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OverviewTheATLAS‐101motorizedlinearairbearingstageisafully‐supported,fullypreloadedairbearingdesign.HighperformanceairbearingswithintegratedlinearservomotorsandopBcalencodersdelivertotallynon‐contact,fricBonlessmoBonwithsubmicronresoluBonandrepeatability.DesignedtomeetthedemandingneedsofprecisionproducBonfaciliBes,thesesystemsareequallysuitedtolaboratoryenvironmentswhereflexibilityandeaseofusearecriBcal.

DynamicandSta1cPerformanceAirbearingsaretheprovenstandardforsuperiorsmoothnessofmoBonandposiBoningcontrolinhighprecisionapplicaBons.LowfricBonenablessmoothacceleraBonandBghtvelocitystability.TheeliminaBonofsBcBonandbacklashallowsposiBoningresoluBonof±1encodercount,evenatthehighestresoluBon.Withoutmechanicalcontact,posiBoningrepeatabilityisalsogreatlyimproved.

Nelson Air Corp.precision air bearing positioning

559Rt.13South,P.O.Box2,Milford,NH03055Tel:603‐673‐3908,Fax603‐672‐3008

e‐mail:info@nelsonair.comweb:www.nelsonair.com

Page:1of7

Ultra‐PrecisionLinearAirBearingStages ATLAS‐101ThesmallestinNelsonAir’sAtlaslineofstandardairbearingstages,Atlas‐101stagesoffersuperiorposi1oningperformanceinanextremelycompactpackage.

Features:• TableSizeof115x115mm

• Travelupto400mm

• 100Nmaxload

• Velocityto1m/s

• Accelera1onto2G’s

• Encoderresolu1onto0.001μm

• Straightness/Flatnessto±0.25μm

• Repeatabilityto±0.040μm

• Ultra‐lowvelocityripple

• Posi1oningResolu1onof±1count

• Zero‐maintenance‐nolubrica1on

• Cleanroomcompa1ble

• Ultra‐PrecisionUnibodyAirBearingConstruc1on

• Integratedlinearop1calencoder

• Non‐cogginglinearmotor

• AxescanbestackedforXYopera1onoroperatever1cally

Applica1ons:• Posi1oning

• Scanning

• Metrology

• Inspec1on

• Calibra1on

• CleanRooms

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Nelson Air Corp.precision air bearing positioning

559Rt.13South,P.O.Box2,Milford,NH03055Tel:603‐673‐3908,Fax603‐672‐3008

e‐mail:info@nelsonair.comweb:www.nelsonair.com

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ATLAS‐101

AirBearings‐AProvenStandardforAccuracyAirbearingsaretheprovenstandardforsuperiorsmoothnessofmoBonandposiBoningcontrolinhighprecisionapplicaBons.TheATLASseriesstagesemployafullypreloadedunibodydovetailairbearingdesignwithlargebearingsurfacestoprovideexcellentmechanicalsBffnessandloadcapacitywhilemaintainingsmoothmoBon.

UnibodyconstricBonmeanstheairbearingsareintegratedintothecarriagecomponents,allowingustomaximizeairbearingsurfaceareawhilekeepingthedesigncompact.LargeairbearingsurfacessupporttheloadacrosstheenBrelengthofthecarriageplatesandprovideairfilmaveraging,greatlyincreasingsBffnessandaccuracy.

TheATLAS‐101usesadovetaildesignwithopposingairbearingstoprovideacBveairbearingpreload.UnlikeballbearingswhichrequireadjusBngpreloadtotradesmoothnessforaccuracy,airbearingsdeliverhighsmoothnessandhighsBffnessatthesameBme.

ManufacturedtoexacBngstandardsusingproprietaryinhousetechniques,ourprecisiongroundandassembledairbearingsdeliversuperiorpitch,yaw,roll,andstraightnesscharacterisBcs.Thenon‐contact,inherentlyfricBonlessnatureofairbearingsalsotranslatesintoincreasedreliabilityandavirtuallylimitlesslifeBmewithoutrequiringmaintenance.

DirectDriveLinearMotorDirectdrivelinearmotorshavebecomethestandardsoluBonformoBonsystemsrequiringhighacceleraBonandsmooth,accuratemoBon.TheATLASstage’snon‐contact,cogless,ironlesslinearservomotorhasnomagneBca`racBonbetweenthemotorcoilandbackiron,eliminaBngtheinfluenceofthemotoronaccuracyandenablingextremelysmoothmovement.

