attocube systems AG, Königinstr. 11a, D - 80539 München, Germany, Tel. 089-2877 809-0, Fax 089-2877 809-19, Web: www.attocube.com

Agenda

Products: Solutions for the Nanoworld

Key Data & Team

Motivation

Business Development

Attocube systems: from science to technology

What we do

• Precision positioners

Linear stagesRotatorsGoniometers

• Microscopes for extreme environment

Optical confocalNear Field Optical (SNOM)Atomic force (AFM)Scanning Tunneling (STM)Magnetic force (MFM)Probe stations

• November 2001

• Spin-Off from the University of Munich (Center for NanoScience)

• Industry Sector: Nanotechnology, Motion Control, Microscopy, Instrumentation

• Head Office: Munich

• Export Rate: 80%

• 20 Employees, soon 25

• Turnover 2007: € 4m

Awards

• Winner of Business Plan Competition Munich 2001• Nominee for the Philip-Morris Research Award 2004 • Bavarian Innovation Award 2006• Nominee for the Innovations Award of the German industry 2006• Nominee for the German Founders Award 2007

Key data

Management

� Dirk Haft, CEO� Khaled Karrai, CTO, also Center for NanoSciences� Stefan Reineck, Superv. Board � Angelika Küng, VP

Team

� 6 PhD physics, chemistry� 6 tech. engineers� 5 others

Team

NASA - Jet Propulsion Laboratory (JPL) und Goddart Space FlightCenter (GSFC), CalTech - California Institute of Technology, CornellUniversity, UC Berkeley, UC Santa Barbara, UC Los Angeles,UC San Diego, Yale University, Stanford University, SandiaNational Lab, Livermore National Lab, Berkeley National Lab,Los Alamos National Lab, NIST - National Institute of Standardand Technologies, University of Texas at Austin, IBM AlmadenResearch Center, Harvard University, Katholieke UniversiteitLeuven, Commissariat a l‘Energie Atomique, ENS Cachan, ESRF- European Synchrotron Radiation Facility, GHMFL - GrenobleHigh Magnetic Field Laboratory, Université Joseph Fourier, UniversitéPaul Sabatier-IRSAMC, CNRS Toulouse, CNRS Grenoble,EPFL - École Polytechnique Fédéral de Lausanne, Université deGenève, IBM Rüschlikon, ETH Zürich, Universität Zürich, DFG- Deutsche Forschungsgemeinschaft, Forschungszentrum Rossendorf,Universität Augsburg, Fritz-Haber-Institut der Max-Planck-Gesellschaft, Technische Universität Berlin, UniversitätHamburg, PTB - Physikalisch-Technische Bundesanstalt, LMU- Ludwig-Maximilians-Universität München, TUM - TechnischeUniversität München, FRMII - Forschungsreaktor München, MPI- Max-Planck-Institut für Polymerforschung, Toshiba ResearchEurope, Cambridge Research Laboratory, Cavendish Laboratory,UCL - University College London, Heriot-Watt University Edinburgh,University of Nottingham, RAL - Rutherford AppletonLaboratory, University of Surrey, Tokyo Metropolitan University,KEK - High Energy Accelerator Research Organization, Universityof Singapore, Technion Haifa Israel, TATA Institute of FundamentalResearch, The Australian National University, ...

FRMI

I

Our customers

GeographicDistribution:

40% US35% Europe

25% Asia

> 450 customers > 1500 positioners delivered and > 30 systems

Users world wide

Total Turnover 2007: 4 Mio. Euro / 5 m US$

ACS Revenue

0

2

4

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16

18

20

2002 2003 2004 2005 2006 2007 2008 2009 2010

Year

Mio

EU

R

Turnover and growth potential

The start in 2001

• November 2001, investor‘s lowest point (the dotcom bubble bursted!)

• Winner of Business Plan Competition Munich 2001, sarting funds = 25 K€

• Key patents on positioners, and microscope design

• Very sound guidance and advice from our business angel

• Moved immediately out of the university to face reality of real costs

• 2 people working full time

• Several customers “friends and fans” in the scientific community

Products: Solutions for the Nanoworld

Key Data & Team

Motivation

Business Development

From science to technology

Discrete energy levels in self-assembled quantum-dots

• J. Y. Marzin et. al. Phys. Rev. Lett. 73, 716 (1994)

• H. Drexler et al. Phys. Rev. Lett. 73, 2252 (1994)

|||| 1 ⟩⟩⟩⟩

|||| 0 ⟩⟩⟩⟩

• Scientific motivation: quantum information with solid state systems

• Investigate Q-bits in self assembled quantum dots

0 50100

150200

nm

0 50100

150200

nm

0 50100

150200

nm

Artificial atom of InGaAs quantum dots

Early experimental challenges

Wanted:

• Optical properties of single dot (emission, absorption)

• Single photon on demand

• Optical coherent control of spin states

• Investigation of a single quantum dot at a time

• Cryogenic temperatures

• High magnetic fields

• Very long time stability to explore a large parameter space

• Alternative microscopy techniques : SNOM and EFM

Requirements

Vibration isolation

High fieldMagnet

Bath Cryostat

Electronic controller

Microscopeinsert

Present art:

instrumentation developed

• nanometer sensitive positioning

along x,y,z over 5x5x5 mm

• operational at low temperature

• high magnetic field compatibility

Enabling solutions

objectiveNA=0.55

Titanium

photodetector

V

g

FWHM1.2 µm

4.2 K

10 mm

Inertial drive: slip-stick

Emission of a single quantum: artificial atom

X0

X1- X2-X3-

Gate voltage (V)

