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CONTENTS
Section Title Page
1 IN TRODUC TION 1
1.1 Scope of this manual 1
1.2 General 2
2 TECHNICAL DATA 3
2.1 Operating conditions 3
2.2 Performance 3
2.3 Mechanical data 3
2.4 Electrical data 3
2.4.1 Electrical supply data 3
2.4.2 Indicators 4
2.4.3 Rear panel connections 4
3 INSTALLA TION 5
3.1 Unpacking and inspection 5
3.2 Panel mounting and free standing 6
3.3 Operating voltage 6
3.4 Power connections 6
3.5 Gauge head connections 73.6 Recorder output 7
4 OPERA TION 8
4.1 Power on 8
5 MAIN TENANCE 9
5.1 Calibration 9
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Section Title Page
6 STORAGE AND DISPOSAL 12
6.1 Storage 12
6.2 Disposal 12
7 SPARES AND ACCESSORIES 13
7.1 Introduction 13
7.2 Spares 13
7.2 Accessories 13
RE TURN OF EDWARDS EQUIPMENT
ILLUSTRATIONS
Figure Title Page
1 Pirani 501 recorder output graph (mbar) 10
2 Pirani 501 recorder output graph (torr) 11
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1 INTRODUCTION
1.1 Scope of this manual
This manual provides installation, operation and routine maintenance
instructions for the Edwards Pirani 501. Read this manual before attempting to
install and operate the unit.
This manual contains essential safety information which supplements the safety
features of the unit. Safety procedures are highlighted as WARNING and
CAUTION instructions. You must obey these instructions. The use of
WARNINGS and CAUTIONS is defined below.
WARNING
Warnings are given when failure to observe the instruction could result in
injury or death to persons.
CAUTION
Cautions are given where failure to observe the instruction could result indamage to the equipment, associated equipment and process.
The safety markings used on the equipment are:
A.C. Electrical
Supply hazard
Refer to
Manual
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1.2 General
The Pirani 501 is for use with the Edwards Pirani PRE10K gauge head. It has a
wide easy to read analogue meter scale with continuous pressure reading from
10-3to 5 mbar (or torr). Range switching is therefore not necessary.
A recorder output is provided on the rear panel of the Pirani 501 giving an output
of 0 to l00 mV. A graph of voltage/pressure is provided in Section 5 of these
instructions.
The unit may be left free standing on the folding legs supplied or panel mounted
with a mounting kit also supplied.
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2 TECHNICAL DATA
2.1 Operating conditions
Temperature range (operating) 0 to 50 °C
Temperature range (storage) -10 °C to +70 °C
Relative humidity 10 - 90 %
Maximum operating altitude 2000 m
2.2 Performance
Pressure measuring range (mbar or torr) 10-3
to 5Recorder output 0 - 100 mV
Output impedance 100Ω
(negative output connected to electrical
safety ground)
Minimum load resistance 10 kΩ
(continuous output)
2.3 Mechanical data
Fixing hole dimensions mm 92 (+ 0.8) x 92 (+0.8)
(panel mounting)
Dimensions mm (w x h x d) 96 x 96 x 155 (DIN 43700)
Meter scale (analog) 230 ° display wide angle
Mounting Bench or panel
(removable tilting feet and
panel clamp supplied)
Weight 650 g
2.4 Electrical data
2.4.1 Electrical supply data
Operating voltages 115 V or 230 V + 10 % - 20 %
(Selected by fuse position)
Operating frequency 50/60 Hz
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Fuse 230 V 63 mA (F)
Fuse 115 V 100 mA (F)
Power consumption 2 W
Power switching On when power supply applied
2.4.2 Indicators
LED (Light Emitting Diode) indication Green LED for power on
2.4.3 Rear panel connections
Recorder output 1 x 3.5 mm DIN
monojack socket
Gauge connector socket 1 x 5 pin DIN 180 °
Gauge type Edwards Pirani PRE10K
Power lead length 2 m
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3 INSTALLATION
CAUTION
Ensure that the instrument is set for the correct voltage before connecting
to the electrical supply.
3.1 Unpacking and inspection
Remove all packing materials and protective covers and check the instrument
for damage. If the instrument is damaged, notify your supplier and the carrierin writing within three days; state the Item Number of the unit together with
your order number and your supplier's invoice number. Retain all packing
materials for inspection. Do not use the instrument.
Check that your package contains the following items:
If any of these items are missing, notify your supplier in writing within 3 days.