TwoStandardLinearEncoderOp1onsInordertomeetavarietyofapplicaBonrequirements,ATLASstagesareofferedwithtwoencoderopBons.

• SDEncoderOp1on:20micronsignalperiod,steelscalewith±5.0μmoverallaccuracy(higheraccuracyavailable)

• HDEncoderOp1on:4micronsignalperiod,glassscalewithupto±1.5μmoverallaccuracy

Interpola1onOp1ons:TheseencodersareofferedwithanumberofnaBveinterpolaBonopBonsorcanbeusedwithanexternalinterpolatorbuiltintothemoBoncontrollertomaximizespeedandresoluBon.

LaserCalibra1on:Whenorderedwithacontroller,stagescanbelasercalibratedatourfacilitytoincreaselinearaccuracyabovethatofthenaBvescaleaccuracy.

CablesandCableCarrierOneofenneglectedcomponentwhichcaninfluenceaccuracyandsmoothnessindemandingapplicaBonsisthecablecarrierassembly.InaddiBontotransferringmotorpowerandencodersignals,airbearingshavetheaddedrequirementofairtubing.

AnumberofhighqualitycablecarriersoluBonsnowexisttosolvethisproblem.ForpointtopointposiBoning,tradiBonalplasBclinkchainisadequate,forsmoothervelocityandse`lingathigherresoluBonsweofferflatcableassembliesofsiliconeandteflon.

• EZCableTrackOp1on:PlasBclinkchaincablecarrierwithroundhigh‐flexmotor,encoderandaircables.

• FFCableTrackOp1on:Flatcableassembly.

StageMoun1ngAccuratemounBngsurfacesarecriBcaltoproperoperaBonoftheairbearingstage.Becausethisisafullysupportedstage,theenBremounBngsurfaceneedstobeflatorthestraightnessandaccuracyofthestagewillbecompromised.MounBngsurfaceflatnessmustbe0.0001”overtheenBremounBngsurface.Forthehighestaccuracy,werecommendhavingNelsonAirintegratethestageontothemountfortesBngandadjustment.NelsonAircanalsoprovideaccuratemounBngsurfacesmadefromgranite,aluminumandcastiron.

Customiza1onandSystemsATLASstagescanbemodifiedwithavarietyofopBonstosuitanyapplicaBon.ThesemodificaBonsrangefromcustommounBngholepa`ernstointegraBonofmulBpleaxesforXYposiBoning.FullypreloadedairbearingsallowthesestagestooperateinanyorientaBonandapneumaBccounterbalancecanbefi`edforverBcaloperaBon.

Op1onsandAccessories:

• Protec1veBellows

• CustomCableTrackandCableOp1ons

• XYMul1‐AxisAssemblieswithprecisionalignment

• Pneuma1cCounterbalanceforver1calopera1on

• Rotaryaxesfordirectintegra1on

• GraniteBasesandvibra1onisola1onstands

• AirHandlingAssembliesandFi_ngs

• Mo1onControllerandAmplifiers

NelsonAirpridesitselfonprovidinghighqualityposi6oningsolu6onsforitscustomers.Pleasecontactusformoreinforma6on.

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Nelson Air Corp.precision air bearing positioning

559Rt.13South,P.O.Box2,Milford,NH03055Tel:603‐673‐3908,Fax603‐672‐3008

e‐mail:info@nelsonair.comweb:www.nelsonair.com

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ATLAS‐101

Specifica1on Value

TableSize 114x114mm(4.5x4.5in)

MaximumLoadNormal 100N(25lbs)

Transverse 40N(10lbs)

MaximumTravelSpeed 1000mm/s(40in/s)

Con1nuousLinearAccelera1on 1g‐10m/s2(384in/s2)(noload)PeakLinearAccelera1on 2g‐20m/s2(768in/s2)(noload)MotorType Non‐coggingironlesslinearbrushlessservomotorwithhallsensors

MotorCon1nuousForce 15N(3.4lbs)

MotorPeakForce 45N(10.0lbs)

