Inertial measurement with trapped particles: A microdynamical systemE. Rehmi Post,a George A. Popescu, and Neil GershenfeldCenter for Bits and Atoms, Massachusetts Institute of Technology, 20 Ames Street, Cambridge,Massachusetts 02139, USA

Received 4 September 2009; accepted 8 December 2009; published online 5 April 2010

We describe an inertial measurement device based on an electrodynamically trapped proofmass. Mechanical constraints are replaced by guiding fields, permitting the trap stiffness to be tuneddynamically. Optical readout of the proof mass motion provides a measurement of accelerationand rotation, resulting in an integrated six degree of freedom inertial measurement device.We demonstrate such a deviceconstructed without microfabricationwith sensitivitycomparable to that of commercial microelectromechanical systems technology and show howtrapping parameters may be adjusted to increase dynamic range. 2010 American Institute ofPhysics. doi:10.1063/1.3360808

While micromachined accelerometers and gyroscopeshave been commercialized and are approaching the funda-mental limits1,2 of their noise performance, an inertial mea-surement unit with six degrees of freedom still requires mul-tiple distinct devices whose dynamic response is limited bytheir static structure and whose production requires complexmicrofabrication. Instead of using micromechanical systemswe propose here the use of a microdynamical system basedon the orbital motion of a trapped particle. This system hasno static structure that would require microfabrication seeFig. 2 yet its microscopic dynamics provide sensitivity andnoise performance comparable to that of microelectrome-chanical systems MEMS devices, and its sensitivity andbandwidth can be dynamically controlled.

Our approach follows from the observation that a par-ticle in a Paul trap3 is in effect a spring-mass system with anelectrodynamic restoring force. The trap has a hyperbolicelectric potential r , t=0trx2+y2+z2 /a0

2

driven by an oscillating voltage 0t=U+V cos t andscaled by a geometric factor a0

2= x0

2+ y02+ z0

2 definedin terms of the traps characteristic radii x0, y0, and z0.Absence of free charge in the trap 2=0 leads to theconstraint ++=0. In the case of the three-dimensional3D Paul trap, these values are chosen to be =1, =1, =2.

It is well-known that a particle subject to the time-varying electric potential of such a trap experiences fast,small-scale micromotion on the time scale =2 /. Be-cause the electric field in the trap is spatially inhomoge-neous, a particle moving in the field will also experience asmall net force over one cycle of micromotion. This forceleads to the slower, large-scale secular motion of trappedparticles.

To derive the effect of inertial acceleration upon atrapped particle, we use the electric pseudopotential of,4 de-fined as,

x eV2

2m2a04x

2. 1

In one dimension, the Hamiltonian for a particle subject to apseudopotential and an acceleration a is

H =p2

2m+ ex + mxa =

12m

p2 + x2 + mxa , 2

where = eV /a022. The corresponding equation of motion

will be that of a driven harmonic oscillator x+s2x=a

where s2= /m. Substitution of the general solution x= x

+c0 expist+c1 expist shows that the particle oscil-lates about a mean position

x = x = 1s

2a = m22a0

4

e2V2a . 3

Therefore we see that in the region where the pseudopoten-tial approximation holds, the mean position x depends lin-early on a.

This analysis was tested by simulating the motion of acharged particle in the traps electric potential r , t. Thesimulated particle was a gold microsphere of radius r=3.125 m and mass m=3.85 ng, with trap parameters U=0 V, V=1000 V, =2240 rad /s, and a0=0.5 mm.Finally, a Stokes drag term with b=6r was added to simu-late the damping effect of a buffer gas air at 1 atm withdynamic viscosity =1.827105 Pa s resulting in theequations of motion

xyz

= axay

az

6rm xy

z

2ea02m

x

yz

. 4

The results of numerically integrating these equations isshown in Fig. 1, from which it is apparent that the center andamplitude of particle micromotion are both linearly depen-dent on applied acceleration.

To test these observations experimentally, a planar trapgeometry5 was chosen for simplicity. Figure 2 shows such atrap with a ring electrode x0=y0=1.0 mm, z0=1.3 mm, r4.3 constructed using a circular copper electrode on FR4circuit board stock. A high-voltage lead drives the centralelectrode while the brass disk of the transducer and the upperelectrode here, a gold-plated nut provide the traps groundreferences.

The trap is loaded by exciting a piezoelectric transducerwith a voltage pulse when the trap electrode is at an appro-priate phase to induce charge on the top of a cluster of par-aElectronic mail: rehmi.post@cba.mit.edu.

APPLIED PHYSICS LETTERS 96, 143501 2010

0003-6951/2010/9614/143501/3/$30.00 2010 American Institute of Physics96, 143501-1

ticles at ground potential. The ejected particles will carryaway an induced charge when they lose contact with ground.Particle charge can be selected by stability of the particle inthe trap and calibrated by dynamics of the trap. In these

experiments the particles were gold Au microspheres7.251.5 m in diameter.

A key feature of the inertial measurement trap is its dy-namic tunability. Figure 3 shows the displacement of theproof mass as a function of applied acceleration as V varies.Dissipation is introduced to increase stability of the trappedparticles motion6 by operating at atmospheric pressure. Thepseudopotential must be corrected for drag due to motion ina buffer gas7 and the effective spring constant is reduced bydamping to kef f = e2V2 /8ma0

42+ b /m2. Figure 4 showsthe measured dependence of k on the AC trap voltage V inour trap, demonstrating its tunability.

