1 Investigation of Optical Properties n, k … index of refraction and damping 1, 2 …...
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Transcript of 1 Investigation of Optical Properties n, k … index of refraction and damping 1, 2 …...
1
Investigation of Optical Properties
n, k … index of refraction and damping
1, 2 … polarization and absorption
nkkn 2; 222
1
Problems:
The penetration depth of light is usually very low (metals) surface sensitive measurement
Influences on measured optical properties of the material:
State of oxidation, distortion, adsorption and etc.
2
Problem with Complex Parameters
22
222
1
1
11
11
1
1
n
n
inin
inin
n
nR
>>> Solely the measurement of reflectivity is not sufficient <<<
Solution:
1. The Kramers-Kronig analysis
2. Optical ellipsometry
3. Differential reflectometry
3
The Kramers-Kronig Analysis
Relation between the real and imaginary part of a complex quantity
0
0
022
21
0
lnln1
lnln
2
1
ln
2
2
lnlnln
exp
dd
Rd
dd
Rd
dR
iRiRr
iRrE
ER
022
022
2
2
d
d
i
Relation between the reflectivity (real part) and the phase shift (imaginary part)
cos21
sin2
cos21
1
RR
Rk
RR
Rn
4
The Kramers-Kronig Analysis
Polarizability
Ion resonance
Electron resonance
Frequency
Microwaveradiation
Infraredradiation
Ultraviolet radiation and x-rays
Val
idity
of M
axw
ell’s
equ
atio
ns
Dipole relaxation
Measurement of reflectivity in a wide spectrum of wavelengths(measured in a broad frequency range)
5
Color Table
c
hhE E (eV) 1 2 3 4 5 6 10 15 20
(nm) 1240 620 413 310 248 207 124 83 62
3.10 2.76 2.48 2.26 2.07 1.91 1.77 1.65 (eV)
6
SilverReflectivity and permittivity from the Kramers-Kronig analysis
The reflectivity for visible light is nearly one
White light is reflected as white light
Dispersion curve: Model of free and bound electrons can be applied
7
CopperReflectivity and permittivity from the Kramers-Kronig analysis
Reflectivity decreases for E > 2 eV ( < 620 nm)
IR light has the best reflectivity
For visible light the reflectivity is better for higher wavelengths „red“ color of copper
Dispersion curve as calculated from the model of free and bound electrons
8
AluminumReflectivity and permittivity from the Kramers-Kronig analysis
Reflectivity is nearly constant (≈ 90%) for the whole spectrum of visible light
White light is reflected as white light
Dispersion curve: Model of free and bound electrons
9
Optical Ellipsometry
Reflected light is always partially polarized
RR
RRP
RRR
||
||
||21
2
2||||
r
r
R
R
ti
ti
ti
ti
nn
nnr
nn
nnr
coscos
coscos
coscos
coscos
21
21
12
12||
Vacuum Germanium: n=5,3
10
Optical Ellipsometry
Incident light: a linear polarized wave
… angle of incidence
Reflected light: an elliptical polarizes wave
s
pe E
Etan
s
pr R
Rtan
11
Elliptical Polarization of a Propagating Wave
… phase shift of two linear polarized waves, which describes an elliptical polarized wave
An elliptical polarized wave can be decomposed into two linear polarized waves.
12
Experimental Arrangement for Optical Ellipsometry
222222222212
222222222212
sin4sin
sin4sin
bababak
bababan
r
r
r
ab
a
2tansin
2sincos1
2costansin
… index of refraction, … absorption, … incidence angle of primary beam,… phase shift of the linear polarized wave… azimuth of reflected wave
13
Measurement of and
Compensator: Measurement of phase shift . The thickness of the compensator is adjusted, so that the phase shift after the compensator is equal to zero creation of a linear polarized wave.
Analyzer: Measurement of the angel . Analyzer is rotated until the polarized light can’t pass.
14
Index of Refraction and Permittivity
222
2
2
2222222
1
cos2sin1
sintansin4sin2
cos2sin1
sin2sin2costan1sin
r
r
r
rr
nk
kn
… index of refraction
… absorption
… polarization
… absorption
15
Differential ReflectometryComparative measurement for similar materials
Investigation of differences in real structures (distortion, oxidation, composition, …)
16
Differential ReflectometryInvestigation of “critical points” in the band structure
… first derivative of
… third derivative of