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Qty Description Check
1
1
1
2
1
1
2
2
22
Controller
Mains lead (240 V or 115 V)
Chart recorder jack plug 3.5 mm
Mounting brackets
Mains fuse:
100 mA supplied with D395-01-000
OR 63 mA supplied with D395-11-000
Electrical supply lead
Foot tilting
Buffer 19 mm (self adhesive)
Screw M3 x 8 (self tapping)Screw M3 x 40
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3.2 Panel mounting and free standing
The unit may be mounted into a fixing hole in a panel if required. The dimensions
for a fixing hole are given in Section 2.3. Slide the unit into the fixing hole in the
front of the panel, then clip on the two mounting brackets and screw the two
M3 x 40 retaining screws through the clamps until the unit is held against the
panel.
Alternatively, screw the tilting feet to the front underside of the unit using the
self tapping screws provided for a free standing unit. Two self-adhesive buffers
are also provided to ensure better surface grip.
3.3 Operating voltage
WARNING
High voltages exist within the unit. Switch off electrical supply before
removing covers. Covers should not be removed except by a qualified
service engineer.
3.3.1 Pirani 501
The operating voltage on this instrument is changed by reversing the fuse holder.
A small arrow on the mains inlet connector points to the required voltage setting.
When changing the input voltage, the input fuse must also be changed, 100 mA
for 115 V operation and 63 mA for 230 V operation. Pull out the holder marked
beneath the input plug connection and check the fuse furthest
into the holder. Change if necessary.
3.4 Power connections
Instruments ordered to read mbar (D395-01-000) will be set for 230 V operation
and will require a 3-pin electrical supply connector to be connected. Connect the
three cored lead as follows:
BROWN lead to LIVE (L)
BLUE lead to the NEU TRAL (N)
GREEN/YELLOW lead to EARTH (E)
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Instruments ordered to read torr (D395-11-000) will be set for 115 V operation
and will have been provided with a moulded plug.
The wire colour coding is as follows:
BLACK - LIVE
WHITE - NEU TRAL
GREEN - EARTH
3.5 Gauge head connections
CAUTION
Do not connect or disconnect a gauge head with the power on. Damage to
the gauge head may result if this caution is ignored.
Connect the PRE10K gauge head to the vacuum system as detailed in the
instructions supplied with the head.
Connect the extension cable, if ordered, to the gauge head lead socket and plug
the lead into the instrument rear panel socket (5 pin DIN).
3.6 Recorder output
The recorder output socket is on the rear panel of the instrument, marked REC.
The recorder output provides a pressure/voltage output of 0 to 100 mV according
to Figures 1 and 2.
A 3.5 mm DIN mono jack plug is supplied for the recorder output. Connection is
earth (ground) to the outer cable and the signal path (negative) to the centre pin.
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4 OPERATION
4.1 Power on
Power to the Pirani 501 is on when the electrical supply is connected and
switched on.
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5 MAINTENANCE
The Pirani 501 requires no routine maintenance.
5.1 Calibration
For calibration of gauge heads refer to the working instructions for the PRE10K
(D024-28-880).
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Figure 1 - Pirani 501 recorder output graph (mbar)
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Figure 2 - Pirani 501 recorder output graph (torr)
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6 STORAGE AND DISPOSAL
6.1 Storage
Store the instrument in a cool dry place. Do not exceed the specified conditions.
6.2 Disposal
Dispose of the instrument in accordance with local and national safety
requirements.
WARNING
Do not incinerate the instrument. Incineration may cause emission of
noxious fumes and metal cased capacitors may explode due to build up of
internal pressure.
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7 SPARES AND ACCESSORIES
7.1 Introduction
Edwards products, spares and accessories are available from Edwards companies
in Belgium, Brazil, Canada, France, Germany, Great Britain, Hong Kong, Italy,
Korea, Japan, Switzerland, U.S.A., and a world wide network of distributors. The
majority of these centres employ Service Engineers who have undergone
comprehensive Edwards training courses.
7.2 Spares
The Pirani 501 has no serviceable parts.
7.3 Accessories
Pirani gauge PRE10K D024-28-000
Gauge head extension lead 5m D368-36-005
Gauge head extension lead l5 m D368-36-015
Gauge head extension lead 30m D368-36-030
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Return of BOC Edwards Equipment - Procedure (Form HS1)
Introduction
Before you return your equipment you must warn your supplier if the substances you used (andproduced) in the equipment can be dangerous. You must do this to comply with health and safety atwork laws.
You must complete the Declaration (HS2) on the next page and send it to your supplier before you
dispatch the equipment. If you do not, your supplier will assume that the equipment is dangerous andhe will refuse to accept it. If the Declaration is not completed correctly, there may be a delay inprocessing your equipment.