The measured effective spring constant can be used tocalibrate a measurement of the noise in the trap. When this isdone, the observed spectrum shows two distinct regions. Fig-ure 5 plots the observed power spectral density of a measure-ment of particle drift, with a 1 / f slope overlaid at low fre-quencies and a 1 / f2 slope diffusion noise8 at higherfrequencies.

The magnitude of the variance of the measured accelera-tion can be estimated from the equipartition theorem.For any collection of quadratic energy storage modes in ther-mal equilibrium each mode will have an average energyequal to kBT /2 where kB is Boltzmanns constant 1.38

1023 J /K and T is the temperature. Energy will be stored

500 0 500

200

100

0

100

x (m)

z(m)

500 0 500

200

100

0

100

y (m)

z(m)

500 0 500500

0

500

x (m)

y(m)

5000500 500

0500

200

100

0

y (m)x (m)

z(m)

0 0.2 0.4 0.6 0.8 1500

0

500

position(m)

xyz

0 0.2 0.4 0.6 0.8 110

5

0

time (s)applie

dz-axis

acceleration(m

s2)

time (s)

(a)

(b)

FIG. 1. Color Simulation results for a particle launched into the xy planeof a trap in free fall from t=0 s to t=0.25 s and then subject to a linearlyincreasing downward acceleration along z from 0 to 1 g from t=0.25 s tot=0.75 s. Data are plotted as a position of the particle and applied accel-eration over time and b projections of particle motion. Simulation param-eters are as described in the text. Note that the mean particle displacement xis proportional to a.

FIG. 2. Color Trap construction detail. Dimensions referenced in the fig-ure are r500 m, z1585 m.

FIG. 3. Color Observed particle displacement as a function of appliedacceleration with linear fits.

FIG. 4. Color Measured effective spring constant as a function of trapvoltage.

143501-2 Post, Popescu, and Gershenfeld Appl. Phys. Lett. 96, 143501 2010

by a particles displacement from equilibrium in the pseudo-potential U=kx2 /2, so x2=kBT /k. The scale of thermalnoise in acceleration measurements is estimated to be a=kx /m=kkBT /m. Given the observed value of k=227 nN /m at V=1000 V, the positional variation is ex-pected to be x=135 nm so the rms acceleration noiseshould be on the order of a=812 g. This is in goodagreement with the integral of the observed noise densitywhich gives an rms noise measurement of 684 g and iscomparable to the performance of state-of-the art MEMSdevices.9 From this estimate we can also calculate that trap-

ping effectively cools the proof mass to a temperature T=213 K.

The simplicity of microdynamical systems in this case,the only moving parts are the particles may lead to devicescapable of large dynamic range obtained through closed-loopcontrol of trap stiffness. Such inertial sensors could be sim-pler to build than their MEMS counterparts yet exhibit supe-rior performance, owing to their dynamically adjustable op-erating parameters. We propose that similar microdynamicalsystems could be used as 3D probes for sensing magneticfield strength, fluid flow, and other physical quantities atlower cost and higher performance than comparable MEMSdevices.

The authors would like to thank Joe Jacobson, ScottManalis, and Joe Paradiso for valuable discussions. Thiswork was supported primarily by the MIT Center for Bitsand Atoms and NSF under Grant No. CCR-0122419.

1E. B. Cooper, E. R. Post, S. Griffith, J. Levitan, S. R. Manalis, M. A.Schmidt, and C. F. Quate, Appl. Phys. Lett. 76, 3316 2000.

2T. B. Gabrielson, IEEE Trans. Electron Devices 40, 903 1993.3W. Paul, Rev. Mod. Phys. 62, 531 1990.4H. G. Dehmelt, Advances in Atomic and Molecular Physics, edited byBates and Estermann Academic, New York, 1967, Vol. 3, pp. 5372.

5R. G. Brewer, R. G. DeVoe, and R. Kallenbach, Phys. Rev. A 46, R67811992.

6V. I. Arnold, V. V. Kozlov, and A. I. Neishtadt, Mathematical Aspects ofClassical and Celestial Mechanics, 2nd ed. Springer, Berlin, 1997.

7S. Arnold, J. H. Li, S. Holler, A. Korn, and A. F. Izmailov, J. Appl. Phys.78, 3566 1995.

8D. T. Gillespie, Am. J. Phys. 64, 225 1996.9The data sheet for the Analog Devices ADXL103 1.7 g single-axisMEMS accelerometer specifies an acceleration noise density of an=110 g /Hz and a typical rms noise level of an1.6f =1846 g forthe bandwidth f =110 Hz over which our device was characterized.

FIG. 5. Color Power spectral density of observed particle drift with simu-lated 1 / f and diffusion noise spectra overlaid. As the particle passes repeat-edly through the Gaussian waist of a focused weak laser beam, its time-domain optical scattering signal reveals the amount of time spent in thebeam waist and allows measurement of the particles closest approach to theoptical axis calibrated by applying known accelerations. The large peak isfrom 60 Hz noise, and the side peaks are associated with resonances of thesecular motion in the trap potential verified by simulating the trap dynamicswith stochastic forcing.

143501-3 Post, Popescu, and Gershenfeld Appl. Phys. Lett. 96, 143501 2010