Post on 16-Dec-2015
Comparative Study of Diamond-Comparative Study of Diamond-like Carbon Films Deposited like Carbon Films Deposited from Different Hydrocarbon from Different Hydrocarbon SourcesSources
Se Jun Park, Kwang-Ryeol Lee
Future Technology Research DivisionKorea Institute of Science and Technology
The International Conference OnMetallurgical Coatings And Thin films
ICMCTF 2006
Im
pact
Ene
rgy
(eV
)
1
10
100
1000
HydrocarbonSource
DenseHydro-Carbon
PolymerPolymerLikeLike
CarbonCarbon
PlasmaPolymers
Energy
Ion Source
Cold Substrate
The Effect of Ion Energy on the The Effect of Ion Energy on the Structure of DLC FilmsStructure of DLC Films
bVIon Energy
P
GraphiticCarbon
Hydrocarbon Source for DLC FilmHydrocarbon Source for DLC Film
• CH4 (Alkane)
• C6H6 (Aromatic) • C6H14 (Alkane)
• C2H2 (Alkyne)
Previous Works
A. Grill et al. DRM (1993) 2 1519
High mean ion energyHigh free H to C ratio
High Stress
acetylene
methane
methane
cyclohexane
cyclohexane
acetylene
Previous Works
K.-R. Lee et al. Diamon.Rel.Mater. 1994(3) 1230
• Methane (CH4) • Benzene (C6H6)
CH4 : CH5+ or C2H5
+
C6H6 : C6H6+ Difference of
Ion energy
Carbon atom
MotivationMotivation
• C6H6 (Aromatic) • C6H14 (Alkane)
Same carbon atom numbers Different hydrocarbon structure ?
Purposes of Present WorkPurposes of Present Work
To characterize DLC films from the hydrocarbon source of the different structure
• Hexane (C6H14) : Alkane structure
• Benzene (C6H6) : Aromatic structure
To find the relation between the properties of DLC films and the structure of hydrocarbon source
Deposition ConditionDeposition Condition
•RF PACVD(13.56 MHz)
•Precursor Gas : C6H6, C6H14
•Deposition Pressure : 1.33 Pa
•Bias Voltage : - 200 - 800 V
•Substrate : P-type (100) Si-wafer
•Film Thickness : 500 nm
Mechanical Properties of DLC Films Mechanical Properties of DLC Films from Hexane and Benzenefrom Hexane and Benzene
• Residual Stress • Hardness
FT-IR Spectra of DLC FilmsFT-IR Spectra of DLC Films
• Benzene • Hexane
sp1 C-Hsp2 C-H
sp3 C-H
sp1 C-Hsp2 C-H
sp3 C-Hsp2 C=C sp2 C=C
FT-IR Spectra of DLC FilmsFT-IR Spectra of DLC Films
• Benzene • Hexane
sp1 C-Hsp2 C-H
sp3 C-H
sp1 C-Hsp2 C-H
sp3 C-Hsp2 C=C sp2 C=C
Binding Energy of Hydrocarbons
Organic Chemistry, J. McMurry (2004)
Ch. Wild et al. JVST A. 5 (1987) 2227
420 KJ/mole355 KJ/mole 464 KJ/mole
Dependence of properties of DLC film on precursor gases
• Methane (CH4)
K.-R. Lee et al. Diamon.Rel.Mater. 1994(3) 1230
• Hexane (C6H14),Benzene (C6H6)
ConclusionsConclusions
The structure and properties of DLC films were strongly dependent on the precursor gases.
• Energy per mass of ion was the main factor to determine the properties and structure of DLC films
• As the average ion energy increased, properties of DLC film deposited from the hydrocarbon sources in same functional group showed similar dependence on ion energy.