High Precision Positioning and Motion Control

on Silicon Photonics Alignment Applications

Hevin Yu SURUGA SEIKI Taiwan Branch / Senior manager

Agenda

• Applications and Market Trends on Silicon Photonics

• Why Silicon Photonics

• Alignment Solutions

Company Profile

Corporate Name: SURUGA SEIKI CO., LTD. Headquarter: Shizuoka City, Japan Established: May, 1964 Global Sales Revenue:10 Billion JPY in FY16 Employees: Over 1,000 employees globally in FY16 Business Summary Development, Manufacture and Sale of • Electric, Electronic, Communication and Industrial Machinery and

Equipment • Optical Equipment • Parts for Industrial Machinery

Core Technology: High Performance Precise Positioning Technology

Global Network

■ ■ ■ Shizuoka Headquarter ■Tokyo Branch

■Silicon Valley

Vietnam Factory■

Shanghai Branch■ China Design Technical Center■

Shanghai Factory■

Shenzhen Branch■ ■ ■

■Korea

SURUGA Seiki

Headquarter

China Taiwan Shanghai Vietnam Korea San Jose

■Sales Branch ■Technical Center ■Production

Xi’an, Beijing Branch are under the construction.

Wuhan Branch ■

Taiwan Branch

SURUGA Product Lineup

Unitization

Combination technique

Controller

Application Development

Precision optics

Measurement technology System Integration

Compound Technology

Mechanical Parts・Components Complex Units・Solutions Fusion Equipment System

Precise Ball Screw Slide Guide Cross Roller Guide R Guide

• Main components are produced

100% in-house

• Hi Accuracy、Low Cost

Element Parts

Mechanism Technology

High Precision Positioning Motorized Stages

Linear system

Move to two directions(to the X and Y axis) type of stage.

Move vertically(to the Z axis) type of stage. Horizontal Z axis means table surface goes up and down.

Ro

tation

system

1-axis Goniometer stages

Tilt around a stage surface space Perfect for angle control. There are two types of worm gear and ball screw.

Biaxial combination. It is possible to control angle variously with 2 axes.

Move to one direction(to the X axis) type of stage. Motion guide has 3 types of linear ball guide, crossed roller guide and slide guide.

Rotary motion type There are type of 360°rotation and tiny angle rotation type

2-axis Goniometer stages Rotation stages

XY-axis stages Z-axis stages X-axis stages

Silicon Photonics Applications

Applications and Market trends on Silicon Photonics

Applications and Market trends on Silicon Photonics

Why Integrated Photonics

• Telecom applications

– WDM introduces need for highly integrated optical circuits

• Datacom applications

– Increasing need for bandwidth between chips

– Single channel solutions will no longer fulfill requirements

– Need for densely integrated electronics + optics

• Embedded sensors

– Imagine millimeter size spectrometer with source included

– Embed in tissue (glucose sensing, structural health monitoring…)

From: ICPlatform Course on Silicon Photonics, Xiamen 2017

Why Silicon

• Silicon is transparent for l>1.1um

• Silicon process technology is

– Mature

– Good for high volume manufacturing

• High refractive index contrast -> compact circuits

• Passive and active functionality

– Thermo-optic

– Carrier plasma dispersion

– Integration with other material: Ge, III-V,…

From: ICPlatform Course on Silicon Photonics, Xiamen 2017

New Solution, New Market

• Si photonics in existing markets

– If radical improvement in cost/power/space efficiency

• e.g. 10 transceivers on the same chip size, on-chip optical interconnects

– Or is new functionality

• e.g. enabler for >40Gbps line speed communication

• New solutions for novel markets

– Ubiquitous sensing smart city

– Implantable medical devices

From: ICPlatform Course on Silicon Photonics, Xiamen 2017

Silicon Photonics Platform

Graphics from GF, IBM, IME, GLOBALFUNDRIES

Fiber Coupling

Fiber coupling - Silicon

2. Edge coupled

1. Grating coupled

Challenge: Fiber coupling to

sub-micron waveguide

From: Packaging and Integration Technologies for Silicon Photonics, SEMICON 2013

Grating Coupling example

Grating Coupling example

Edge Coupling example

Edge Coupling example

Alignment Solution

Fiber Array Rotations

• Fiber array tilt angles influence maximize optical coupling.

• Vertical fiber alignment stage is designed to support 6 axes of

freedom with center rotations around the fiber array.

• This feature saves time by allowing small optimizations to be made

without moving the fiber away from the chip.

Z X

Y

Ty

Tz

Tx

q

Fiber Array

Stage Z X

Y

Fiber Array

Z X

Y

Stage

Motorized Vertical Type Fiber Alignment Stage

• Our vertical type fiber alignment stage

provides 6axes of motion.

• General spec

– Sub-mm XYZ positioning with 70, 100mm

or more XY and 30mm Z

– +/- 5。Tx, +/- 6。Tz, +/- 6。Ty

– Center of rotations around fiber array tip

• Chip stage

– Optional for rotation (360。),

– Gonio (tilt +/- 6, 8。),

– Linear XY (13~300mm),

– Linear Z (4~30mm)

• Our edge type fiber alignment stage also

provides multi axes of motion.

• General spec (ES-6701)

– <0.5um XYZ positioning with 50mm XZ

and 10mm Y

– +/- 6。Tx, +/- 8。Tz, +/- 8。Ty

– Center of rotations around fiber array tip

• Optional for manual or motorized

Motorized Edge Type Fiber Alignment Stage

Alignment Stage Module

System Configuration

• SURUGA combines

– Customized hardware stages (applications like vertical type fiber

alignment, edge type fiber alignment, and electrical probes)

– Intelligent software to automate silicon photonic device testing

• The diagram below is a schematic representation of how SURUGA

might integrate with your existing instruments.

Alignment software (IROHA)

Main Function

• JOG

(Stage drive with PC mouse operation)

• Automated Alignment Control

(XY, XYZ, and XYZθz Alignment)

• Contact Sensing

(Automatic control GAP each devices)

• Automated Face Alignment (Patent)

(Automatic control parallelism each devices)

• External Equipment Control

(GP-IB, Serial, IO)

• Profiling

(Beam Profile Measurement and Result

Display / Save)

• Input / Output Display / Save

(Optical Power, Analog Display)

• Driving Program

(Macro Sequences Free Writing Function）

Easy Operation, Easy Control

High Resolution Stages

Linear Scale Feedback

Precision Linear Guide and Ball Screw

X0576D Series

X0576D-X X0576D-XYZ

Stroke 30mm

Resolution (Linear

Scale) 4.88nm

Unidirectional

accuracy 3μm

Positioning

Repeatability ±10nm

Lost Motion 20nm

Pitching 20"

Yawing 15"

Rated Load 10kgf 5kgf(On Z axis)

Max Speed 20mm/sec

New positioning stage for photonics application.

XYZ 3 axis type available.

Thanks for your listening

Q & A