Electromagnetic Propulsion, Suspension and Levitation New ......Electromagnetic Propulsion,...

Electromagnetic Propulsion, Suspension and Levitation –

New Concepts of Bearingless Systems for High-Precision

Industry

Prof.dr. Elena Lomonova

Swiss Chapter of IEEE Power Electronics Society – 21.02.2020, ETH

2Swiss Chapter of IEEE Power Electronics Society

Research areas • High-tech systems

– Linear and planar motors, magnetic

levitation

– Ultra-high precision power amplifiers

– Field modeling, materials, parasitic effects

– Wireless energy transfer

• Health– Power amplifiers for MRI and X-ray

– Medical robotics

– High-speed motors

• Sustainable energy– Smart grids

– Energy management, chargers, storage

– In-wheel motors and active suspension

Planar motors• Planar motor is an xy-positioning device

• Mover could be magnetically levitated

• First concept: Sawyer motor (1968)

– Stepper motor with air bearings

• Permanent magnet planar motors

– Semiconductor equipment

– Integrated magnetic bearings

(waferscanners)

– Air bearings (wafer dicing)

Planar motors• Planar motor is an xy-positioning device

• Mover could be magnetically levitated

• First concept: Sawyer motor (1968)

– Stepper motor with air bearings

• Permanent magnet planar motors

– Semiconductor equipment

– Integrated magnetic bearings

(waferscanners)

– Air bearings (wafer dicing)

Application of planar stages

light source

reticle

light source

reticle

light source

reticle

light source

reticle

light source

Application of planar stagesSemiconductor lithography

planar

• Process in the production of integrated

circuits (micro-processors)

stroke

planar

integrated

circuit

source

• Accurate and fast positioning of the

wafer is crucial

Acceleration > 50 m/s2 (5 g)

Positioning accuracy < 1 nm

source

• Accurate and fast positioning of the

wafer is crucial

Acceleration > 50 m/s2 (5 g)

Positioning accuracy < 1 nm

• Typically dual-stage topology for 6-

DoF positioning of the wafer

Levitated and suspended planar stages

Contents

• Application

• Working principle

• Commutation

• Over-actuation

– Power minimization

– Heat distribution

– Force distribution

Moving coils –planar motor

courtesy of Philips

Moving-magnet planar motor

courtesy of TU/E

Moving-magnet planar motor

courtesy of TU/E

Magnetically levitated planar motor

• Production of force in x,y,z-directions

• Flux linkage variation in x,y,z-directions

A+ A- B+ B- C+ C-x

• Instead of double sided actuator

A+ A- B+ B- C+ C-x

• Single sided actuator

A+ A- B+ B- C+ C-x

Single-sided coreless motor (periodical section)

• Magnetic

flux φ

• Magnetic flux

density B

A+ A- B+ B- C+ C-

Single-sided coreless actuator

Levitation and propulsion force

can be decoupled

nx n pm

n a b c

nz n pm

n a b c

F i Iex

F i Iez

A+ A- B+ B- C+ C-

Moving coil vs moving magnet

Moving-magnet vs moving-coil planar motor

• Magnet array is finite, increases modeling complexity

• Force is acting on coil volumes, torque arm is larger and

position dependent for moving-magnet planar motors

• Modeling and control is more complex in moving-magnet

case, however, the levitated structure is less complex

Halbach magnet array• Halbach magnet array

– Increased flux density near coils

– Intrinsic shielding of own fields

– Back-iron is unnecessary (magnetically no function)

Linear magnet array

Coil shape

• Rectangular

Planar Magnet array

Coil shape

• Round

Planar Magnet array

Coil shape

• Rectangular

(45 degrees)

Planar Magnet array

Coil shape

• Rectangular

(45 degrees)

Round coils

• Flux density alternating in x,y,z

directions

• Round coils can be applied

which are limited in size

Round coils

directions

Round coils

directions

Rectangular coils

• Long coils can be applied

• Forces in x and y directions

can be physically decoupled

Rectangular coils

• Long coils can be applied

• Forces in x and y directions

can be physically decoupled

Coil length: 2nτn

Decoupling/Commutation• Each coils produces a Lorentz force and torque due to

each magnet in the magnet array

22 2 sin 2 sin

y cx c

x z x z c y xy

y y z x c x z x

z xy z x y c

p yp xF B i e T F y p B i e

BF T F p x F p F

p xF B i e T F p y

Decoupling/Commutation• Each coils produces a Lorentz force and torque due to each magnet

in the magnet array

• The interaction (forces and torque components) can be described on

the level of the

– Magnet array (rigid body approach)

– Individual magnets (force and torque distribution)

