Post on 25-Jan-2016
description
“MEMS based seismic and vibration sensors in Building & Structural Health Monitoring systems”
Sean Neylon: Chief Executive Officer, Colibrys Switzerland SA• Founder • 35+ years of experience in Micro-Electronics and Micro-Systems (MEMS)• Former Chairman of NEXUS, the European Microsystems Networking Association• Formerly with GEC Marconi, Plessey, Micronas, CSEM
Contents
The world of Seismic sensing SHM in context of Seismic Market supply chain &
applications Sensor Classification & standards
Driving forces for Structural monitoring applications
Technology Roadmap for MEMS based Strong Motion seismic sensors
Conclusions
Seismic sensing Applications
Geoscience Structuralmonitoring
Civil protection
Civil Engineering
Geotechnics
Volcanic eruptions
Avalanches, landslides
Soil/rock mechanics
Geodesy
Geophysics ‘Free field’
Techtonics
Volcanic
Rapid response, early
warning, public
information
Earthquake
Tsunami
Volcanic explosion
Landslip
Site evaluation Shake maps Subsoil, microzonation Requalification of
structures Land Use planning
Construction
Pile driving, Compaction
Tunneling
Blasting, Mining
Quarrying, Demolition
Industrial equipments
Nuclear Power plants
Dams, embankments
Bridges / Tunnels / Towers
LNG / Oil / Gas storage
Pipeline
Landfills
Tunnel monitoring
Traffic
(Rail and Road) monitoring
Large Buildings
Medical centers
Energy Subsurface
imaging (Oil, Gas, Geothermal)
DefenseNuclear,
Tunneling,Remote monitoring
Market supply chain
Government Agencies
Universities
Hardware integrator
Sensors + data recording + interface
electronics
Sensor manufacturer
Construction & Demolition companies
System integratorSensors, DS , SW +
communications
Regional suppliersN. America: Nanometrics,
Kinemetric/Metrozet, ReftekEMEA:
Syscom, Geosig, GuralpAsia:
Mitsubishi, Kokusai, Aimil
Sensor TechnologySM FBAs: Nanometrics,
Kinemetrics, Guralp, HarbinSM MEMS: Colibrys, SDI, ADIStrain, Velocity
Insurance Security
‘Building’ ownersConsultants
Structural Health Monitoring Sensors
Broadly 4 families of sensors Velocity: Broadband (high sensitivity), Short period and
Strong motion velocity Accelerometers: „Strong Motion“ Class A-D Strain/Displacement: Positioning: GPS
Important Standards: National e.g. USGS.... Regional e.g. State of California......
Classification - Strong Motion
Class A Typically electromechanical Force Balance Accelerometers 5g (±3.5g +1g) High sensitivity, high linearity, low frequency response Expensive, fragile, low volume capacity, medium power Primary application: National (>70km spacing) and Regional (3-30km) networks
Class B Typically MEMS closed loop sensor design 5g (±3.5g +1g) Medium sensitivity, medium linearity, medium frequency response, medium power Relatively inexpensive, robust, medium volume, Primary application: Regional, Urban (<4Km) networks and Structural Health monitoring,
Shake maps, modelling validation Class C
Typically MEMS open loop based sensors 5g (±3.5g +1g) Low dynamic range/resolution, low linearity, medium frequency response, low power Inexpensive, robust, Medium / high volume, Primary application: Earthquake detection & intervention
Strong Motion StandardsClass A
Specifications: USGS & ANSS specifications (13 June 2007)
Technical: Range: >± 4.5 g , (± 3.5 g + 1 g gravity) Noise:
Must: 145dB (0.02-2Hz); 130dB (2-50Hz) Nonlinearity: ≤ 1 % (at full scale) Temperature: Operating range: -20°C to 70°C, Temperature error
over full Temperature span: < 2%, Offset drift: < 0.5 mg /°C Self-test: Must No steps in Bias Lifetime: 5 years
Strong Motion StandardsClass B
State of California specifications are a dominant standard Technical:
Range: ± 5 g , (± 4 g + 1 g gravity) Noise:
Must: .03 mg RMS over .02 to 100 Hz BW (87.3dB (0.1-35Hz) Wish: < 500 µg/√Hz in 1 to 100 Hz band
Nonlinearity: ≤ 1 % (at full scale) Temperature: Operating range: -20°C to 70°C, Temperature error
over full Temperature span: < 2%, Offset drift: < 0.5 mg /°C Self-test: Must No steps in Bias Lifetime: 10 years
9
Market size by application & grade
10
1
Performance S/N Dynamic
range dB
Mar
ket
Siz
e $M
io
100
120dB300ng/√Hz
100dB1 µg/√Hz
140dB 30ng/√Hz
Class AClass BClass C
Regional & Urban earthquake monitoring
Energy Oil and gas, discovery
& reservoir monitoring
SubsurfaceMining & Downhole
imaging
National earthquake monitoring
Earthquake detection & intervention
TAM: Internal estimates 2007-2010
Sensor level valuation
Market size and growth are drivers in innovation!
