© 2000 Swagelok Company DP Series Springless Diaphragm Valves.

© 2000 Swagelok Company

DP Series DP Series Springless Diaphragm ValvesSpringless Diaphragm Valves


Why develop a new valve?Why develop a new valve?

• Semiconductor industry driving for lower costs

• Availability of new technology

• Swagelok’s drive to help customers win


DP Series ObjectivesDP Series Objectives

• Provide a 1/4 inch UHP valve for low and high-pressure applications

• Provide a high-performance seat

• Improve flow capabilities

• Provide integral locking handle

• Drop in replacement

• Provide a competitively priced valve


Topics to be DiscussedTopics to be Discussed

• Technology Design tools Seat performance

• Valve overview DP specifications DP components

• Valve highlights


DP Series DP Series Computer Modeling TechnologyComputer Modeling Technology


Valve Valve inletinlet

Valve Valve outletoutlet

DiaphragmsDiaphragms

CFDCFD AnalysisAnalysis

Fully Swept Flow PathFully Swept Flow Path


Featured Featured areaarea

Finite Element AnalysisFinite Element Analysis


FEA FEA AnalysisAnalysis

Repeatable Shutoff PerformanceRepeatable Shutoff Performance


Featured Featured areaarea

Finite Element AnalysisFinite Element Analysis


FEA FEA AnalysisAnalysis

Actuator Actuator buttonbutton

Bonnet Bonnet nut nut

Diaphragms Diaphragms

Diaphragm Cycle LifeDiaphragm Cycle Life


DP Series Valve Seat TechnologyDP Series Valve Seat Technology


0 60 120 180 240 300 360

Time in Time in secondsseconds

*15*Minimum required by SEMI F1-96

1x10-10 _

1x10-9 _

1x10-8 _

1x10-7 _

(std cm(std cm33/s)/s)

Inboard helium leak Inboard helium leak testing of the seat testing of the seat with 145 psig inlet with 145 psig inlet

pressurepressure

Helium Leak Test PerformanceHelium Leak Test Performance


¼ in. DP Series Technical Issues¼ in. DP Series Technical Issues

• Pressure Rating: 145 psi / 10 bar:145 psi / 10 bar:

Low PressureLow Pressure

3045 psi / 210 bar:3045 psi / 210 bar:High PressureHigh Pressure

• Cv: 0.27: Low Pressure0.27: Low Pressure

0.20: High Pressure0.20: High Pressure

• Dimensions: Same O.A.L.Same O.A.L.

• HLT: 1 x 10-9 std cm3/s1 x 10-9 std cm3/s

• Surface Finish: 5 5 in Rain Ra


Low Pressure Internal ComponentsLow Pressure Internal Components


Common Common body, body, diaphragms diaphragms and seatand seat

Low-pressure air Low-pressure air actuatoractuator

Low- and high- Low- and high- pressure “T” pressure “T”

handlehandle

Low- and high- Low- and high- pressure pressure

locking handlelocking handle

High-pressure High-pressure air actuatorair actuator

Actuator OptionsActuator Options


Locking HandleLocking Handle


DP Series Valve HighlightsDP Series Valve Highlights

• Both high- and low-pressure options

• Improved seat performance

• Improved flow capabilities

• Standard locking handle option for safety

• Drop in replacement

• Competitively priced


DP Series DP Series Springless Diaphragm ValvesSpringless Diaphragm Valves

© 2000 Swagelok Company DP Series Springless Diaphragm Valves.

Documents

Transcript of © 2000 Swagelok Company DP Series Springless Diaphragm Valves.