Interpretation of Gas Delivery Diagrams

Gas delivery diagram symbols—gas panel 1 right side

Gas delivery diagram interpretation—gas panel 3

First work out the I/Os;Then work out the mainprocess gas flow routeincluding the choking valves;See next slide for results

ChamberPump

Gas delivery diagram interpretation

Process chamber

V20V22 Hand valve

Gas 2 supply

V40V42 Hand valve

Gas4 supply

Now we will deal with theside branches. But we willMap it out more symmetricallyAround the I/Os. See nextSlide

ChamberPump

N2pump

outlet inlet

V42 V41

PSH9PSH2

Forward purging: V4 and V1 open, V41, V42 open, all others closed.Reverse purging: V2 and V3 open, V41, V42 open, all others closed, V85 is the pump ballast valve—dummy load for the pump when chamber iso valve is closed.

Interpretation of Gas Delivery Diagrams

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