METAPLAS.DOMINO - oerlikon.com
5
METAPLAS.DOMINO EFFICIENT SOLUTIONS FOR THIN FILM EQUIPMENT Coating Equipment
Transcript of METAPLAS.DOMINO - oerlikon.com
METAPLAS.DOMINO EFFICIENT SOLUTIONS FOR THIN FILM EQUIPMENT
Coating Equipment
� High process reliability
� Short cycle times
� Low costs per piece
� Flexibility, various modular expansion options
� Indiviually tailored coatings
� Minimised maintenance and demand of spare parts
� Efficient after-sales service
METAPLAS.DOMINO One technology platform – various possibilitiesTailoring multiple modules to individual demands and building a great unit – this is the basis of the METAPLAS.DOMINO. State-of-the-art thin film equipment has been developed with the knowledge of nearly 30 years of experience in tool manufacturing industry. For Oerlikon Balzers, this means offering efficient system solutions and even setting trends in surface treatment. The modular and flexible concept of the thin film equipment allows further expansions and upgrades.
� Diverse combination possibilities� Future expansions possible� Patented processes and coatings� Production and R&D support
ArcThe innovative APA evaporator technology (Advanced Plasma Assisted) is based on cathodic vacuum arc and offers diverse development possibilities for new layer architectures.
Benefits:� High target utilisation result
in low target costs� High deposition rates� Adjustable magnetic fields� Short target changing times� High plasma density� Reduction of macro-particles� Excellent coating adhesion
MAIN MODULES FOR METAPLAS.DOMINO PLATFORM
HiPIMSHiPIMS stands for High-Power Impulse Magnetron Sputtering
Benefits:� High ionisation rate (similar to arc)� High power densities from
100 to 1000 W/cm2
� Very high plasma density� Layer structures adjustable
by plasma parameter settings� Very smooth coatings� Excellent coating adhesion� Deposition of dense coatings
at low substrate temperatures
HI3 – High Ionization TripleHybrid Technology (Arc+HiPIMS) combined with AEGD plasma etching:
� Combined strength of 3 processes in one PVD system� Excellent adhesion, high deposition rate, smooth coatings, economic production� Innovative approach to the next generation of PVD coatings for various applications� HI3 technology allows to achieve a variety of layer architectures� With HI3 technology coatings can be tailored by a wide range of materials, by micro alloying,
by doping and by design of layer architecture … combined with economical production!
SputterIn the sputtering process, atoms are extracted from a target by bombardment with high-energy ions (Ar) and transformed into the gas phase. By combining the sputtered material with additional gases, a coating is deposited on the substrate.
Benefits:� A wide range of materials can be sputtered� Diverse process variants available� Smooth coatings� Good coating adhesion on combination with power
etching prozess AEGD
NitridingWith the nitriding module, a plasma nitriding process can be performed before a PVD and/or PACVD coating pro-cess in one system and one batch. Thereby a hardened layer can be produced which offers excellent support for the subsequent PVD/PACVD coating.
Benefits:� Optimisation of tool and component properties� Substitution of expensive base materials� Significantly longer lifetimes� All PVD coatings can be applied
ADDITIONAL MODULES
DLCDLC stands for Diamond-Like Carbon and refers to a group of extremely low friction amorphous carbon coatings. With the DLC module, different DLC coatings can be produced by using PVD and/or PACVD processes. Standard DLC coatings consist of metal free or metal containing carbon coatings.
Benefits:� Excellent coating adhesion� High wear resistance� Low coefficient of friction� Smooth coatings
ta-Cta-C stands for tetrahedral amorphous carbon without hydrogen and refers to a group of extremely hard and low friction amorphous carbon coatings. With the ta-C module different ta-C coatings can be produced.
