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    Comparison between Different Data Buses Configurations

    A. Lopez and D. Deschacht

    Laboratoire dInformatique, de Robotique et de Microlectronique de Montpellier

    UMR CNRS 5506, 161 Rue ADA, 34092 Montpellier Cedex 5, France

    [email protected] [email protected]

    Abstract

    With increasing clock frequencies and shrinkingprocess geometries, both capacitive and inductive

    crosstalk become important concerns in designs. In deep

    sub-micron technologies, we can ignore neither theamplitude of the noise due to the coupling between bus

    lines, nor the delay variation due to this crosstalk

    voltage.

    In this paper we study different design solutions on bus

    configurations in order to take advantage of DSM

    technologies, and evaluate their impact on crosstalk

    reduction. The use of intra-layer low-k dielectrics,

    reduces the coupling capacitances and a permittivity of

    two reduces the crosstalk voltage by 22%. An electrical

    screening ground lines solution between signal lines

    exhibits favorable interest for a typical SoC structure.Space between lines can be significantly reduced for an

    equivalent crosstalk voltage. Crosstalk and timing

    performances of these different solutions are evaluatedand then compared. The reduction of the input switchingdelay with technology evolution leads to an important

    increase in the inductive effect. These lines are modelled

    as RC and RLC lines, and the two models are comparedto define the effects caused by neglecting inductance.

    1. Introduction

    With the reduction of distances between wires in deep

    sub-micron technologies, coupling capacitances are

    becoming increasingly significant. As a result theamplitude of the noise due to this coupling cannot be

    ignored [1], especially as an on-chip bus crosstalk noise

    poses a serious problem in VLSI design. In bus structures,crosstalk immunity is extremely important because long

    interconnect wires often run together and in parallel.

    Several factors relating to technology contribute to the

    gravity of the crosstalk problem such as the increase inthe number of metal layers [2], the wire thickness which

    is often greater than the wire width, the density of

    integration and the reduction of the spacing between lines.

    Closed-form formulas are particularly efficient whendetermining design rules. Recently, a number of simple

    crosstalk noise models was proposed. The effects of the

    coupling capacitance have been addressed by Shoji [3]

    using a simple linear RC circuit, and by Becer [4] and

    Vittal [5], using and L lumped-circuit models. Recent

    models such as [6], [7] propose complex models ofprediction of crosstalk requiring complex calculations,and, as a result important CPU time. [8] proposes a

    closed-form peak noise formula by assuming that there is

    a saturated ramp input for the aggressor net. Most of thesemodels, however, did not consider the distributed natureof RC networks, which is necessary in deep sub-micron

    designs. Servel [9] proposes an analytic expression of

    crosstalk voltage for one, two and four adjacent lines,which takes into account interconnect capacitances, line

    resistance and their distributed nature, driver resistance

    and variable strengths of the buffers driving coupled lines.

    The increasing operation speed of integrated circuitstogether with the increasing mean length of

    interconnection may cause transmission line effects tobecome important [10] [11]. Consequently, because of theuse of wider wire for critical signals, inductance of theinterconnect when compared with its resistive component

    can no longer be ignored. Using copper and wider wires

    for critical signals are typically dependent on thetransmission line effect, and buses must now be modelled

    as coupled transmission lines.

    In this paper we highlight the impact of the use of

    various dielectric materials in intra-layer configuration toreduce coupling capacitances and we will study their

    impact on crosstalk reduction. This solution will then be

    compared to the other one where we use screening linesbetween signal lines. The paper is organised as follows. In

    the first part we show how we calculate the electrical

    parameters to model the coupled lines for electricalsimulations. Then, we highlight the impact of the use ofvarious dielectric materials, to reduce the coupling

    capacitances and thus the corresponding crosstalk

    reduction. The design rules are determined so that there isa crosstalk voltage lower than Vdd/5 and the

    corresponding timing performances evaluated. The lines

    are also modelled as RC lines and the two models (RC

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    and RLC) are compared to define the effects caused by

    neglecting inductance. In the second part we study the

    influence of ground lines which are adjacent at the two

    signal lines. The similar performances are evaluated andin the last part we compare these two design solutions.

