1 st MEMS Commercial Tuning Fork Gyroscope Draper Labs
8
1 st MEMS Commercial Tuning Fork Gyroscope Draper Labs M. Weinberg, J. Bernstein, S. Cho, A. T. King, A. Kourepenis, P. Ward, and J. Sohn, “A micromachined comb- drive tuning fork gyroscope for commercial applications,” in Proc. Sensor Expo, Cleveland, OH, 1994, pp. 187– 193. Area1mm 2 !
description
1 st MEMS Commercial Tuning Fork Gyroscope Draper Labs. Area 1mm 2 !. - PowerPoint PPT Presentation
Transcript of 1 st MEMS Commercial Tuning Fork Gyroscope Draper Labs
1st MEMS Commercial Tuning Fork Gyroscope Draper Labs
M. Weinberg, J. Bernstein, S. Cho, A. T. King, A. Kourepenis, P. Ward, and J. Sohn, “A micromachined comb-drive tuning fork gyroscope for commercial applications,” in Proc. Sensor Expo, Cleveland, OH, 1994, pp. 187–193.
Area1mm2 !
A Quartz Tuning Fork Gyroscope
Economy of Scale to Lower Cost
A Critical Review of MEMS Gyroscopes Technology and Commercialization StatusSteven Nasiri, 408-988-7339 x108, [email protected] Coronado Drive, Santa Clara, California 95054
“..high volume occurred once unit prices achieved $3 target prices.”
• Automotive: vehicle stability control, rollover detection, navigation, load leveling/suspension control, event recording, collision avoidance
• Consumer: computer input devices, handheld computing devices, game controllers, virtual reality gear, sports equipment, camcorders, robots
• Industrial: navigation of autonomous (robotic) guided vehicles, motion control of hydraulic equipment or robots, platform stabilization of heavy machinery,human transporters, yaw rate control of wind-power plants
• Aerospace/military: platform stabilization of avionics, stabilization of pointing systems for antennas, unmanned air vehicles, or land vehicles, inertial measurement units for inertial navigation
Applications
A Critical Review of MEMS Gyroscopes Technology and Commercialization StatusSteven Nasiri, 408-988-7339 x108, [email protected] Coronado Drive, Santa Clara, California 95054
UI Research Project- Using AUVs to Measure Magnetic Signature of Naval Vessels
IMU
DAU
Magnetometer
Archangel IM3Data ResolutionBody Rates 0.0006°/second @ 200 HzAccelerations 50 μg @ 200 HzData Accuracy(Gyro IMU Mode) Random Walk 2.5°/√hour (C1)5.2°/√hour (C2)Bias Drift 15°/hourStability 50°/hr/yearScale Factor Accuracy 0.1% of Full ScaleScale Factor Drift 300 ppm, 1 sigmaCross Axis 0.13% maximumData Accuracy(Accelerometer) Bias Drift 0.2 mgScale Factor Accuracy 0.10% of Full ScaleScale Factor Drift 500 ppm, 1 sigmaCross Axis 0.13% maximumDynamic Range - C1 ±150°/s ±10 g(Linear) - C2 ±300°/s ±10 gBandwidth(3 db) Rates 40 Hz MaximumAccelerations 50 Hz Maximum
IMU Specifications
