Untitled

Date

Aug 4, 2015 3:29:44 PM

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Contents1. Component 1 (comp1).......................................................................................

1.1. Definitions....................................................................................................1.2. Geometry 1..................................................................................................1.3. Materials......................................................................................................1.4. Solid Mechanics (solid)................................................................................1.5. Mesh 1.........................................................................................................

2. Study 1...............................................................................................................2.1. Stationary....................................................................................................

3. Results...............................................................................................................3.1. Data Sets.....................................................................................................3.2. Plot Groups..................................................................................................

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1 Component 1 (comp1)

1.1 Definitions

1.1.1 Coordinate Systems

Boundary System 1

Coordinate system type Boundary system

Identifier sys1

1.2 Geometry 1

Geometry 1

Units

Length unit µm

Angular unit deg

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1.3 Materials

1.3.1 Poly-Si

Poly-Si

Selection

Geometric entity level Domain

Selection Domain 1

1.4 Solid Mechanics (solid)

Solid Mechanics

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Features

Linear Elastic Material 1

Free 1

Initial Values 1

Fixed Constraint 1

Boundary Load 1

1.5 Mesh 1

Mesh 1

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2 Study 1

2.1 Stationary

Study settings

Property Value

Include geometric nonlinearity Off

Mesh selection

Geometry Mesh

Geometry 1 (geom1) mesh1

Physics selection

Physics Discretization

Solid Mechanics (solid) physics

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3 Results

3.1 Data Sets

3.1.1 Solution 1

Solution

Name Value

Solution Solver 1

Component Save Point Geometry 1

Data set: Solution 1

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3.2 Plot Groups

3.2.1 Stress (solid)

Surface: Total displacement (µm)

3.2.2 1D Plot Group 2

Line Graph: Total displacement (µm)

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