PL e

nerg

y(e

V)

1.255

1.265

1.270

1.275

0.0 +0.5-0.5

T = 4.2K

1.260

-1.0

R. Warburton et. al. Nature 405, 926 (2000)

B (tesla)

-9 -6 -3 0 3 6 9

(X2-) Vg = – 48 mV

K. Karrai et. al. Nature 427, 135 (2004)

Magnetic dependency as a function of charge

B (tesla)

-9 -6 -3 0 3 6 9

PL

en

erg

y(e

V)

1.260

1.265

(X1-) Vg = – 300 mV

1 electron 2 electrons

B (tesla)

-9 -6 -3 0 3 6 9

(X3-) Vg = +90 mV

3 electrons

Very high resolution laser spectroscopy

Detuning (GHz)-2 -1 0 1 2

Tra

nsm

issi

on

0.999

1.000

208 MHz

0.9 µeV

hν = 1.27 eV

• A. Högele et al., PRL 93 217401 (2004)

| , ⟩⟩⟩⟩

σ+

| ⟩⟩⟩⟩| ⟩⟩⟩⟩

| , ⟩⟩⟩⟩

• M. Atatüre et al., Science 312, 551 (2006)

f0 = 3.979 GHz

3.975 3.980 3.985

0.02

0.04

0.06

0.08

0.10

Absorp

tion (

%)

Microwave frequency (GHz)

340 kHz

µWave

• M. Kroner et al., (2007)

ConfocalMicroscopy

Atomic ForceMicroscopy

ScanningNearfield OpticalMicroscopy

ScanningTunnelingMicroscopy

Probing Station

Broad range of microscopy

Science and attocube systems

• Quantum dot physics – Quantum information technology

• Science of new materials : Carbon NanoTubes, semiconductor Nanorods

• Micro and Nano-Electro-Mechanic Systems , MEMS , NEMS

• Micro and Nano-Opto-Mechanic Systems , MOMS , NOMS

• Quantum optics and photonics

Products: Solutions for the Nanoworld

Key Data & Team

Motivation

Business Development

Technology tracks in attocube systems

Positioners Systems Instruments

• Inertial drive

Slip and Stick

Ultrasonic glider

• Microscopes

• Probe stations

• Electronics

ConfocalNear Field OpticsAtomic ForceTunneling

Metrology

• Position sensing

Resistive encodersOptical encoders

• Scanners

Electrical probing

Any direction - nanoprecise

Linear and rotational motion

Complete systems in extreme environment

NANOMANIPULATION* NANOTOOLING*

„NanoHand“

„ProbeStation“

Enabling technology through collaborations

• many OEM applications

• individual, customized design

• always sub-nanometer resolution, highest stability

• optimized mechanical design

Examples

Integration into industrial applications

Products: Solutions for the Nanoworld

Key Data & Team

Motivation

Business Development

DecBerlin (D)Bessy Users' Metting22

NovBoston (USA)MRS Fall21

OctSeattle (USA)AVS 5420

OctBerkeley, CA (USA)ALS Users' Meeting19

SepBrussels (B)EUCAS '0718

AugFt. Lauderdale (USA)M&M 200717

AugHong Kong (HK)The 7th IEEE International Conference on Nanotechnology16

JulBerlin (D)VUV XV (The 15th Int. Conf. on Vacuum Ultraviolet Physics)15

JulChattanooga (USA)CEC - ICMC 200714

JulGenovaEP2DS 17 + 13 MSS13

JulStockholmCongresses of the IUVSTA 200712

JulSingapur (SG)ICMAT 200711

JunLund (S)4th European Conference on Neutron Scattering, ECNS-200710

JunMünchen (D)Laser 20079

JunDijon (F)Surface Plasmon, Photonics 3 Conference8

JunSaskatoon, Saskatchewan (CA)Canadian Light Source 10th Annual Users' Meeting7

MaySanta Clara (USA)NSTI Nanotech6

MayBremen (D)euspen's 7th Intern. Conference5

MaySinsheim (D)Control 20074

MarRegensburg (D)DPG-Tagung3

MarDenver (USA)APS March Meeting2

FebMauterndorf (A)Winterschule Mauterndorf1

Year 2007Conferences of attocube systems

Marketing activities

Quelle: Häusler Technologie Consulting – Marktstudie 2006 bis 2007

F&E

Industrie

ACS Growth Potential by Segments

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Year

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Industrie

UHV

RT

BL

MIC

POS

Looking for long-term partners

and stable cooperations

Growth potential by segments

BU: Research Instrumentation BU: Industry

Weiterentwicklung und Etablierung von „attocube“ als Marktführer im Bereich Instrumentation für extreme Umgebungen(Positionierung und Mikroskopie).

Weitere Anwendungsfelder der Nanotechno-logie und im Bereich LifeScience werden derzeit evaluiert und teilweise schon mit Nachdruck erschlossen (z.B. BMBF-Förderung BioPhotonik II).

Entwicklung, Produktion und Vermarktung von volumenträchtigen Industrieanwendung für Nanopositionierung, unter eigener Marke sowie als OEM Zulieferer.

Märkte: UHV, SPM, REM, Photonics, Biotech

attocube systems AG

Innovation Technology

Flow between business segments

Thank you

attocube systems AGKöniginstrasse 11a RGB80539 MünchenGermany