1, 2, ,

( ) ( ) ( )

x x x n x

y y y n y

z z n zz

x x n xx

y y n yy

z z n zz

F F p F p F p

F p F p F pFw

T p T p T pT

Decoupling/Commutation

• Commutation algorithm contains real-time model of all

interactions in the planar motor

• Model implemented in look-up tables

• Inverse is based on minimization of losses

• Outer-loop provides stability

Planar motor

Power amplifiers

Feedback/ Feedforward

controller

Commutation x

1( )i p w Γ

22, ( )min

pp i wP i R p w R

ΔΓΓ

Multi-physical model

Electromagnetic model

force and torque

Commutation

current

force and torque

Commutation

current

Mechanical model

force and torque

Commutation

current

Mechanical model

Thermal model

temperature

Over-actuation

Mechanical model1 3

Thermal model

Vertical Heat flux

OFF ON OFF

RzRzRz

cooling block

Lateral Heat flux

Multi-physical framework

Electromagnetic modelforce and torque

Mechanical modelshape

Thermal modeltemperature

Commutationcurrent

Multi-physical framework

Electromagnetic model• Electromagnetic interactions between coils and magnets

• Commutation defines currents from electromagnetic model

Electromagnetic model• Force and torque distribution on the magnet plate is

obtained from electromagnetic model

• Force and torque distribution, and currents are highly

position dependent

Mechanical model• Mechanical model coupled to electromagnetic model to

predict deformation

• Over-actuation allows reducing deformation

Thermal model• Temperature distribution is calculated from current

distribution

• Over-actuation allows reducing maximum temperature,

increasing maximum acceleration

• Commutation defines currents from electromagnetic model

Electromagnetic model• Force and torque distribution on the magnet plate is

obtained from electromagnetic model

• Force and torque distribution, and currents are highly

position dependent

predict deformation

distribution

TopologiesSeveral moving-magnet planar motor topologies have been

manufactured and studied

HPPA (TU/e) EPM (Philips) COPAM (TU/e)

Comparison

Acceleration

Accuracy

Deformation

Goal: Combine advantages in a new design

topology

criterion

Double layer design

• Two layers of coils

• Height of the coils

optimized such that

dissipation per unit of

force is equal

• Phase shift in each layer

to reduce force ripples

Patent application filed

Power dissipation

Lowest mean

Dissipated power during full acceleration (50 m/s2):

Min [kW] Max [kW] Mean [kW]

HPPA 2.26 3.34 2.86

COPAM 3.22 4.44 3.80

EPM 3.33 4.12 3.65

DLPM 2.44 3.30 2.85

Trajectory - Temperature

Lowest temperature rise

Power dissipation [kW] Maximum temperature [oC]

HPPA 0.97 48

COPAM 1.4 57

EPM 1.2 59

DLPM 1.1 47

What limits the performance of a

single-stage planar motor?

cooling plates

Eddy currents

• Induced in electrically conducting

materials

• Create a parasitic force

Eddy currents

• Induced in electrically conducting

materials

Flexible behavior of the mover

• Excited by the force acting on the

permanent magnets

• Cause spatial deformation of the

mechanical structure

What limits the performance of a single-stage planar motor?

Eddy currents

• Induced in electrically

conducting materials

Flexible behavior of the mover

• Excited by the force acting on

the permanent magnets

• Cause spatial deformation of

the mechanical structure

cooling plates

Magnetically suspended, iron-core, planar motors

• Planar motor suspended from ceiling

• Moving-coils, stationary magnets

• Based on the same principles as a coreless levitated

planar motor

• Levitation without power consumption

Ceiling

Structure

• 4 iron-core linear motors

• 45 degrees rotated wrt

magnets

• Propulsion in x, and y

• Passive attraction force

Bottom view Side view

Principles

• Controlled as three-phase motor

• Small force ripples

• Only considerable torque Ty

Laminated iron yoke

Permanent magnets

Nonferromagnetic plate

FzZero current

Principles

Laminated iron yoke

Permanent magnets

Fzd-axis current

Principles

Laminated iron yoke

Permanent magnets

Fzq-axis current

Magnetic loading

• Fz,r is proportional to magnetic flux density B

• Motor constant k is proportional to B

• Magnet with low remanence, limited acceleration

Magnetic suspension Acceleration Torque compensation

Contactless power supply

• Power supply through resonant inductive coupling with

low position variation

• Plastic bonded magnets required (with low remanence Br)

to reduce eddy current losses

Switched

primary coil array

(yellow coils active)

Secondary coil

Realization• planar stroke: 200x200 mm2

• nominal acceleration: 5 ms-2

• power transfer: 335 W

• variation power transfer: 15%

• Mover size: 37x37 cm2

• moving mass: 9 kg

Conclusions• Planar stages could be levitated or suspended

• 45 degrees rotated coil cannot only be used in coreless,

but also iron-core planar motors

• Balance between acceleration, suspension force and

mass in multi-physical design

• Integration of energy transfer system in the airgap

requires magnets with a low electric conductivity (and

hence, with a low magnetic loading)

• Superconducting motors are the next generation of planar

stages

Thank you for your attention

Acknowledgements:

dr. J. Jansen, dr. T. Overboom, dr. J. Smeets,

dr. J. de Boeij, dr. H. Rovers, dr. C. Custers

Electromagnetic Propulsion, Suspension and Levitation –

New Concepts of Bearingless Systems for High-Precision

Industry

Prof.dr. Elena Lomonova

Swiss Chapter of IEEE Power Electronics Society – 21.02.2020, ETH

Electromagnetic Propulsion, Suspension and Levitation New ......Electromagnetic Propulsion,...

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