    2. Impact of intra-layer dielectrics

    2.1. RLCG equivalent parameters calculation and

    crosstalk evaluation

    The principles of the analysis we have followed in

    order to obtain the numerical values of the R, L, C, G

    equivalent parameters from which a set of coupled

    transmission lines could be modelled, have beenpresented in [12]. This work has been carried out by using

    commercial FEM packages developed for two

    dimensional computation of electromagnetic problems

    [13]. The accurate values of the R, L, C, G have beencalculated, for the geometry shown in Fig. 1 and Fig. 7.

    9.3r =

    9.3r1 1

    1

    1

    0.8S

    1 2 3

    Fig. 1: Sketch of the studied structure consistingof three Cu lines, denoted from 1 to 3, spaced by

    a dielectric material, and immersed in a SiO2matrix.

    For this study, the interlines have been filled with

    various dielectric materials, each with its own permittivity

    r in order to enable us to study the integration of low-k

    dielectric for coupling capacitance reduction. We can now

    simulate the crosstalk voltage in percent with respect to

    Vdd, , versus interconnection length, for differentpermittivity values, by keeping the space of 0.6 m

    between lines. The corresponding electrical parameters

    are given on Table 1. We have C11 = C33, and inductance

    values are the same, whatever the intra-layer dielectricused : L11 = L22 = L33 = 0.36 nH/mm ; L12 = L23 = 0.0902

    nH/mm and L13 = 0.0202 nH/mm.

    Table 1: Calculated values of the capacities ofthe structure described on Fig.1.

    r C11 fF/mm C22 fF/mm C12 fF/mm

    1 111 89.9 31.9

    2 118.7 91.2 46.4

    3 125.1 92.3 60.8

    Si02 130.7 92.8 75

    We consider three copper adjacent lines ( R = 21.6

    ohms/mm) in the worst-case configuration, that is to say

    when the input of the aggressors changes from 0 to Vdd

    and the input of the victim line is at Vdd. This is theconfiguration where we have the most important noise

    voltage induced on the victim line. The buffer sizing iscalculated to keep a constant loading factor equal to 4,and a 0.5 m receiver size is used. The crosstalk

    amplitude is obtained by HSPICE simulations, the

    interconnections being modelled by an RLCG distributed

    model and the buffers and load inverters with the foundryspecified card model.

    2.2. Crosstalk reduction by using low-k intra-

    layer dielectrics.

    Fig. 2 shows the variation of the crosstalk amplitude with

    respect to Vdd, versus interconnection length for different

    intra-layer dielectrics.

    0

    5

    10

    15

    20

    25

    30

    35

    40

    45

    50

    0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15Length of coupled lines (mm)

    Vcrosstalk/Vddin%

    epsilon 4

    epsilon 3

    epsilon 2

    epsilon 1

    Fig. 2: Simulated crosstalk voltage in percentwith respect to Vdd, for different intra-layerdielectric values.

    As was expected, the use of an intra-layer low-k

    dielectric, while decreasing the coupling capacitance, alsodecreases the crosstalk voltage. We can express the

    lowering as :

    !

    T v P

    h W p h y x

    xy

    h W p h y x

    to have the percentage of the decrease versus

    interconnection length. We show that using a low-k

    dielectric equal to 3 reduces the crosstalk voltage by about12%, a low-k equal to 2 by 22% and a low-k equal to 1 by

    37%. We can benefit from this decrease in terms of space

    reduction between lines ; and in order to do so we plot the

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    variation of the crosstalk voltage in percent with respect

    to Vdd, versus oxide permittivity, for different spaces

    between lines, Fig. 3. The coupled interconnections length

    is 5mm.

    10

    15

    20

    25

    30

    35

    40

    45

    0 1 2 3 4Oxide permittivity

    Vcrosstalk/Vddin%

    s=0,6

    s=0,8

    s=1

    s=1,2

    Fig. 3: Variation of the Crosstalk Voltage withrespect to Vdd, versus Oxide Permittivity for

    Different Space (in m) between Lines.

    If, when facing the signal integrity problem, thecrosstalk noise with respect to Vdd does not have an

    amplitude greater than Vdd/5, we find that, for this

    configuration the space between lines must be strictly

    greater than 1.25m for SiO2 and greater than 1m for apermittivity equal to 2.

    The crosstalk amplitude is at the first order dependenton the ratio of coupling capacitance over groundcapacitance (C12 + C23) / C22 , in this configuration.Whatever the oxide permittivity, the space between lines

    must be determined to have a capacitance ratio of 0.47.