‘Ground shake’ maps, Structural modeling &
monitoring
10
Competitive supply base - today
100
10
Performance S/N Dynamic
range dB
Pri
ce p
er a
xis
($)
1000
120dB300ng/√Hz
100dB1 µg/√Hz
140dB 30ng/√Hz
MS9005
SF2006
SF2005
SF1600
SF1500
Electromechanical
FBA
NanometricsKinemetrics
Consumer
MEMS
Harbin
Class AClass BClass C
Colibrys
MEMS Open loop
MEMS Closed loop FBA
SF2006 Product Parts
Mechanical Sensor
Closed Loop Sigma-Delta ASIC
PCB + electronic components
Derivative of Oil/Gas ‘geophone’
Class B +/-5g seismic sensor
State of California compliant
RoHS compliant
Self noise of Siflex product line vs. Class A and FBA
-170
-160
-150
-140
-130
-120
-110
-100
-90
-80
-70
-60
-50
-40
-30
-20
-10
0
10
0.01 0.10 1.00 10.00 100.00 1000.00Frequency (Hz)
No
ise
PS
D (
dB
g/r
tHz)
SF1500SNSF1500SN.A
Episensor
1g
0.1g
10mg
1mg
0.1mg
10ug
1ug
0.1ug
Class A
Competitive position - today
13
Competitive position - today
100
10
Performance S/N Dynamic
range dB
Pri
ce p
er a
xis
($)
1000
120dB300ng/√Hz
100dB1 µg/√Hz
140dB 30ng/√Hz
MS9005
SF2006
SF2005SF1600
SF1500
Electromechanical
FBA
NanometricsKinemetrics
ConsumerMEMS
Harbin
Class AClass BClass C
Colibrys
MEMS Open loop
MEMS Closed loop FBA
14
Competitive position - Roadmap
100
10
Performance Dynamic range dB
Pri
ce p
er a
xis
in U
SD
1000
120dB300ng/√Hz
100dB1 µg/√Hz
140dB 30ng/√Hz
MSxxxx
Electromechanical
FBA
EpisensorKinemetrics
Lower costMEMS
Harbin
MEMS
Class A/B
MEMS Class B
Class AClass BClass C
Colibrys
MEMS Open loop
FBAMEMS Closed loop
Strong Motion Roadmap
MEMS based Class B sensorsSmaller size, lower power, improved linearity,
extended FS range Integrated wirelessLower power / energy harvesting
MEMS based ‘Class A’ sensorsLower cost, more robust, lower power, smaller
size
Target specifications
ProductsKinemetrics Class A FBA
MEMS Class A
Target values Colibrys Class B
MEMS
ApplicationsSeismic monitoring
Seismic & Structural monitoring
Seismic & structural monitoring
Full scale rang g ± 4 g ± 5 g ± 5 g
Noise<100 ng/√Hz (0.01 to 100
Hz)
<100 ng/√Hz (0.01 to 100 Hz)
1 µg/√Hz (0.1 to 100 Hz)
Resolution (S/N ratios)
24 bits (50 Hz
BW) (137 db)24 bits (50 Hz BW)
(137 db)20 bits (50 Hz BW) (117
db)
Output Digital (SPI?) Digital (SPI?) Digital (SPI?)
Power < 120 mW < 100 mW < 100 mW
Goal is to replace traditional electromechanical devices (FBA) with closed loop MEMS technology
Class A MEMS Sensor prototype
Prototype 10 g FS Inertial MEMS sensor
Sensor component MEMS and FE ASIC in ceramic
MCM PCB board
FPGA Power supplies, clock Ethernet controller (for testing)
Size Current board: 10 cm x 10 cm x
4mm Potential to make it much smaller Market Beta site sampling 2011/12
Conceptual drawing
Conclusions:MEMS continue to be a strong technology for new Strong Motion Seismic sensor development
My interests are today to: 1. Find potential interested partners for new MEMS Class A sensors?2. Understand objectives of Seismic sensor development within MEMCON FP7 ?3. Confirm if our market assessment is realistic?4. Increase awareness: Europe has a real solution in hand to counter US/HP long term roadmaps
Many thanks for listening to me!
Many thanks to Philippe Krebs at Colibrys for his assistance in providing market details.
“multi-cultural, small, fast, flexible, a symbol of creativity and fertility, strongly territorial, successful through intelligent mutation” – culture of Colibrys
www.colibrys.com