Benefits:� For higher temperature environments than DLC� Very high wear resistance� Excellent coating adhesion� Smooth coatings
THIN FILM EQUIPMENTYOU ARE DRIVEN BY DEMANDS FOR …
THIN FILM EQUIPMENTVARIANTS AND CHARACTERISTICS OF METAPLAS.DOMINO EQUIPMENTEquipment with integrated chamberCompact equipment in different sizes for all production needs.
Equipment with free chamber and two doorsThe flex versions are perfectly designed for future integration of newly developed technology as well as for example integration into automated production processes.
The costs per piece of a coating process are mainly defined by the loading capacity of the machine. At the same time, a high loading capacity influences the plasma conditions and therefore also the coating quality. For a high loading capacity combined with an excellent coating quality we offer a variety of
standard substrate holder solutions for tools.
The table below shows some examples of different tools with 3-fold rotation on a standard substrate holder. We also offer customised substrate holders for optimised loading capacities.
METAPLAS.DOMINO – HIGH CAPACITY FOR REDUCED COST PER PIECE
Tool dimension METAPLAS.DOMINO pica METAPLAS.DOMINO micra METAPLAS.DOMINO kila
End mill Ø 6 x 55 mm 400 720 1296
End mill Ø 10 x 70 mm 240 480 900
End mill Ø 14 x 100 mm 120 384 720
End mill Ø 20 x 120 mm 90 180 360
Hob Ø 100 x 100 mm 15 30 63
Low target costs reduce cost per piece Besides the loading capacity, the target costs are the major factor in the cost per piece calculation. With our innovative APA arc technology, the target costs have been drastically reduced thanks to a significant increase in target utilisation.
Coating equipment M.TEC M.POWER
METAPLAS.DOMINO pica 0.07–0.08 0.11–0.13
METAPLAS.DOMINO micra 0.05–0.06 0.08–0.10
METAPLAS.DOMINO kila 0.04–0.05 0.06–0.08
Target costs (APA arc) per tool in Euro for end mill Ø 10 mm x 70 mm
BENEFIT FROM THE VARIETY
METAPLAS.DOMINO coatings: Thin film coating types, coating design and architecture
Properties METAPLAS.DOMINO pica METAPLAS. DOMINO micra METAPLAS.DOMINO kila
Usable coating volume Ø 330 mm x 300 mm Ø 450 mm x 500 mm Ø 620 mm x 700 mm
Available coating modules Arc, Sputter, HiPIMS, HI3, Nitriding, DLC, ta-C
APA arc evaporators 2 to 6 3 to 12 4 to 16
Magnetron sputter sources 1 to 3 1 to 4 1 to 4
Available power supplies DC, DC pulse, HiPIMS, bipolar pulsed, MF (RF upon request)
Plasma cleaning All systems equipped with patented power etching process AEGD
Standard substrate table
(others upon request)5 shafts 6 shafts 9 shafts
Properties METAPLAS.DOMINO kila flex METAPLAS.DOMINO giga flex
Usable coating volume Ø 620 mm x 700 mm Ø 1,200 mm x 1,500 mm
Available coating modules Arc, Sputter, HiPIMS, HI3, Nitriding, DLC, ta-C
APA arc evaporators 4 to 16 8 to 32
Magnetron sputter sources 1 to 6 1 to 4
Available power supplies DC, DC pulse, HiPIMS, bipolar pulsed, MF (RF upon request)
Plasma cleaning All systems equipped with patented power etching process AEGD
Standard substrate table
(others upon request)9 shafts Up to 32 shafts
All given data are approximate values, they depend on application, environment and test conditions.
Oerlikon Balzers not only masters coatings but also sees itself as a “Surface Engineer” that understands coating as a contiguous, coherent process. Apart from the coating, the system engineering and the coating technology, the pre- and post-treatment of tools also play an important role. It takes an overall perspective to achieve an ideal result and to maximise the performance of tools.
Oerlikon Balzers is a solutions provider that offers ad van ced technologies for every single process step. Rely on us for counsel, planning, and implementation support.