EncoderType NoncontactopBcallinearencoder,opBcalhomesensorandmagneBclimits

EncoderResolu1onOp1onsSD 1.0μm,0.5μm,0.1μm,0.05μm,0.005μm

HD 0.2μm,0.02μm,0.01μm,0.001μm

RepeatabilitySD ±0.1μm(±4μin)(resoluBondependent)

HD ±0.04μm(±2μin)(resoluBondependent)

MovingCarriageMass 1.3kg(2.8lbs)

Opera1ngPressureandAirUse 80psi±5psi,<1scfm

MaterialandFinish HighStrengthAluminum,PrecisionGround,HardAnodizedwithCrashResistantCoaBng

>StageSpecifica1ons

Model ATLAS‐101‐050 ATLAS‐101‐100 ATLAS‐101‐160 ATLAS‐101‐210

StageTravel 50mm(1.9in) 100mm(3.9in) 160mm(6.3in) 210mm(8.3in)

LinearAccuracySD ±5.0μm(±200μin)

HD ±0.3μm(±12μin) ±0.3μm(±12μin) ±0.3μm(±12μin) ±0.5μm(±20μin)

RepeatabilitySD ±0.1μm(±4μin)(resoluBondependent)

HD ±0.04μm(±2μin)(resoluBondependent)

StraightnessandFlatness ±0.25μm(±10μin) ±0.40μm(±16μin) ±0.40μm(±16μin) ±0.50μm(±20μin)

Pitch/Roll/YawLocal 0.25arc‐sec/25mm

Maximum ±0.50arcsec(±3μrad) ±1.0arcsec(±5μrad) ±2.0arcsec(±10μrad) ±2.0arcsec(±10μrad)

StageWeight 2.9kg(6.5lbs) 3.2kg(7lbs) 3.9kg(8.5lbs) 4.3kg(9.5lbs)

>AccuracySpecifica1ons

Model ATLAS‐101‐250 ATLAS‐101‐310 ATLAS‐101‐350 ATLAS‐101‐400

StageTravel 250mm(9.85in) 310mm(12.2in) 350mm(13.78in) 400mm(15.75in)

LinearAccuracySD ±5.0μm(±200μin)

HD ±0.5μm(±20μin) ±0.5μm(±20μin) ±0.5μm(±20μin) ±0.75μm(±30μin)

RepeatabilitySD ±0.1μm(±4μin)(resoluBondependent)

HD ±0.04μm(±2μin)(resoluBondependent)

StraightnessandFlatness ±0.75μm(±30μin) ±1.00μm(±40μin) ±1.25μm(±50μin) ±1.5μm(±60μin)

Pitch/Roll/YawLocal 0.25arc‐sec/25mm

Maximum ±2.5arcsec(±12.5μrad) ±3.0arcsec(±15μrad) ±3.5arcsec(±17.5μrad) ±4.0arcsec(±20μrad)

StageWeight 4.8kg(10.5lbs) 5.3kg(11.5lbs) 5.7kg(12.5lbs) 6.2kg(13.5lbs)

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Nelson Air Corp.precision air bearing positioning

559Rt.13South,P.O.Box2,Milford,NH03055Tel:603‐673‐3908,Fax603‐672‐3008

e‐mail:info@nelsonair.comweb:www.nelsonair.com

Page:4of7

ATLAS‐101

>StageDimensions

ATLAS‐101‐050

ATLAS‐101‐100

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Nelson Air Corp.precision air bearing positioning

559Rt.13South,P.O.Box2,Milford,NH03055Tel:603‐673‐3908,Fax603‐672‐3008

e‐mail:info@nelsonair.comweb:www.nelsonair.com

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ATLAS‐101

>StageDimensions

ATLAS‐101‐160

ATLAS‐101‐210

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Nelson Air Corp.precision air bearing positioning

559Rt.13South,P.O.Box2,Milford,NH03055Tel:603‐673‐3908,Fax603‐672‐3008

e‐mail:info@nelsonair.comweb:www.nelsonair.com

Page:6of7

ATLAS‐101

>StageDimensions

ATLAS‐101‐250

ATLAS‐101‐310

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Nelson Air Corp.precision air bearing positioning

559Rt.13South,P.O.Box2,Milford,NH03055Tel:603‐673‐3908,Fax603‐672‐3008

e‐mail:info@nelsonair.comweb:www.nelsonair.com

Page:7of7

ATLAS‐101

>StageDimensions

ATLAS‐101‐350

ATLAS‐101‐400