    The corresponding electrical parameters are given inTable 2.

    Table 2: Electrical Parameters for CrosstalkLimitation

    C11fF/mm

    C22fF/mm

    C12fF/mm

    L11nH/mm

    L12nH/mm

    L13nH/mm

    SiO2,

    S=1,25m

    147 126.8 29.8 0.306 0.046 0.004

    r = 2,

    S = 1m

    127.9 108.6 25.3 0.306 0.058 0.008

    2.3. Timing performances

    In this last case, an intra-layer with r = 2, we can now

    determine the two most important timing performances :

    that is to say, the latency and the output switching delay.

    The latency is defined as the time when the ouput of the

    line reaches 20% of Vdd, minus the time when the inputof the buffer reaches 80% of Vdd. We define the

    transition time as the delay evaluated between 20% and

    80% of the power supply, Vcc, representingapproximately the range Vtn and Vcc - | Vtp | , Vtn and Vtpbeing the threshold voltages. The transition time is thelinearization of the switching delay over Vcc. This

    permits a better representation of the real signal waveformat the buffers output. The performances are evaluated for

    a constant loading factor equal to four, calculated when

    the two adjacent lines are in a constant logic level. In this

    case, Cline is equal to: Cline = C22 + C12 + C23, where Cii

    represents the ground capacitance, and Cij the couplingcapacitance between line i and line j. In the best-case,

    when the three lines have the same logic transition C line,becomes: Cline = C22, and in the worst-case, when the two

    adjacent lines have an opposite logic transition: Cline = C22+ 2 C12 + 2 C23. The load seen by the buffers is different,

    consequently the performances are different. The resultsare shown on Fig. 4 and Fig. 5 respectively.

    0

    50

    100

    150

    200

    250

    300

    350

    400

    0 1 2 3 4 5 6 7 8 9 10

    Length of coupled lines (mm)

    Latency(ps)

    Best-case

    Worst-case

    Fig. 4: Variation of the latency versusinterconnection coupled lines length

    These results show the importance of the crosstalk-

    induced-delay: we have an 80% variation between best-

    case and worst-case for the latency and 190% for theoutput switching delay for a length of 5 mm. If we have a

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    clock cycle of 1 GHz, we are always under a half cycle

    time for a length of coupled lines lower than 10 mm.

    0

    50

    100

    150

    200

    250

    300

    350

    400

    450

    500

    0 1 2 3 4 5 6 7 8 9 10

    Length of coupled lines (mm)

    Outputtransitiontime(ps)

    Best-case

    Worst-case

    Fig. 5: Variation of the output transition time

    versus interconnection coupled lines length.

    To evaluate the impact of neglecting inductance ininterconnection modelization, we compare the variation,

    in percent, between RLC and RC model line inperformance determination. The discrepancy rate is

    dependent on the input transition time, so, for a possible

    comparison we keep a constant loading factor equal to 4

    for the middle line. All the buffers have the samedimensions. We show in Fig. 6, only the best-case for the

    latency and the output switching delay (O.S.D.), which

    corresponds to the lower input transition time and the

    worst-case for the crosstalk voltage determination.

    0

    10

    20

    30

    40

    50

    60

    0 1 2 3 4 5 6 7 8 9 10Length of coupled lines (mm)

    Discrepancyrateinpercent

    Latency

    O.S.D.

    Crosstalk

    Fig. 6: Discrepancy rate caused by neglectinginductance on performance evaluation.

    The output switching delay is the more sensitive

    parameter, the inductance decreases the output transition

    time by around 50%, which is a beneficial effect, but it

    also increases the crosstalk by around 25%. This showsclearly the importance of including inductance in the

    interconnect model. A specific study of the influence onthe inductive effect will be the subject of future work.

    3. Influence of ground lines adjacent at two

    signal lines

    To minimize the aggressor influence, we consider a

    new interconnect configuration. Two signal lines areinserted between two constant voltage lines (electrical

    screening), as shown in Fig7. In this configuration, with

    the same geometric parameters for the interconnections,the dielectric material is the same in the entire structure.

    Cu

    1

    Cu

    2

    Cu

    3

    S

    W1

    T

    H

    H

    Cu

    1T

    W1W2

    Fig. 7: Configuration of the studied structure

    Here, the victim interconnect is perturbed by only one

    aggressor line. As a result, the coupling capacities aredivided by two and the crosstalk voltage decreases. The

    constant voltage can be Vdd or ground potential. Theimpact of these two potential levels is negligible for

    crosstalk voltage. For the last generation circuits the

    research aims to introduce the low-k material andsubsequently decrease interconnect capacitance. The goalconsists in improving the higher performance circuits.

