Cleaning of Hydrocarbon Buildup on Metallic-oxide Thin-Films

Richard SandbergShannon Lunt, Elke Jackson, Kristi

Adamson, Ross Robinson, Guillermo Acosta, Nick Webb, Mike Dheil, Luke Bissell

Purpose: Will the Opticlean polymer remove hydrocarbon? Does this cleaning process damage our thin films?

Outline1. Sample Creation

&Contamination rate

2. Effects of hydrocarbon “goo” buildup

3. Opticlean Process

4. Opticlean Residue

5. Damage to thin films

6. Removing Opticlean Residue

7. Conclusions

Sample Creation & Contamination Rate

Creation in vaccum chamber RF Sputtering Evaporation

Rates

Goo Thickness (Ǻ)

Action Performed

Elapsed Time (Hrs)

21 Open Air 425

143 Touch fingers Instantaneous

10 Dipped in Water Instantaneous

Reflectivity Effects With Goo Thickness

Opticlean ProcessOpticlean Residue

• Opticlean significantly removes goo, but leaves a residue

• Ellipsometric Results

Goo thickness on two runs:

1. 17 Anstroms2. 22 Anstroms

Thin Film Damage

Scanning Electron Microscope with EDAX showed no thin film damage

X-Ray Photoelectric Spectroscopy found no metal traces

Scanning Electron Microscope with EDAX

X-Ray Photoelectric Spectroscopy

Conclusions

• Subsequent removal of Opticlean residue with plasma etch

• Conclusion: Opiclean a very effective way to remove hydrocarbon buildup1. Sufficiently removes goo2. Does not damage the surface of thin film samples