Guidelines
Take note of the following guidelines:
• Your equipment is 'uncontaminated' if it has not been used or if it has only been used withsubstances that are not dangerous. Your equipment is 'contaminated' if it has been used with any
dangerous substances.
• If your equipment has been used with radioactive substances, you must decontaminate it before youreturn it to your supplier. You must send independent proof of decontamination (for example acertificate of analysis) to your supplier with the Declaration (HS2). Phone your supplier for advice.
• We recommend that contaminated equipment is transported in vehicles where the driver does notshare the same air space as the equipment.
PROCEDURE
Use the following procedure:
1. Contact your supplier and obtain a Return Authorisation Number for your equipment.
2. Turn to the next page(s), photocopy and then complete the Declaration (HS2).
3. Remove all traces of dangerous gases: pass an inert gas through the equipment and any accessorieswhich will be returned to your supplier. Drain all fluids and lubricants from the equipment and itsaccessories.
4. Disconnect all accessories from the equipment. Safely dispose of the filter elements from any oil mistfilters.
5. Seal up all of the equipment's inlets and outlets (including those where accessories were attached). You may seal the inlets and outlets with blanking flanges or heavy gauge PVC tape.
6. Seal contaminated equipment in a thick polythene bag. If you do not have a polythene bag largeenough to contain the equipment, you can use a thick polythene sheet.
7. If the equipment is large, strap the equipment and its accessories to a wooden pallet. Preferably, thepallet should be no larger than 510mm x 915mm (20" x 35"); contact your supplier if you cannot meetthis requirement.
8. If the equipment is too small to be strapped to a pallet, pack it in a suitable strong box.9. If the equipment is contaminated, label the pallet (or box) in accordance with laws covering the
transport of dangerous substances.
10. Fax or post a copy of the Declaration (HS2) to your supplier. The Declaration must arrive before theequipment.
11. Give a copy of the Declaration to the carrier. You must tell the carrier if the equipment iscontaminated.
12. Seal the original Declaration in a suitable envelope; attach the envelope securely to the outside of theequipment package. WRITE YOUR RETURN AUTHORISATION NUMBER CLEARLY ON THE
OUTSIDE OF THE ENVELOPE OR ON THE OUTSIDE OF THE EQUIPMENT PACKAGE.
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Return of BOC Edwards Equipment - Declaration (Form HS2)
You must:
• Know about all of the substances which have been used and produced in the equipment before you complete this Declaration
• Read the Procedure (HS1) on the previous page before you attempt to complete this Declaration
• Contact your supplier to obtain a Return Authorisation Number and to obtain advice if you have any questions
• Send this form to your supplier before you return your equipment
a. Equipment model _____________________________________________________________
b. Serial Number ________________________________________________________________
c. Has the equipment been used, tested or operated?
Yes o Go to Section 2 no o Go to Section 4
Are any of the substances used or produced in the equipment
a. Radioactive yes o no o
b. Biologically active yes o no o
c. Dangerous to human health and safety? yes o no o
If you have answered 'no' to all of these questions, go to Section 4.
(Continued)
Your supplier will not accept delivery of anyequipment that is contaminated with radioactivesubstances, unless you:
• Decontaminate the equipment
• Provide proof of decontamination
YOU MUST CONTACT YOUR SUPPLIER FORADVICE BEFORE YOU RETURN SUCH EQUIPMENT
SECTION 1 : EQUIPMENT
SECTION 2 : SUBSTANCES IN CONTACT WITH THE EQUIPMENT
P900-71-100 Issue F Page 1of 2 3A05-010
Return Authorisation Number:
FOR SEMICONDUCTOR APPLICATIONS ONLY :
Tool Reference Number ________________________
Process ______________________________________
Failure Date ________________________________
Serial N umber of Replacement Equipment ________________________
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Reason for return and symptoms of malfunction: ______________________________________________________________________________________________
__________________________________________________________________________________________________________________________________________
If you have a warranty claim:
• who did you buy the equipment from ? ___________________________________________________________________________________________________
• give the supplier's invoice number ______________________________________________________________________________________________________
Print your name: ______________________________________ Print your job title: ______________________________________________________
Print your organisation: _________________________________________________________________________________________________________________
Print your address: _________________________________________________________________________________________________________________
_________________________________________________________________________________________________________________
Telephone number: _______________________________________ Date of equipment delivery: ______________________________________________
I have made reasonable enquiry and I have supplied accurate information in this Declaration. I have not withheld any information. I have followed the Return of BOC Edwards Equipment Procedure (HS1).