After Sales
� Technical support and advice via telephone,the service hotline and e-mail
� Remote diagnostics and control for even fastertroubleshooting
� Professional on-site support for installations,upgrades, repairs and maintenance tasks
� Engineer dispatch within 24 hours� Service agreements� New and second hand parts, as well as consumables
for Oerlikon Balzers equipment� Upgrades, including the latest technologies and coatings� Standard and customer-specific fixtures
Our After Sales bases are located in Europe, America and Asia. From these locations, we provide you with services and products. Our service and application engineers worldwide help you keep your equipment up and running. Furthermore our parts warehouses located in Germany, the USA, Japan and China are committed to increasing the availability of your equipment.
Creating your individual portfolio
We offer joint developments to create your individual coating for your specific application. Make your products stand out from the competition.
PARTNERSHIP & SERVICES
QualityConsistently
Our global After Sales team is committed to providing consistent, expert support around the world.
Convincing
THIN FILM EQUIPMENTTOTAL COATING SOLUTIONS
2000x
1. CleaningClean surfaces are essential for coating adhesion. For this reason, OerlikonBalzers invests a great deal of effort in surface preparation for PVD andoffers multi-stage ultrasonic cleaning lines using aqueous alkaline bathswith out environmentally damaging additives.
2. Pre-treatmentIf additional surface preparation is required, Oerlikon Balzers offers theappropriate technologies. Microblasting removes porous surface layers andedge preparation delivers extra performance and superb tool stability.
3. CoatingA broad range of coating technologies is available for almost unlimited cutting,forming, punching, metal die casting or plastics processing applications. Working inclose collaboration with our customers throughout the world, our specialists arecontinuously opening up new applications. Customised coatings are availableon request.
4. Post-treatmentNumerous methods are applied to give tools the finishing touches.Over the years, Oerlikon Balzers has gained the extensive experience neededto suggest the best possible solution and equipment to meet your needs.
5. Quality inspectionThe success of a coating also hinges directly on the condition and quality ofthe tool. Visual and mechanical methods are employed to assess the coatingcompatibility of incoming items and to determine coating quality.The deployment of our technologies in a wide range of industries allows usto optimally consult you as regards appropriate quality assurance resources.
Amherst Balzers
Hiratsuka
Suzhou
Bergisch Gladbach
Pune
China Oerlikon Balzers Coating (Suzhou) Co., Ltd No.9 Chang Yang Street Suzhou Industry Park Jiangsu Province Suzhou 215024 China T: +86 512 68835172 F: +86 512 68835327 E: [email protected]
www.oerlikon.com/balzers
Germany Oerlikon Balzers Coating Germany GmbH Am Böttcherberg 30–38 51427 Bergisch Gladbach Germany T: +49 2204 299-192 F: +49 2204 299-266 E: [email protected]
Headquarters Oerlikon Balzers Coating AG Balzers Technology & Service Centre Iramali 18 9496 Balzers Liechtenstein T: +423 388 7500 F: +423 388 5419 E: [email protected] www.oerlikon.com/balzers
Japan Oerlikon Nihon Balzers Coating Co., Ltd. 7-2-2 Shinomiya, Hiratsuka-City Kanagawa Pref. 254-0014 Japan T: +81 463 54 83 02 F: +81 463 54 22 19 E: [email protected]
USA Oerlikon Balzers Coating USA Inc. 6000 North Bailey Avenue Suite 3 Amherst, NY 14226 USA T: +1 716 799 06 25 F: +1 716 639 39 38 E: [email protected]
HQ
213E
N (1
810)
BENEFIT FROM OUR GLOBAL EQUIPMENT SALES AND AFTER SALES ORGANISATION
India Oerlikon Balzers Coating India Pvt. Ltd.EL-22, J Block, M.I.D.C., Bhosari411026 Pune, MaharashtraIndiaT: +91 20 306 16 000F: +91 20 271 21 571 E: [email protected]
