) is the most widely used system of units. Ex. The unit of length (or distance or linear size) is the meter (m),

METROLOGY MET 3012Imperial UnitsThe imperial units were mostly used in the United Kingdom and related countries The imperial units are now used mainly in the United States, where they are known as US customary unitsEx. inch, foot, yard, mile

METROLOGY MET 3012SI Base UnitsBasic Unit of LengthMeter is fundamental unit of length in the metric system. The meter was originally defined as 1/10,000,000 of the distance between the equator and either pole; however, the original survey was inaccurate and the meter was later defined simply as the distance between two scratches on a bar made of a platinum-iridium alloy and kept at Sevres, France, near Paris. More recently, it has been defined as the distance light travels through a vacuum in 1/299,792,458 of a second. The meter is now the legal standard of length for most of the world, other standards, such as the yard, being defined in terms of the meter.

METROLOGY MET 3012 SI Base UnitsBasic Unit of MassKilogram is fundamental unit of mass is equal to the mass of the international prototype kilogram (a platinum-iridium cylinder) kept at the Bureau International des Poids et Mesures (BIPM), Svres, Paris (1st CGPM (1889), CR 34-38).

METROLOGY MET 3012 SI Base UnitsBasic Unit of TimeSecond is fundamental unit of time is the duration of exactly 9 192 631 770 periods of the radiation corresponding to the transition between two hyperfine levels of the ground state of the caesium-133 atom at a temperature of 0 K (13th CGPM (1967-1968) Resolution 1, CR 103).

METROLOGY MET 3012 SI Base UnitsBasic Unit of Electrical CurrentAmpere is fundamental unit of electrical current is the constant current which, if maintained in two straight parallel conductors, of infinite length and negligible cross-section, placed 1 meter apart in a vacuum, would produce a force between these conductors equal to 210 7 Newton per meter of length (9th CGPM (1948) Resolution 7, CR 70).

METROLOGY MET 3012 SI Base UnitsBasic Unit of thermodynamic TemperatureKelvin is fundamental unit of thermodynamic temperature (or absolute temperature) is the fraction 1/273.16 (exactly) of the thermodynamic temperature at the triple point of water (13th CGPM (1967) Resolution 4, CR 104).

METROLOGY MET 3012 SI Base UnitsBasic Unit of Amount of SubstanceMole is fundamental unit of amount of substance is the amount of substance which contains as many elementary entities as there are atoms in 0.012 kilograms of pure carbon-12 (14th CGPM (1971) Resolution 3, CR 78). (Elementary entities may be atoms, molecules, ions, electrons, or particles.) It is approximately equal to 6.022141991023 units (Avogadro's number).

METROLOGY MET 3012 SI Base UnitsBasic Unit of Luminous IntensityCandela is fundamental unit of luminous intensity is the luminous intensity, in a given direction, of a source that emits monochromatic radiation of frequency 5401012 hertz and that has a radiant intensity in that direction of 1/683 watt per steradian (16th CGPM (1979) Resolution 3, CR 100).

METROLOGY MET 3012SI Dimensionless Units

METROLOGY MET 3012SI Derived Units With Special Names

METROLOGY MET 3012Convert Measurement Units of LengthMeter to Inches multiply by 39.37Meter to Feet multiply by 3.281Meter to Yards multiply by 1.094Meter to Milesmultiply by 6.214 E-4.

METROLOGY MET 3012Convert Measurement Units of MassKilogram to PoundMultiply by 2.204621