Signed: _________________________________________________________________ Date: _________________________________________________________
Precautions required (for example, use protective gloves, etc.)
1
2
3
4
5
6
Substance name Chemical symbol Action required after spillage or human contact
SECTION 3 : LIST OF SUBSTANCES IN CONTACT WITH THE EQUIPMENT
SECTION 4 : RETURN INFORMATION
SECTION 5 : DECLARATION
P900-71-100 Issue F Page 2of 2 3A05-010
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BOC Edwards is a trading name used by affiliatecompanies of The BOC Group plc. BOC Edwards andthe stripe symbol are trademarks of The BOC Group plc.
AddressesEUROPE
HEADQUARTERS
BOC EDWARDS
Manor Royal
CRAWLEY
West Sussex RH10 2LW
UNITED KINGDOM
Tel: +(44) 1293 528844
Fax: +(44) 1293 533453
GUILDFORD, ENGLAND
Tel: +(44) 1483 579857
Fax: +(44) 1483 505211
CUMBERNAULD, SCOTLAND
Tel: +(44) 1236 730575
BELGIUM
BRUSSELS
Tel: +(32) 2 363 0030
FRANCE
PARIS
Tel: +(33) 1 47 98 24 01
GERMANY
MUNICH
Tel: +(49) 89 9919180
MARBURG
Tel: +(49) 6420 82 41 0
ITALY
MILAN
Tel: +(39) 2 48 4471
SWITZERLAND
OBERWIL-BASEL
Tel: +(41) 61 401 4344
Fax: +(41) 61 401 4352
ISRAEL
TEL AVIV
Tel: +(972) 3 649 1262
Fax: +(972) 3 6475112
J ERUSALEM Tel: +(972) 2 321122
ASIA
HEADQUARTERS
BOC EDWARDS (ASIA)
Suite 1308 Tower 2
World Trade Square
123 Hoi Bun Road
Kwun Tong, Kowloon
HONG KONG
Tel: +(852) 2 796 9111
Fax: +(852) 2 796 9095
CHINA
BOC GASES (SHANGHAI)
Tel: +(86) 21 5899 0272 TIANJ IN BOC INDUSTRIAL GASES
Tel: +(86) 22 2834 1981
TAIWAN, R.O.C.
HSIN CHU CITY
Tel: +(886) 35 280 354
SOUTH EAST ASIA
BOC EDWARDS
26 Changi South Street I
Changi South Industrial Estate
SINGAPORE 486773
Tel: +(65) 546 8408
Fax: +(65) 546 8407
KOREA
HEADQUARTERS
SONGWON EDWARDS LTD
625-7 Upsong-dong
CHUNAN CITY
Chungchong Nam-do
KOREA
Tel: +(82) (0) 417 554 7070
Fax: +(82) (0) 417 554 7300
SEOUL
Tel: +(82) (0) 2 501 7070
AMERICAS
HEADQUARTERS
BOC EDWARDS
301 Ballardvale Street
WILMINGTON, MA 01887
USA
Tel: +(1) 978 658 5410
Toll free (USA only): 800 848 9800
Fax: +(1) 978 658 7969
MILPITAS, CA
Tel: +(1) 408 428 1037
TEMPE, AZ
Tel: +(1) 602 777 7007
AUSTIN, TX
Tel: +(1) 512 491 6622
CANADA
MISSISSAUGA, ONTARIO
Tel: +(1) 905 336 9119
Toll free (Canada only): 800 387 4076
Fax: +(1) 905 845 4924
BRAZIL
SAO PAULO
Tel: +(55) 11 8580377
Fax: +(55) 11 2652766
J APAN
HEADQUARTERS
Shuwa Shiba Park Building A-3F
2-4-1 Shibakoen, Minato-ku
TOKYO 105-0011
(Vacuum/Abatement)
NIPPON EDWARDS KK
Tel: +(81) 3 5470 6530
Fax: +(81) 3 5470 6521
(Electronic Gases)
OSAKA SANSO KOGYO KK
Tel: +(81) 3 3434 6789
Fax: +(81) 3 5472 8728
OSAKA
Tel: +(81) 6 384 7052
KYUSHU Tel: +(81) 96 326 7300
SENDAI
Tel: +(81) 22 373 8525
CORPORATE HEADQUARTERS
BOC EDWARDS
Manor Royal
CRAWLEY
West Sussex, RH10 2LW
UNITED KINGDOM