    Here, we change the dielectric material in the totality of

    the structure. Fig. 8 plots the simulated crosstalk voltagewith respect to Vdd, for different spaces between lines

    and an oxide permittivity of 2.5. A comparison is thenmade between S = 0.6 m by using SiO2 as usual.

    Corresponding electrical parameters are given on Table 3.As expected this configuration reduces the crosstalk

    voltage. For the crosstalk, we obtain similar results

    between different homogeneous relative permittivity forthe same line geometry: at the first order crosstalk voltage

    is dependent upon the coupling to ground capacitance

    ratio. For this configuration, the ratio is : C 23 / ( C22 +

    C12). If we calculate this ratio versus the space betweenthe lines, we verify that it is equal to 0.46 for S = 0.6 m.

    For the same signal integrity constraints: crosstalk noisewith respect to Vdd does not have an amplitude greater

    than Vdd/5, we find that the space between lines can bereduced to 0.6m.

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    0

    5

    10

    15

    20

    25

    0 5 10 15

    Length of coupled lines (mm)

    Vcrosstalk/Vddin%

    S = 0.4 m

    SiO2 (0.6m)

    S = 0.6 m

    S = 0.8 m

    Fig. 8: Crosstalk voltage with respect to Vddversus interconnection length of coupled linesfor different spaces between lines and different

    oxide permittivity values.

    Units for table 3 are fF/mm for capacities and nH/mm

    for inductances.

    Table 3: Equivalent electrical parameters ofthe structure described on Fig. 7

    r = 2.5 S = 0.4m S =0.6m S = 0.8m

    C11 79.8 83.4 87

    C22 52 59.3 66.1

    C12 71.5 48 34.7

    C23 70.9 49.3 34.5

    L11 0.306 0.306 0.306

    L12 0.1082 0.0921 0.0722

    L23 0.1093 0.0901 0.072

    L13 0.03 0.02 0.0103

    3.1 Timing performances

    To compare the timing performances, we determine

    these performances, by using the same loading factor F =

    4, when the signal line 2 (Fig.7) commutes, the adjacentline 3 being at a constant logic level. We have : Cline = C22+ C12 + C23 + C24. For the best-case, (B-C) Cline becomes:Cline = C22 + C12 + C24 and for the worst-case, (W-C) Cline= C22 + C12 + 2 C23 + C24 . We report here the results for

    two different oxide permittivity: SiO2 and r = 2.5. Fig. 9

    shows the latency variation and Fig. 10 the output

    transition time variation.

    0

    100

    200

    300

    400

    500

    600

    0 1 2 3 4 5 6 7 8 9 10Length of coupled lines (mm)

    Latency(ps)

    B-C 2.5

    W-C 2.5

    W-C Si02

    B-C SiO2

    Fig. 9: Variation of the latency versus

    interconnection coupled lines length.

    0

    100

    200

    300

    400

    500

    600

    700

    0 1 2 3 4 5 6 7 8 9 10Length of coupled lines (mm)

    Outputtransitiontime(ps)

    B-C 2.5

    B-C SiO2

    W-C 2.5

    W-C SiO2

    Fig. 10 : Variation of the output transition timeversus interconnection coupled lines length.

    Numerical calculation of Cline shows that the values

    obtained with r = 2.5 are the same as those obtained with

    the intra-layer low-k of 2 in the previous configuration.

    The importance of the crosstalk-induced delay is aboutthe same, whatever the permittivity used. We have an

    increase of 85% for the latency and 190% for the ouput

    transition time, for coupled lines of 5mm. Using a lowerpermittivity than the one of SiO2 increases the

    performances only above 3mm. For 10mm, the gain is

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    around 50% for the latency and 70% for the output

    switching delay for the permittivity of 2.5.

    Fig. 11 shows the discrepancy rate between RLC and

    RC models. We show that whatever the oxide permittivitythe amplitude of the discrepancy remains the same

    (inductance values are independent of oxide permittivity),but, the inductance effect appears for lower values oflength, for SiO2 and the effect of a greater attenuation

    factor reduces the range of length

    concerned.

