Microelectronics Lab

Process Cooling WaterGroup: Facilities Services DepartmentTeam Members: Michael Postler and Craig GuenetteStart Date: September 08, 2009

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Table of Contents The System

Commencement

As-Built Updates LPL

As-Built Updates FAB

Setup for Calculations

Existing Calculations

Existing Suggestions

Problems to be Solved

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Solutions

New Design

New Pipe Routes

Proposals

Proposals (continued)

New Calculations

Selection

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The System What is Process Cooling Water?

What is this system used for?

How does it differ from Chilled Water?

Why is it advantageous?

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Commencement Initial assignment

Update As-Built drawings

Calculate existing head loss

Make design suggestions

New condition 250 GPM 330 GPM

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As-Built Updates LPL Briefed on the “potential” hazards in ML

Field surveyed in Lower Process Level

Updated As-Built drawings

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As-Built Updates FAB Coordinated a visit to the clean room

Field surveyed in upper process level

Updated As-Built drawings

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Setup for Calculations Assigned numerical values for equipment

Verified all pipe dimensions and pipe fittings

Documented all pressure and flow readings at equipment

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Existing Calculations Identified critical areas (greatest head loss)

Created spreadsheets for problem areas

Interpreted results with present system (Ideal operating pressure: 106 psig)

  Pipe Pipe   Equiv.   Friction Loss Section Accum.Item Size GPM Length Fitting Length Velocity (per 100 ft.) dP dP

  (in.)   (ft.) Qty. (ft.) (fps) (ft.) (ft.) (ft.)PCW Return 4 245 5 1   6.404 4.059 0.2029 208.5385

Ball Valve 4 245   1 2.5 6.404 4.059 0.1015 208.6400

PCW Return 2 245 1 1   25.617 103.003 1.0300 209.6700

Union 2 245   1 0.45 25.617 103.003 0.4635 210.1335

90° Elbow 2 245   1 12 25.617 103.003 12.3603 222.4938

PCW Return 2 245 1 1   25.617 103.003 1.0300 223.5238

Pumps 2 245   1   25.617 103.003 0.0000 223.5238

                   

                   

                   

+10 % SAFETY FACTOR   245.8762

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Existing Suggestions Evaluated critical friction losses

Manipulated pipe diameters on spreadsheet

Suggestions were made to save head loss

Example: Existing LPL tool #34 has 260.7 ft. of head loss (112.8 psig). With suggestions the updated system will have 180.9 ft. of head loss (78.3 psig). This suggestion will save 79.8 ft. of head loss (34.5 psig).

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Problems to be Solved Losing 21 psig (102-81 psig) across filters

Discrepancy of 16 psig between the pressure gauges and the controls system

In bay 11 - equipment would occasionally shut down during operation

Cracked 45° elbow on riser 11

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Solutions Pressure analysis performed, controls –calibration issue

After recalibration pump supply went from 102 psig to 86 psig

In bay 11 – there was not enough pressure at the equipment and pump output pressure was increased

The cracked 45° elbow on riser 11, will be replaced during the next shutdown

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New Design 250 GPM 330 GPM

Existing system HL = 302.4 ft. (130.9 psig) requiring 65 HP

Existing pumps will not handle flow increase

Existing heat exchanger must be modified/replaced

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New Pipe Routes Four different options for main headers

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Proposals Two main 4” headers off 5” SS Main

Filters to be moved to accommodate new header design

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Proposals (continued) 28 Plates to be added to the Heat Exchangers (65-93)

Pumps and motors on VFD to be replaced

Automatic air vents to be installed on all risers

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New Calculations Incorporated new flows, piping and fittings

Assigned new critical equipment

New operating pressure: 95 psig (42 HP)

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  Pipe Pipe   Equiv.   Friction Loss Section Accum.Item Size GPM Length Fitting Length Velocity (per 100 ft.) dP dP

  (in.)   (ft.) Qty. (ft.) (fps) (ft.) (ft.) (ft.)

PCW Return 5 330 5 1   5.521 2.488 0.1244 193.7651

Ball Valve 5 330   1 3.1 5.521 2.488 0.0771 193.8422

PCW Return 5 330 1 1   5.521 2.488 0.0249 193.8671

Union 5 330   1 0.65 5.521 2.488 0.0162 193.8833

90° Elbow 5 330   1 15 5.521 2.488 0.3732  

Suction Diffuser 5X4 330   1     1.850 1.8500 195.7333

PCW Return 4 330 1 1   8.626 7.046 0.0705 195.8037

Pumps 4 330   1   8.626 7.046 0.0000 195.8037                   

                   

+10 % SAFETY FACTOR   215.3841

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Selection Close coupled, stainless steel 40 HP pumps

Heat exchangers to be upgraded to 93 plates and reconditioned

Stainless steel suction diffuser and triple duty valves

Relocation of filter housings with 20 micron filters to be installed

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Thank you!

Questions?

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