Post on 02-Jun-2018
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
1/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 107http://site.ebrary.com/id/10683273?ppg=107Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
2/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 108http://site.ebrary.com/id/10683273?ppg=108Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
3/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 109http://site.ebrary.com/id/10683273?ppg=109Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
4/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 110http://site.ebrary.com/id/10683273?ppg=110Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
5/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 111http://site.ebrary.com/id/10683273?ppg=111Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
6/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 112http://site.ebrary.com/id/10683273?ppg=112Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
7/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 113http://site.ebrary.com/id/10683273?ppg=113Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
8/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 114http://site.ebrary.com/id/10683273?ppg=114Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
9/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 115http://site.ebrary.com/id/10683273?ppg=115Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
10/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 116http://site.ebrary.com/id/10683273?ppg=116Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
11/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 117http://site.ebrary.com/id/10683273?ppg=117Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
12/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 118http://site.ebrary.com/id/10683273?ppg=118Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
13/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 119http://site.ebrary.com/id/10683273?ppg=119Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
14/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 120http://site.ebrary.com/id/10683273?ppg=120Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
15/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 121http://site.ebrary.com/id/10683273?ppg=121Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
16/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 122http://site.ebrary.com/id/10683273?ppg=122Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
17/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 123http://site.ebrary.com/id/10683273?ppg=123Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
18/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 124http://site.ebrary.com/id/10683273?ppg=124Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
19/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 125http://site.ebrary.com/id/10683273?ppg=125Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
20/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 126http://site.ebrary.com/id/10683273?ppg=126Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
21/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 127http://site.ebrary.com/id/10683273?ppg=127Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
22/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 128http://site.ebrary.com/id/10683273?ppg=128Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
23/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 129http://site.ebrary.com/id/10683273?ppg=129Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
24/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 130http://site.ebrary.com/id/10683273?ppg=130Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
25/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 131http://site.ebrary.com/id/10683273?ppg=131Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
26/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 132http://site.ebrary.com/id/10683273?ppg=132Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
27/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 133http://site.ebrary.com/id/10683273?ppg=133Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
28/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 134http://site.ebrary.com/id/10683273?ppg=134Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
29/72
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
30/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 136http://site.ebrary.com/id/10683273?ppg=136Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
31/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 137http://site.ebrary.com/id/10683273?ppg=137Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
32/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 138http://site.ebrary.com/id/10683273?ppg=138Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
33/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 139http://site.ebrary.com/id/10683273?ppg=139Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
34/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 140http://site.ebrary.com/id/10683273?ppg=140Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
35/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 141http://site.ebrary.com/id/10683273?ppg=141Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
36/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 142http://site.ebrary.com/id/10683273?ppg=142Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
37/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 143http://site.ebrary.com/id/10683273?ppg=143Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
38/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 144http://site.ebrary.com/id/10683273?ppg=144Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
39/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 145http://site.ebrary.com/id/10683273?ppg=145Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
40/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 146http://site.ebrary.com/id/10683273?ppg=146Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
41/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 147http://site.ebrary.com/id/10683273?ppg=147Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
42/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 148http://site.ebrary.com/id/10683273?ppg=148Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
43/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 149http://site.ebrary.com/id/10683273?ppg=149Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
44/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 150http://site.ebrary.com/id/10683273?ppg=150Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
45/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 151http://site.ebrary.com/id/10683273?ppg=151Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
46/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 152http://site.ebrary.com/id/10683273?ppg=152Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
47/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 153http://site.ebrary.com/id/10683273?ppg=153Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
48/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 154http://site.ebrary.com/id/10683273?ppg=154Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
49/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 155http://site.ebrary.com/id/10683273?ppg=155Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
50/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 156http://site.ebrary.com/id/10683273?ppg=156Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
51/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 157http://site.ebrary.com/id/10683273?ppg=157Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
52/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 158http://site.ebrary.com/id/10683273?ppg=158Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
53/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 159http://site.ebrary.com/id/10683273?ppg=159Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
54/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 160http://site.ebrary.com/id/10683273?ppg=160Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
55/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 161http://site.ebrary.com/id/10683273?ppg=161Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
56/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 162http://site.ebrary.com/id/10683273?ppg=162Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
57/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 163http://site.ebrary.com/id/10683273?ppg=163Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
58/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 164http://site.ebrary.com/id/10683273?ppg=164Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
59/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 165http://site.ebrary.com/id/10683273?ppg=165Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
60/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 166http://site.ebrary.com/id/10683273?ppg=166Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
61/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 167http://site.ebrary.com/id/10683273?ppg=167Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
62/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 168http://site.ebrary.com/id/10683273?ppg=168Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
63/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 169http://site.ebrary.com/id/10683273?ppg=169Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
64/72
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
65/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 171http://site.ebrary.com/id/10683273?ppg=171Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
66/72
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
67/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 173http://site.ebrary.com/id/10683273?ppg=173Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
68/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 174http://site.ebrary.com/id/10683273?ppg=174Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
69/72
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
70/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 176http://site.ebrary.com/id/10683273?ppg=176Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
71/72
. Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.: John Wiley & Sons, . p 177http://site.ebrary.com/id/10683273?ppg=177Copyright John Wiley & Sons. . All rights reserved.May not be reproduced in any form without permission from the publisher,
except fair uses permitted under U.S. or applicable copyright law.
8/10/2019 Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems 4 Packaging of Advanced Mi
72/72