    0

    10

    20

    30

    40

    50

    60

    0 1 2 3 4 5 6 7 8 9 10Length of coupled lines (mm)

    Discrepanv

    yrateinpercent

    Latency O.S.D.

    Crosstalk Latency SiO2

    OSD SiO2 Crosstalk SiO2

    Fig. 11: Discrepancy rate between RLC and RCmodels on performance evaluation.

    4. Conclusion

    Different solutions of design have been studied to

    evaluate their impact on crosstalk reduction, and to reduce

    the coupling between lines. The use of intra-layer low-kdielectric exhibits favorable interest for a typical SOC

    structure. To cite an example an intra-layer dielectric with

    a permittivity of three reduces the crosstalk voltage by12% whereas one with a permittivity of two reduces it by

    22%. If for the signal integrity problem, the crosstalk

    noise with respect to Vdd, does not have an amplitude

    greater than 0,2Vdd, we find that for a standardconfiguration composed of three lines, in an

    homogeneous oxide, the space between lines must bestrictly greater than 1,25m. The space can then be

    reduced to 1 m by using an intra-layer with apermittivity equal to 2. An electrical screening lines

    solution has been proposed with which we obtain a

    significant crosstalk voltage reduction. For this, twoground lines surround two signal lines and allow a

    reduction of the coupling effect. With the screening

    configuration, the space between lines can be reduced to

    0.6m for the same crosstalk reduction constraint Timing

    performances are equivalent, whether it concerns a first

    solution using an intra-layer with a permittivity of 2 and a

    space between the lines which is equal to 1 m, or in asecond solution with screening lines having a permittivity

    of 2.5 and a space between the lines equal to 0.6 m. Theimportance of including inductance in the interconnectmodel has been clearly shown and a specific study of the

    influence ofn the inductive effect will be the subject of

    future work.

    6. References

    [1] L. Gal, On-chip crosstalk-the new signal integrity

    challenge, IEEE Custom Integrated Circuits Conference, pp.251-254, 1995.

    [2] Semiconductor Industry Association, National TechnologyRoadmap for semiconductors, 1997.

    [3] M. Shoji, Theory of CMOS Digital Circuits and CircuitFailures, Princeton University Press, Princeton, NJ, 1992.

    [4] M Becer, I. N. Hajj, An Analytical Model for Delay and

    Crosstalk Estimation with Application to Decoupling,Proceedings of the IEEE 1st International Symposium on Qualityelectronic Design, March 20-22 2000, San Jose, California, pp.

    51-57.

    [5] A. Vittal, L.H. Chen, M. Marek-Sadowska, K.P. Wang, X.

    Yang, Modeling Crosstalk in Resistive VLSI

    Interconnections, Proceedings of the IEEE International

    Conference on VLSI Design, January, 1999, pp. 470-475.

    [6] M. Kuhlmann, S.S. Sapatnekar, K.K. Parhi, Efficient

    Crosstalk Estimation, IEEE Int. Conf. On Computer Design :

    VLSI in Computer & Processors, 1999, pp. 266-272.

    [7] A. B. Kahng, S. Muddu, D. Vidhani, Noise and Delay

    Uncertainty Studies for Coupled RC Interconnects, IEEE Int.ASIC/SOC Conference, 1999, pp. 3-8.

    [8] J. Cong, D.Z. Pan, P. V. Srinivas, Improved Crosstalk

    Modeling for Noise Constrained Interconnect Optimization,

    ASP-DAC, 2001, pp.373-378.

    [9] G. Servel, D. Deschacht, On-chip crosstalk evaluation

    between adjacent interconnections, 7th IEEE InternationalConference on Electronics, Circuits and Systems, December,2000.

    [10] F. Moll and all, Inductance in VLSI interconnection

    modelling, IEE Proc. Circuits Devices Syst., Vol.145,n3,

    pp.175-179, June 1998.

    [11] L. He and all, Efficient inductance modeling for on-chipinterconnects, IEEE CICC99, pp. 457, 1999.

    [12] G. Servel, D. Deschacht, F. Saliou, J.L. Mattei, F. Huret,

    Impact of Low-k on crosstalk, Proc. 3rd

    International

    Symposium on Quality Electronic Design, San Jos,

    USA,March 2002, pp.298-303.

    [13] OPERA2D, Vector Fields, 24 Bankside, Kind-lington.

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